[Scan]
initial_time=2016-02-16T03:32:01
final_time=2016-02-16T03:32:23
ip_count=19
run=1030
dataset=8
scan=597
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=6.71482E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.55358E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=7.52377E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.14638E-10
mult1=-1.01141E-8
mult2=-2.68406E-9
rf_tmon=-8.09608E-3
rf_agc=2.9575E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.33154E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.33588E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19208E1
lens5a_imon=2.00759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12561E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.05298E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0456E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.19324E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35934E0
lens1_imon=2.89104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=3.00108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.55372E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.52943E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=2.90774E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=1.93729E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27072E0
cs_ionrep_imon=1.25848E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91819E2
cs_nozzle_imon=1.93885E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=6.61254E-10
tplens_vset=1.4E-1
tplens_vmon=1.64023E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.55372E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.56382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98926E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.46768E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33922E0
ionrepsh_imon=1.98704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33039E1
lens5b_imon=2.2055E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.34037E-1
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61618E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65589E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10613E1
os_restr2_imon=2.89188E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.33605E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.28317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.12726E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.82123E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=2.3917E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.98697E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92701E3
multa_neg_imon=7.62795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50084E3
multb_neg_imon=7.55945E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27224E0
defgridb_imon=6.76997E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33901E1
os_fil1_imon=5.16665E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.95372E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66796E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30756E1
cs_fil1_imon=1.00919E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63249E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.04612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58575E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98335E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16727E-1	-7.98059E-1	-9.13148E0	-9.14192E0	5.67436E-3	9.32455E-2	2.73305E1	-3.26673E1	-3.26655E1	2.6781E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99803E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16798E-1	-7.98345E-1	-9.13157E0	-9.14204E0	5.62668E-3	9.34601E-2	2.72895E1	-3.26699E1	-3.26014E1	2.6774E1	1.73454E-7	2.5199E-3	2.5199E-3	6.33211E-3	2.00064E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16917E-1	-7.9782E-1	-9.1315E0	-9.14211E0	5.45979E-3	9.34601E-2	2.72761E1	-3.26687E1	-3.26835E1	2.67908E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16965E-1	-7.97486E-1	-9.13162E0	-9.14195E0	5.19753E-3	9.34839E-2	2.73033E1	-3.2648E1	-3.26095E1	2.68214E1	1.73605E-7	2.52262E-3	2.52262E-3	6.31251E-3	1.99337E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16751E-1	-7.97868E-1	-9.13157E0	-9.1418E0	5.57899E-3	9.32932E-2	2.73159E1	-3.26831E1	-3.25828E1	2.67935E1	1.73528E-7	2.51248E-3	2.51248E-3	6.32978E-3	1.9852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.17132E-1	-7.98178E-1	-9.13157E0	-9.14192E0	5.24521E-3	9.30071E-2	2.72672E1	-3.26693E1	-3.26254E1	2.67805E1	1.73605E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99401E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.17037E-1	-7.9782E-1	-9.132E0	-9.14192E0	5.03063E-3	9.32693E-2	2.72739E1	-3.26687E1	-3.25791E1	2.68328E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9934E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16417E-1	-7.9782E-1	-9.13167E0	-9.14195E0	5.45979E-3	9.3317E-2	2.73339E1	-3.2623E1	-3.2638E1	2.67842E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16536E-1	-7.97701E-1	-9.13143E0	-9.14195E0	5.07832E-3	9.31978E-2	2.72624E1	-3.26903E1	-3.259E1	2.67758E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16774E-1	-7.98011E-1	-9.13191E0	-9.1419E0	5.4121E-3	9.34601E-2	2.73345E1	-3.26909E1	-3.25779E1	2.68082E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16727E-1	-7.98082E-1	-9.13203E0	-9.14187E0	5.38826E-3	9.36031E-2	2.72985E1	-3.26681E1	-3.26266E1	2.67613E1	1.73529E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16655E-1	-7.98178E-1	-9.13203E0	-9.14178E0	5.29289E-3	9.35555E-2	2.73796E1	-3.26218E1	-3.26224E1	2.68052E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16846E-1	-7.9813E-1	-9.13169E0	-9.14192E0	5.19753E-3	9.3174E-2	2.72979E1	-3.26314E1	-3.26561E1	2.68358E1	1.73529E-7	2.5199E-3	2.5199E-3	6.35692E-3	1.98075E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16774E-1	-7.98035E-1	-9.13153E0	-9.14176E0	5.07832E-3	9.32455E-2	2.72832E1	-3.26592E1	-3.25801E1	2.67916E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16727E-1	-7.98178E-1	-9.13122E0	-9.1419E0	5.07832E-3	9.31263E-2	2.72799E1	-3.26873E1	-3.26212E1	2.68052E1	1.73559E-7	2.51548E-3	2.51548E-3	6.30408E-3	1.99143E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16917E-1	-7.98059E-1	-9.13146E0	-9.1418E0	5.36442E-3	9.3317E-2	2.73387E1	-3.26362E1	-3.26813E1	2.67884E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16464E-1	-7.98225E-1	-9.1316E0	-9.14195E0	5.38826E-3	9.32932E-2	2.7301E1	-3.26909E1	-3.26048E1	2.68192E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3514E-3	1.9963E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16751E-1	-7.98297E-1	-9.13148E0	-9.14185E0	5.65052E-3	9.32455E-2	2.73411E1	-3.26386E1	-3.26242E1	2.68112E1	1.73455E-7	2.51647E-3	2.51647E-3	6.31555E-3	1.98456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16488E-1	-7.98154E-1	-9.13146E0	-9.1419E0	5.55515E-3	9.34601E-2	2.73652E1	-3.26735E1	-3.26266E1	2.6786E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16679E-1	-7.98416E-1	-9.1316E0	-9.14211E0	5.6982E-3	9.33647E-2	2.73051E1	-3.26644E1	-3.26396E1	2.68124E1	1.73454E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.99456E-1