[Scan]
initial_time=2016-02-16T03:27:39
final_time=2016-02-16T03:28:00
ip_count=19
run=1030
dataset=8
scan=588
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.17394E-1
ql1_imon=7.28273E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.59364E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=9.17101E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.29153E-10
mult1=-9.28657E-9
mult2=-2.70954E-9
rf_tmon=-4.62156E-3
rf_agc=3.29906E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=3.39711E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19612E1
lens5a_imon=2.00704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5347E1
cs_ef1b_imon=3.05029E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=2.18897E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32891E0
lens1_imon=2.98922E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.99538E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04428E1
cs_ea2_imon=1.54692E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.99816E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.48818E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=1.89803E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.28359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02151E1
cs_anode1_imon=3.27409E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.53553E-10
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.5186E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.59435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.9865E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.3704E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=2.00067E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34017E1
lens5b_imon=2.2056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73968E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15641E-1
os_ea2_imon=-2.45796E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65751E0
os_ef2alow_imon=-2.65104E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42206E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87444E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.29199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.20573E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56637E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=8.0258E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.91845E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66405E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=1.00894E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63009E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66719E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.4082E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76098E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.30428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.42236E-1
res40_imon=-2.64061E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.1718E-1	-7.97963E-1	-9.13095E0	-9.14216E0	5.14984E-3	9.34124E-2	2.73009E1	-3.26494E1	-3.2614E1	2.67986E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.97388E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.17442E-1	-7.9813E-1	-9.13119E0	-9.14211E0	5.19753E-3	9.32455E-2	2.73189E1	-3.27101E1	-3.26332E1	2.68016E1	1.73383E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17323E-1	-7.98035E-1	-9.13072E0	-9.14233E0	5.31673E-3	9.29117E-2	2.72941E1	-3.26868E1	-3.26121E1	2.67937E1	1.73374E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.97294E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.17323E-1	-7.97939E-1	-9.13084E0	-9.14223E0	5.6982E-3	9.33409E-2	2.73015E1	-3.26957E1	-3.26218E1	2.6792E1	1.73533E-7	2.51058E-3	2.51058E-3	6.31779E-3	1.98955E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17132E-1	-7.98273E-1	-9.13103E0	-9.1424E0	5.45979E-3	9.29594E-2	2.73552E1	-3.26071E1	-3.26661E1	2.68052E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17537E-1	-7.97725E-1	-9.13081E0	-9.14235E0	5.26905E-3	9.3317E-2	2.73196E1	-3.26301E1	-3.2622E1	2.67833E1	1.73454E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.17466E-1	-7.97653E-1	-9.13098E0	-9.14192E0	5.05447E-3	9.35316E-2	2.7279E1	-3.26228E1	-3.26133E1	2.68094E1	1.73533E-7	2.51575E-3	2.51575E-3	6.33863E-3	1.98465E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.17442E-1	-7.98273E-1	-9.13103E0	-9.14211E0	5.14984E-3	9.32932E-2	2.72763E1	-3.27035E1	-3.26026E1	2.67968E1	1.73605E-7	2.51642E-3	2.51642E-3	6.3074E-3	1.98186E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17442E-1	-7.98297E-1	-9.13069E0	-9.14187E0	5.17368E-3	9.36031E-2	2.7349E1	-3.2623E1	-3.2608E1	2.67427E1	1.73605E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.97643E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17657E-1	-7.98202E-1	-9.13093E0	-9.14178E0	5.38826E-3	9.32455E-2	2.7359E1	-3.26405E1	-3.26614E1	2.68314E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98247E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17609E-1	-7.98011E-1	-9.13098E0	-9.1419E0	5.126E-3	9.34124E-2	2.73914E1	-3.26493E1	-3.26334E1	2.68032E1	1.73533E-7	2.51783E-3	2.51783E-3	6.33341E-3	1.97975E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1749E-1	-7.98011E-1	-9.13103E0	-9.14197E0	5.36442E-3	9.3174E-2	2.73255E1	-3.26549E1	-3.26344E1	2.67938E1	1.7337E-7	2.51384E-3	2.51384E-3	6.30171E-3	1.97731E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17609E-1	-7.9813E-1	-9.13119E0	-9.14168E0	5.4121E-3	9.34124E-2	2.72949E1	-3.26506E1	-3.26981E1	2.6795E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17728E-1	-7.97987E-1	-9.13141E0	-9.14211E0	5.14984E-3	9.29832E-2	2.72234E1	-3.27035E1	-3.26711E1	2.67938E1	1.73529E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98764E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.17609E-1	-7.97653E-1	-9.13131E0	-9.14202E0	5.126E-3	9.31978E-2	2.73311E1	-3.26614E1	-3.259E1	2.67522E1	1.73454E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17466E-1	-7.97653E-1	-9.13112E0	-9.14202E0	5.6982E-3	9.3317E-2	2.73094E1	-3.26327E1	-3.26597E1	2.68498E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.01047E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17037E-1	-7.97892E-1	-9.13119E0	-9.1419E0	5.22137E-3	9.31263E-2	2.72992E1	-3.26968E1	-3.25794E1	2.68117E1	1.73528E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17323E-1	-7.98011E-1	-9.1311E0	-9.14173E0	5.17368E-3	9.30071E-2	2.73235E1	-3.26499E1	-3.26383E1	2.68119E1	1.73309E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9985E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17299E-1	-7.97653E-1	-9.13138E0	-9.14166E0	4.93526E-3	9.34362E-2	2.72862E1	-3.26585E1	-3.26555E1	2.68007E1	1.73454E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.00847E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17394E-1	-7.97868E-1	-9.131E0	-9.1419E0	4.8399E-3	9.31263E-2	2.73075E1	-3.26638E1	-3.26207E1	2.67956E1	1.73383E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9934E-1