[Scan]
initial_time=2016-02-16T03:34:21
final_time=2016-02-16T03:34:41
ip_count=19
run=1030
dataset=8
scan=602
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=6.41811E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.8156E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=6.86955E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.77552E-10
mult1=-1.02796E-8
mult2=-2.85064E-9
rf_tmon=-1.21782E-3
rf_agc=3.7462E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.71087E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.81533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.09695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.0242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0524E1
cs_ea1_imon=2.1781E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.5941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=3.85082E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=2.88539E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=1.90737E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=1.27254E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.29336E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.59978E-10
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.59446E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.54803E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=2.02777E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.20225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75198E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.84168E-1
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10613E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.29831E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72697E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87351E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.65968E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08629E0
cs_ionaccel_imon=-1.98521E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92588E3
multa_neg_imon=7.0872E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.58469E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53991E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=4.7582E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66877E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=1.00892E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66922E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.01048E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16679E-1	-7.97725E-1	-9.13153E0	-9.1419E0	5.84126E-3	9.34362E-2	2.73305E1	-3.2662E1	-3.26313E1	2.68603E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99977E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16536E-1	-7.98249E-1	-9.13153E0	-9.1419E0	5.45979E-3	9.35793E-2	2.73326E1	-3.26753E1	-3.26541E1	2.67633E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16727E-1	-7.98082E-1	-9.13157E0	-9.14214E0	5.8651E-3	9.32932E-2	2.7319E1	-3.2648E1	-3.26052E1	2.68574E1	1.73605E-7	2.52473E-3	2.52473E-3	6.29624E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-8.17037E-1	-7.97844E-1	-9.13136E0	-9.14228E0	5.26905E-3	9.32455E-2	2.72931E1	-3.26699E1	-3.26212E1	2.68274E1	1.73457E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16798E-1	-7.98011E-1	-9.13136E0	-9.14197E0	5.8651E-3	9.32217E-2	2.73622E1	-3.26675E1	-3.26098E1	2.67734E1	1.73454E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.98247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16655E-1	-7.98178E-1	-9.13146E0	-9.14204E0	5.48363E-3	9.3174E-2	2.72883E1	-3.26645E1	-3.2635E1	2.68575E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.1706E-1	-7.97701E-1	-9.13146E0	-9.14211E0	5.57899E-3	9.31263E-2	2.73074E1	-3.26676E1	-3.26419E1	2.68215E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16393E-1	-7.98011E-1	-9.13146E0	-9.14211E0	5.29289E-3	9.30309E-2	2.7314E1	-3.26508E1	-3.26069E1	2.67483E1	1.7339E-7	2.51575E-3	2.51575E-3	6.323E-3	1.98792E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16536E-1	-7.98297E-1	-9.13167E0	-9.14228E0	5.55515E-3	9.32932E-2	2.73039E1	-3.26561E1	-3.2632E1	2.68238E1	1.73445E-7	2.50949E-3	2.50949E-3	6.34231E-3	1.991E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1656E-1	-7.97987E-1	-9.13141E0	-9.14223E0	5.34058E-3	9.32932E-2	2.72775E1	-3.26627E1	-3.26458E1	2.68358E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16536E-1	-7.98368E-1	-9.13162E0	-9.14237E0	5.38826E-3	9.31263E-2	2.73039E1	-3.27107E1	-3.26386E1	2.68292E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16035E-1	-7.9844E-1	-9.13124E0	-9.14192E0	5.50747E-3	9.30786E-2	2.73287E1	-3.27263E1	-3.26419E1	2.68004E1	1.73454E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16536E-1	-7.98225E-1	-9.13136E0	-9.14204E0	5.45979E-3	9.31978E-2	2.72865E1	-3.26651E1	-3.26512E1	2.67271E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16464E-1	-7.9813E-1	-9.13174E0	-9.14211E0	5.48363E-3	9.31025E-2	2.73075E1	-3.26494E1	-3.2638E1	2.6813E1	1.73454E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16965E-1	-7.97939E-1	-9.13172E0	-9.14209E0	5.74589E-3	9.3174E-2	2.73493E1	-3.26897E1	-3.25989E1	2.67862E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32896E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16321E-1	-7.98106E-1	-9.13167E0	-9.1424E0	5.4121E-3	9.32932E-2	2.7318E1	-3.26756E1	-3.26444E1	2.67751E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-8.16512E-1	-7.97963E-1	-9.1316E0	-9.14235E0	5.60284E-3	9.34839E-2	2.73201E1	-3.26789E1	-3.26567E1	2.684E1	1.73528E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.99048E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16894E-1	-7.97939E-1	-9.13179E0	-9.14226E0	5.14984E-3	9.37223E-2	2.73187E1	-3.26272E1	-3.26101E1	2.67949E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16393E-1	-7.9782E-1	-9.13131E0	-9.14185E0	5.55515E-3	9.32455E-2	2.73057E1	-3.26825E1	-3.26122E1	2.67836E1	1.73454E-7	2.51225E-3	2.51225E-3	6.27461E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16607E-1	-7.98035E-1	-9.13117E0	-9.14202E0	5.126E-3	9.33409E-2	2.72697E1	-3.26579E1	-3.26248E1	2.68034E1	1.73383E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98491E-1