[Scan]
initial_time=2016-02-16T03:35:44
final_time=2016-02-16T03:36:04
ip_count=19
run=1030
dataset=8
scan=605
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=6.2325E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.85172E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=5.9005E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.91893E-10
mult1=-1.03424E-8
mult2=-2.76851E-9
rf_tmon=-3.68329E-3
rf_agc=3.39765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.65543E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.85138E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20139E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.0528E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.07532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.20369E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4044E0
lens1_imon=2.79731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=3.01333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03432E1
cs_ea2_imon=1.5685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83962E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.72994E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=2.89837E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=1.90809E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19983E0
cs_ionrep_imon=1.26605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.30598E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=6.71268E-10
tplens_vset=1.4E-1
tplens_vmon=1.6138E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26603E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98681E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.63791E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.98956E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.21667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75925E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46917E-1
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.20903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62639E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13932E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.31164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67763E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90552E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.86114E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02034E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-3.70628E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.95742E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=5.89757E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.55398E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.3021E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66606E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00982E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6293E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66897E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86417E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33734E-3
inlet_lpb_pmon=1.9914E-1
chamber_ion_pmon=1.7353E-7
chamber_cvt_pmon=2.5143E-3
foreline_cvt_pmon=2.5143E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91728E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16321E-1	-7.98178E-1	-9.13157E0	-9.14204E0	5.43594E-3	9.3627E-2	2.73594E1	-3.26815E1	-3.26408E1	2.67914E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.99977E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16655E-1	-7.98082E-1	-9.13143E0	-9.14209E0	5.72205E-3	9.34839E-2	2.73388E1	-3.26689E1	-3.2626E1	2.67986E1	1.73309E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.1656E-1	-7.97892E-1	-9.13143E0	-9.14211E0	5.4121E-3	9.33409E-2	2.73128E1	-3.26773E1	-3.2649E1	2.68112E1	1.73605E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.1656E-1	-7.98249E-1	-9.13126E0	-9.14166E0	5.19753E-3	9.32455E-2	2.72868E1	-3.26472E1	-3.26496E1	2.6813E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16917E-1	-7.98273E-1	-9.13131E0	-9.1418E0	5.24521E-3	9.31978E-2	2.73081E1	-3.26356E1	-3.26248E1	2.68226E1	1.73529E-7	2.50789E-3	2.50789E-3	6.31837E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16822E-1	-7.98011E-1	-9.13143E0	-9.1419E0	5.26905E-3	9.35078E-2	2.72829E1	-3.27071E1	-3.2611E1	2.67932E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.97815E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16703E-1	-7.98035E-1	-9.13138E0	-9.14211E0	5.65052E-3	9.34362E-2	2.73116E1	-3.26402E1	-3.26478E1	2.67601E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.97045E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.16631E-1	-7.98464E-1	-9.13124E0	-9.1419E0	5.29289E-3	9.33886E-2	2.72763E1	-3.26364E1	-3.26597E1	2.6772E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.97903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16512E-1	-7.97844E-1	-9.13122E0	-9.14199E0	5.45979E-3	9.32932E-2	2.73339E1	-3.26494E1	-3.2629E1	2.6807E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16512E-1	-7.97939E-1	-9.1315E0	-9.14199E0	5.17368E-3	9.30548E-2	2.72763E1	-3.26536E1	-3.26236E1	2.68112E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16822E-1	-7.97796E-1	-9.13136E0	-9.1418E0	5.43594E-3	9.34362E-2	2.73201E1	-3.26735E1	-3.25948E1	2.67551E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16512E-1	-7.97701E-1	-9.13124E0	-9.14204E0	5.57899E-3	9.31263E-2	2.72909E1	-3.26455E1	-3.2547E1	2.67923E1	1.73529E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.99283E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16369E-1	-7.98178E-1	-9.1311E0	-9.14195E0	5.45979E-3	9.31263E-2	2.72552E1	-3.2626E1	-3.26458E1	2.67824E1	1.73605E-7	2.51007E-3	2.51007E-3	6.29098E-3	2.00151E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16584E-1	-7.98178E-1	-9.13126E0	-9.14195E0	5.24521E-3	9.32693E-2	2.734E1	-3.26878E1	-3.26248E1	2.68002E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00673E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16536E-1	-7.97772E-1	-9.13117E0	-9.14209E0	5.45979E-3	9.33409E-2	2.73741E1	-3.26278E1	-3.26502E1	2.67563E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16464E-1	-7.98059E-1	-9.13122E0	-9.14207E0	5.53131E-3	9.33647E-2	2.73027E1	-3.26849E1	-3.26368E1	2.68088E1	1.73303E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16393E-1	-7.97963E-1	-9.13148E0	-9.14209E0	5.67436E-3	9.35316E-2	2.73886E1	-3.26434E1	-3.2605E1	2.68118E1	1.73605E-7	2.52384E-3	2.52384E-3	6.30202E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16536E-1	-7.97844E-1	-9.13153E0	-9.14173E0	5.34058E-3	9.31263E-2	2.72931E1	-3.26759E1	-3.26146E1	2.68052E1	1.73454E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16417E-1	-7.97701E-1	-9.13126E0	-9.14195E0	5.67436E-3	9.32217E-2	2.72691E1	-3.26785E1	-3.26166E1	2.68226E1	1.73379E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.1625E-1	-7.98059E-1	-9.13148E0	-9.14207E0	5.67436E-3	9.32217E-2	2.73207E1	-3.26416E1	-3.26603E1	2.67763E1	1.7353E-7	2.5143E-3	2.5143E-3	6.33734E-3	1.9914E-1