[Scan]
initial_time=2016-02-16T03:34:49
final_time=2016-02-16T03:35:09
ip_count=19
run=1030
dataset=8
scan=603
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=6.78909E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=3.01588E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=6.26004E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.90689E-10
mult1=-1.00294E-8
mult2=-2.76452E-9
rf_tmon=1.31957E-4
rf_agc=3.7287E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.78561E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61183E0
bslens_imon=2.76409E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19973E1
lens5a_imon=1.98323E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05263E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.05759E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.0217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04785E1
cs_ea1_imon=2.19458E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36329E0
lens1_imon=2.77452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64214E1
os_ef1alow_imon=3.00824E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03829E1
cs_ea2_imon=1.57721E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8462E1
cs_ef1a_imon=3.00129E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.71408E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=2.89633E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15103E1
os_ea1_imon=1.90362E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63861E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25731E0
cs_ionrep_imon=1.26087E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93559E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01589E1
cs_anode1_imon=3.28104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.74987E-10
tplens_vset=1.4E-1
tplens_vmon=1.57596E0
tplens_imon=-3.61016E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.52923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.60397E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.9837E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.49188E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26716E0
ionrepsh_imon=2.0239E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.20153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.80499E-1
os_ea2_imon=-6.11303E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00765E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70765E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65983E0
os_ef2alow_imon=-2.47728E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3178E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10544E1
os_restr2_imon=2.86506E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31632E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0196E1
cs_anode2_imon=2.30033E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.11626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.11735E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89753E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=2.77615E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-1.95599E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56127E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.4375E-1
window_imon=-9.34263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.61687E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.38977E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.31444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63562E0
defgridb_imon=6.58444E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33906E1
os_fil1_imon=4.45508E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47855E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30726E1
cs_fil1_imon=1.00713E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62789E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66771E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29481E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23443E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54961E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-2.25216E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43161E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22345E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.48811E-1
res40_imon=-2.56416E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16345E-1	-7.97939E-1	-9.13134E0	-9.14187E0	5.03063E-3	9.31263E-2	2.72793E1	-3.26482E1	-3.2611E1	2.67878E1	1.73531E-7	2.52276E-3	2.52276E-3	6.29128E-3	1.9917E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.17227E-1	-7.97772E-1	-9.13124E0	-9.14197E0	5.50747E-3	9.30786E-2	2.73443E1	-3.26493E1	-3.26346E1	2.68107E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16989E-1	-7.97963E-1	-9.13134E0	-9.14183E0	5.65052E-3	9.35078E-2	2.72958E1	-3.26457E1	-3.2637E1	2.67532E1	1.73374E-7	2.51136E-3	2.51136E-3	6.3074E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16846E-1	-7.9844E-1	-9.13141E0	-9.14195E0	5.05447E-3	9.34124E-2	2.73015E1	-3.26903E1	-3.25948E1	2.678E1	1.73457E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17108E-1	-7.97772E-1	-9.13141E0	-9.14171E0	5.36442E-3	9.32217E-2	2.73423E1	-3.26844E1	-3.26124E1	2.68065E1	1.73531E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.98322E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16917E-1	-7.97796E-1	-9.13162E0	-9.1414E0	5.19753E-3	9.33409E-2	2.72898E1	-3.26838E1	-3.2629E1	2.6834E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.17299E-1	-7.98178E-1	-9.13169E0	-9.14166E0	5.29289E-3	9.33409E-2	2.72883E1	-3.26512E1	-3.26302E1	2.67782E1	1.73531E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16727E-1	-7.98297E-1	-9.13157E0	-9.14154E0	5.48363E-3	9.36031E-2	2.72642E1	-3.26753E1	-3.26218E1	2.68292E1	1.73303E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.1656E-1	-7.97772E-1	-9.13146E0	-9.14152E0	5.50747E-3	9.3174E-2	2.73228E1	-3.26408E1	-3.2659E1	2.68204E1	1.73457E-7	2.51525E-3	2.51525E-3	6.34518E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16679E-1	-7.97987E-1	-9.13155E0	-9.14159E0	5.4121E-3	9.32932E-2	2.72642E1	-3.26639E1	-3.2635E1	2.68226E1	1.73454E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16941E-1	-7.98011E-1	-9.13169E0	-9.14166E0	5.67436E-3	9.30786E-2	2.73285E1	-3.26621E1	-3.26248E1	2.67259E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28279E-3	1.98851E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16607E-1	-7.98106E-1	-9.13179E0	-9.14147E0	5.34058E-3	9.31263E-2	2.73357E1	-3.26627E1	-3.26116E1	2.67541E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17013E-1	-7.97629E-1	-9.13157E0	-9.14183E0	5.14984E-3	9.3317E-2	2.73273E1	-3.26669E1	-3.26248E1	2.67722E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.98661E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16822E-1	-7.97892E-1	-9.13162E0	-9.1418E0	5.6982E-3	9.32932E-2	2.73087E1	-3.26585E1	-3.26675E1	2.68202E1	1.73528E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.99048E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17013E-1	-7.97796E-1	-9.13169E0	-9.14187E0	5.57899E-3	9.34601E-2	2.73165E1	-3.26663E1	-3.2644E1	2.68136E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97559E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16536E-1	-7.97749E-1	-9.13153E0	-9.14195E0	5.126E-3	9.32217E-2	2.73117E1	-3.26693E1	-3.2635E1	2.68364E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.97478E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16989E-1	-7.97653E-1	-9.13146E0	-9.14183E0	5.65052E-3	9.32217E-2	2.72762E1	-3.26549E1	-3.26266E1	2.67692E1	1.73528E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.96597E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1706E-1	-7.97844E-1	-9.13129E0	-9.14183E0	5.53131E-3	9.29117E-2	2.73177E1	-3.26765E1	-3.26122E1	2.68226E1	1.73459E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.97897E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16703E-1	-7.98225E-1	-9.13148E0	-9.14159E0	5.38826E-3	9.31501E-2	2.73417E1	-3.26997E1	-3.26555E1	2.67856E1	1.73529E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98075E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16631E-1	-7.98059E-1	-9.13134E0	-9.14183E0	5.48363E-3	9.3174E-2	2.72997E1	-3.26795E1	-3.26218E1	2.6813E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1