[Scan]
initial_time=2016-02-16T03:32:31
final_time=2016-02-16T03:32:51
ip_count=19
run=1030
dataset=8
scan=598
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=6.57392E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.76351E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=7.01654E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.78578E-10
mult1=-1.10755E-8
mult2=-2.81243E-9
rf_tmon=-4.51866E-3
rf_agc=3.3167E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=3.49545E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.7627E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.07322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=2.18366E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.98947E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.58302E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=3.01936E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.63898E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=1.87396E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.11076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=1.28111E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=3.28382E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.41203E-10
tplens_vset=1.4E-1
tplens_vmon=1.56062E0
tplens_imon=1.57697E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2656E1
iondef2_imon=1.60001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.43955E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19488E0
ionrepsh_imon=2.03536E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34082E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7493E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15641E-1
os_ea2_imon=-3.44899E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06168E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63203E0
os_ef2alow_imon=-2.45295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47998E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=2.87131E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.33715E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.27392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73026E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67745E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.86031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=2.60437E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1284E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=1.82933E-1
window_imon=-7.605E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-5.06807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=8.14614E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.82948E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.99937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51777E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=5.14434E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.884E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66833E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30743E1
cs_fil1_imon=1.00926E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62992E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66723E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.21909E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53824E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.32745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29703E-3
inlet_lpb_pmon=1.99119E-1
chamber_ion_pmon=1.73533E-7
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65201E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16798E-1	-7.98464E-1	-9.13155E0	-9.14195E0	5.45979E-3	9.34839E-2	2.73051E1	-3.26758E1	-3.26028E1	2.67781E1	1.73605E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.97984E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16584E-1	-7.98368E-1	-9.13146E0	-9.14207E0	5.14984E-3	9.33886E-2	2.72953E1	-3.26603E1	-3.26401E1	2.67995E1	1.73532E-7	2.51287E-3	2.51287E-3	6.31269E-3	1.96904E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.1656E-1	-7.98082E-1	-9.13126E0	-9.14221E0	5.14984E-3	9.30786E-2	2.73015E1	-3.26801E1	-3.2611E1	2.681E1	1.73528E-7	2.51248E-3	2.51248E-3	6.32418E-3	1.98169E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16607E-1	-7.98154E-1	-9.13146E0	-9.14207E0	5.31673E-3	9.30786E-2	2.73381E1	-3.26236E1	-3.26319E1	2.68151E1	1.73454E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17037E-1	-7.98059E-1	-9.13141E0	-9.14195E0	5.48363E-3	9.31025E-2	2.73207E1	-3.26344E1	-3.26398E1	2.68022E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.1706E-1	-7.98202E-1	-9.13122E0	-9.14183E0	5.34058E-3	9.32217E-2	2.7308E1	-3.26756E1	-3.26337E1	2.68545E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16703E-1	-7.98202E-1	-9.13119E0	-9.14173E0	5.55515E-3	9.30786E-2	2.72931E1	-3.26567E1	-3.25906E1	2.67824E1	1.73457E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16751E-1	-7.98297E-1	-9.13129E0	-9.14156E0	5.38826E-3	9.31025E-2	2.72889E1	-3.26735E1	-3.26284E1	2.6837E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16679E-1	-7.98249E-1	-9.13134E0	-9.14195E0	5.45979E-3	9.35555E-2	2.72955E1	-3.26873E1	-3.2611E1	2.68124E1	1.73454E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.00847E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16488E-1	-7.98154E-1	-9.13115E0	-9.14202E0	5.24521E-3	9.3317E-2	2.72787E1	-3.26404E1	-3.26356E1	2.68196E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16774E-1	-7.98321E-1	-9.13134E0	-9.1423E0	5.19753E-3	9.31501E-2	2.73267E1	-3.26591E1	-3.2599E1	2.68058E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1687E-1	-7.98059E-1	-9.13167E0	-9.14164E0	5.65052E-3	9.32932E-2	2.72516E1	-3.2599E1	-3.26494E1	2.68154E1	1.73529E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.17037E-1	-7.97606E-1	-9.13115E0	-9.14187E0	5.36442E-3	9.32693E-2	2.72955E1	-3.26927E1	-3.26266E1	2.68322E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1687E-1	-7.98249E-1	-9.13107E0	-9.14202E0	5.00679E-3	9.31978E-2	2.73141E1	-3.26645E1	-3.26362E1	2.67962E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98764E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16989E-1	-7.98106E-1	-9.13134E0	-9.14183E0	5.14984E-3	9.31978E-2	2.73069E1	-3.26753E1	-3.26482E1	2.67247E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.1718E-1	-7.9782E-1	-9.131E0	-9.1419E0	5.29289E-3	9.32932E-2	2.72877E1	-3.26801E1	-3.26188E1	2.67938E1	1.73529E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16941E-1	-7.97701E-1	-9.13107E0	-9.14178E0	5.38826E-3	9.32217E-2	2.73246E1	-3.26756E1	-3.26437E1	2.68076E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16894E-1	-7.98178E-1	-9.13117E0	-9.14202E0	5.36442E-3	9.3174E-2	2.72781E1	-3.26993E1	-3.25858E1	2.67577E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9883E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16965E-1	-7.97939E-1	-9.13105E0	-9.14214E0	5.38826E-3	9.3174E-2	2.73011E1	-3.2655E1	-3.26385E1	2.68099E1	1.73454E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.97903E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.1687E-1	-7.98368E-1	-9.13138E0	-9.14195E0	5.57899E-3	9.31501E-2	2.73026E1	-3.2656E1	-3.26142E1	2.67745E1	1.73533E-7	2.51575E-3	2.51575E-3	6.29703E-3	1.99119E-1