[Scan]
initial_time=2016-02-16T03:29:06
final_time=2016-02-16T03:29:28
ip_count=19
run=1030
dataset=8
scan=591
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=7.16472E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.72095E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=8.91209E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.83692E-10
mult1=-9.21564E-9
mult2=-2.83105E-9
rf_tmon=-5.24095E-3
rf_agc=3.35333E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.72601E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05383E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53583E1
cs_ef1b_imon=3.07408E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04841E1
cs_ea1_imon=2.18083E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36194E0
lens1_imon=2.9149E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64877E1
os_ef1alow_imon=2.98986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03277E1
cs_ea2_imon=1.60638E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84509E1
cs_ef1a_imon=3.03515E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=3.87681E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=2.87982E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=1.90581E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6342E1
os_ef1bup_imon=3.09991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21788E0
cs_ionrep_imon=1.262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01774E1
cs_anode1_imon=3.28957E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.58631E-10
tplens_vset=1.4E-1
tplens_vmon=1.64615E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.52285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27027E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98721E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.37994E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=2.01023E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33475E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.15511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.95278E-1
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71334E1
cs_ef2a_imon=3.18766E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65403E0
os_ef2alow_imon=-2.36841E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34518E-1
os_ef2bup_imon=-5.12131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10728E1
os_restr2_imon=2.87274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.323E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.29987E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67972E1
iondef4_imon=1.08901E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89438E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.68877E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10065E0
cs_ionaccel_imon=-2.15256E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56264E1
einzel_imon=7.90368E-6
window_vset=0.0E0
window_vmon=2.16633E-1
window_imon=-9.42414E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39173E-4
mask2_vset=0.0E0
mask2_vmon=-1.86521E1
mask2_imon=-5.74416E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.23132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.98132E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68233E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66559E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=1.0087E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.47889E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29551E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-2.2253E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41339E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.43542E-1
res40_imon=-2.37548E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.1718E-1	-7.9844E-1	-9.13143E0	-9.14218E0	5.57899E-3	9.33409E-2	2.73189E1	-3.26681E1	-3.26098E1	2.68023E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0968E0	-8.17013E-1	-7.9782E-1	-9.13103E0	-9.14199E0	5.14984E-3	9.32932E-2	2.72941E1	-3.27074E1	-3.26217E1	2.67926E1	1.73454E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.17013E-1	-7.98392E-1	-9.13138E0	-9.14235E0	5.29289E-3	9.36747E-2	2.72987E1	-3.26561E1	-3.25947E1	2.6814E1	1.73303E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17561E-1	-7.98106E-1	-9.13148E0	-9.14195E0	5.22137E-3	9.37462E-2	2.72973E1	-3.26723E1	-3.26128E1	2.67986E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17466E-1	-7.98345E-1	-9.13153E0	-9.14173E0	5.65052E-3	9.35316E-2	2.73123E1	-3.26843E1	-3.26368E1	2.67956E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17132E-1	-7.97987E-1	-9.13155E0	-9.14171E0	5.29289E-3	9.36031E-2	2.73411E1	-3.26428E1	-3.26723E1	2.67926E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17227E-1	-7.98154E-1	-9.1311E0	-9.14185E0	5.72205E-3	9.35078E-2	2.72921E1	-3.27039E1	-3.26301E1	2.6813E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17132E-1	-7.98106E-1	-9.13126E0	-9.14216E0	5.60284E-3	9.32932E-2	2.72849E1	-3.26285E1	-3.26572E1	2.68466E1	1.73529E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98419E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.1687E-1	-7.98011E-1	-9.13112E0	-9.14207E0	5.36442E-3	9.35078E-2	2.72444E1	-3.26975E1	-3.25888E1	2.67992E1	1.73529E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.98419E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16464E-1	-7.97749E-1	-9.13117E0	-9.14187E0	5.22137E-3	9.30309E-2	2.73257E1	-3.26927E1	-3.26006E1	2.68136E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.1656E-1	-7.97987E-1	-9.13131E0	-9.1418E0	5.24521E-3	9.32217E-2	2.72937E1	-3.265E1	-3.25797E1	2.67781E1	1.73379E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98419E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16655E-1	-7.97749E-1	-9.13165E0	-9.14171E0	5.48363E-3	9.29832E-2	2.73297E1	-3.26819E1	-3.2632E1	2.67881E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1718E-1	-7.97725E-1	-9.13138E0	-9.14178E0	5.45979E-3	9.30786E-2	2.73249E1	-3.26573E1	-3.26615E1	2.68004E1	1.73303E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00673E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16965E-1	-7.98297E-1	-9.13105E0	-9.14168E0	5.67436E-3	9.34839E-2	2.7321E1	-3.26537E1	-3.26467E1	2.67926E1	1.73531E-7	2.50989E-3	2.50989E-3	6.29128E-3	1.9883E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17609E-1	-7.98178E-1	-9.13119E0	-9.14159E0	5.19753E-3	9.34124E-2	2.73003E1	-3.26651E1	-3.26494E1	2.6786E1	1.73605E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17275E-1	-7.97939E-1	-9.13143E0	-9.14173E0	5.43594E-3	9.33409E-2	2.73075E1	-3.26452E1	-3.26416E1	2.67848E1	1.73529E-7	2.51007E-3	2.51007E-3	6.28006E-3	1.98247E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17204E-1	-7.98273E-1	-9.13136E0	-9.14173E0	5.31673E-3	9.32217E-2	2.72618E1	-3.26446E1	-3.26476E1	2.67686E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17561E-1	-7.98035E-1	-9.13117E0	-9.14185E0	5.43594E-3	9.30786E-2	2.72997E1	-3.26176E1	-3.26242E1	2.67764E1	1.73529E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98075E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.17299E-1	-7.98392E-1	-9.13129E0	-9.14187E0	5.84126E-3	9.32693E-2	2.73255E1	-3.26681E1	-3.26422E1	2.67505E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97731E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16965E-1	-7.98225E-1	-9.131E0	-9.14176E0	5.26905E-3	9.3174E-2	2.73476E1	-3.27027E1	-3.26231E1	2.67972E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9985E-1