[Scan]
initial_time=2016-02-16T03:33:54
final_time=2016-02-16T03:34:14
ip_count=19
run=1030
dataset=8
scan=601
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=6.77896E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=3.10564E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.68728E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.98903E-10
mult1=-1.06106E-8
mult2=-2.88004E-9
rf_tmon=-5.18786E-3
rf_agc=3.41999E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.53086E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19488E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.06176E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04548E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05183E1
cs_ea1_imon=2.1918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.63882E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04239E1
cs_ea2_imon=1.59859E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=3.02874E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.07207E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=2.88973E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=1.86476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=1.27332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=3.29773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.61385E-10
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-2.2102E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26826E1
iondef2_imon=1.61134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.95262E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=2.02438E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74223E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49266E-1
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.18026E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62624E0
os_ef2alow_imon=-2.31394E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25988E-1
os_ef2bup_imon=-5.16365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10602E1
os_restr2_imon=2.87861E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.33078E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.3038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7298E1
iondef1_imon=1.07759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09928E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88278E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.96247E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10697E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.85465E-6
window_vset=0.0E0
window_vmon=2.39696E-1
window_imon=-1.01767E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.15511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.87903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.95501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.54279E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=4.90687E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9535E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66658E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30765E1
cs_fil1_imon=1.00976E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66714E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.3077E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69897E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15359E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.513E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16798E-1	-7.97701E-1	-9.13153E0	-9.14214E0	5.14984E-3	9.31025E-2	2.73193E1	-3.26526E1	-3.26219E1	2.6807E1	1.73454E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16536E-1	-7.98202E-1	-9.1316E0	-9.14223E0	5.57899E-3	9.32932E-2	2.734E1	-3.2645E1	-3.2604E1	2.68106E1	1.73457E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16822E-1	-7.97892E-1	-9.1315E0	-9.14195E0	5.6982E-3	9.32217E-2	2.73187E1	-3.2685E1	-3.2636E1	2.6789E1	1.73528E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16298E-1	-7.98082E-1	-9.13162E0	-9.14204E0	5.4121E-3	9.26733E-2	2.72715E1	-3.26874E1	-3.26307E1	2.68111E1	1.73387E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99562E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16441E-1	-7.98106E-1	-9.13155E0	-9.14204E0	5.50747E-3	9.30071E-2	2.7352E1	-3.26476E1	-3.26188E1	2.67788E1	1.73529E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.1687E-1	-7.97892E-1	-9.13179E0	-9.14214E0	5.36442E-3	9.32217E-2	2.73105E1	-3.26699E1	-3.26044E1	2.6819E1	1.73605E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16774E-1	-7.98249E-1	-9.13141E0	-9.14211E0	5.65052E-3	9.32455E-2	2.73015E1	-3.26591E1	-3.26567E1	2.67722E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16917E-1	-7.98059E-1	-9.1315E0	-9.14199E0	5.62668E-3	9.32932E-2	2.73281E1	-3.26944E1	-3.26254E1	2.6798E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.97559E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16441E-1	-7.98202E-1	-9.13136E0	-9.14178E0	5.45979E-3	9.32932E-2	2.73249E1	-3.2635E1	-3.26356E1	2.68022E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98322E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16679E-1	-7.9813E-1	-9.13153E0	-9.14204E0	5.76973E-3	9.35078E-2	2.73075E1	-3.26891E1	-3.26225E1	2.6792E1	1.73531E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.96973E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16655E-1	-7.98345E-1	-9.1315E0	-9.14197E0	5.76973E-3	9.36508E-2	2.72817E1	-3.26308E1	-3.26242E1	2.68232E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9917E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16607E-1	-7.98345E-1	-9.13124E0	-9.14185E0	5.38826E-3	9.34124E-2	2.73198E1	-3.26561E1	-3.2652E1	2.6801E1	1.73303E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16607E-1	-7.98202E-1	-9.13131E0	-9.14154E0	5.76973E-3	9.32217E-2	2.73562E1	-3.26476E1	-3.26242E1	2.68142E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9911E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16607E-1	-7.97939E-1	-9.13129E0	-9.14168E0	5.36442E-3	9.29832E-2	2.72865E1	-3.26993E1	-3.26356E1	2.681E1	1.73457E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16226E-1	-7.9844E-1	-9.13126E0	-9.14192E0	5.4121E-3	9.31263E-2	2.7299E1	-3.26627E1	-3.26517E1	2.6768E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31858E-3	1.99401E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16059E-1	-7.97939E-1	-9.13134E0	-9.14185E0	5.36442E-3	9.3317E-2	2.7298E1	-3.2626E1	-3.2659E1	2.6783E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.1625E-1	-7.98273E-1	-9.13105E0	-9.14197E0	5.34058E-3	9.36747E-2	2.73118E1	-3.26725E1	-3.25942E1	2.68106E1	1.73454E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16679E-1	-7.97939E-1	-9.13105E0	-9.14216E0	5.38826E-3	9.33647E-2	2.73063E1	-3.26644E1	-3.26413E1	2.68184E1	1.73605E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1656E-1	-7.9813E-1	-9.13157E0	-9.14204E0	5.17368E-3	9.34362E-2	2.73257E1	-3.26632E1	-3.26496E1	2.68018E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98764E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.17037E-1	-7.97892E-1	-9.13143E0	-9.14202E0	5.55515E-3	9.32693E-2	2.7298E1	-3.26826E1	-3.2629E1	2.68082E1	1.73605E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9883E-1