[Scan]
initial_time=2016-02-16T03:36:11
final_time=2016-02-16T03:36:31
ip_count=19
run=1030
dataset=8
scan=606
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.3287E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.62368E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=6.04439E-10
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=5.00071E-10
mult1=-1.05471E-8
mult2=-2.8244E-9
rf_tmon=-3.36687E-4
rf_agc=3.8759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.631E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.82319E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19753E1
lens5a_imon=1.99852E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05163E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53534E1
cs_ef1b_imon=3.08574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02413E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.17546E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37604E0
lens1_imon=2.77104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03887E1
cs_ea2_imon=1.58381E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=3.02075E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.93689E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11488E1
os_restr1_imon=2.88382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15259E1
os_ea1_imon=1.91718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63415E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25557E0
cs_ionrep_imon=1.26261E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.3019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.66964E-10
tplens_vset=1.4E-1
tplens_vmon=1.65708E0
tplens_imon=-2.70635E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.50108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58416E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98697E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.59201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25499E0
ionrepsh_imon=2.03259E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33443E1
lens5b_imon=2.21578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74275E1
cs_ef2b_imon=3.14134E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63697E-1
os_ea2_imon=-5.17446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62276E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67559E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90443E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.24268E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.98324E-6
window_vset=0.0E0
window_vmon=2.17107E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.72116E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.73044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.21711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63272E0
defgridb_imon=6.29592E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33875E1
os_fil1_imon=5.30073E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=1.0097E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62974E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66902E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.13313E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.81364E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-1.90463E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.93003E-1
res40_imon=-2.37649E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16607E-1	-7.97963E-1	-9.13117E0	-9.14218E0	5.29289E-3	9.29594E-2	2.72957E1	-3.26466E1	-3.26148E1	2.68282E1	1.73533E-7	2.52093E-3	2.52093E-3	6.33341E-3	2.00435E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16345E-1	-7.98154E-1	-9.13167E0	-9.14207E0	5.43594E-3	9.3174E-2	2.73189E1	-3.2653E1	-3.2617E1	2.6792E1	1.7337E-7	2.52066E-3	2.52066E-3	6.31879E-3	2.00787E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16536E-1	-7.9813E-1	-9.13172E0	-9.14207E0	5.34058E-3	9.31025E-2	2.73193E1	-3.26626E1	-3.25965E1	2.67931E1	1.73605E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16154E-1	-7.98225E-1	-9.13162E0	-9.14161E0	4.93526E-3	9.28402E-2	2.73087E1	-3.26765E1	-3.26038E1	2.68244E1	1.73387E-7	2.50657E-3	2.50657E-3	6.32858E-3	1.99562E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16512E-1	-7.98416E-1	-9.13148E0	-9.14183E0	5.57899E-3	9.31263E-2	2.72612E1	-3.26891E1	-3.262E1	2.67974E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16274E-1	-7.98202E-1	-9.13157E0	-9.14197E0	5.67436E-3	9.31025E-2	2.73134E1	-3.26484E1	-3.2629E1	2.67932E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.9963E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16607E-1	-7.98321E-1	-9.13134E0	-9.14161E0	5.19753E-3	9.31025E-2	2.72853E1	-3.26579E1	-3.25912E1	2.68178E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16321E-1	-7.98178E-1	-9.13181E0	-9.14178E0	5.19753E-3	9.33409E-2	2.72733E1	-3.26687E1	-3.26717E1	2.6771E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99977E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16298E-1	-7.98321E-1	-9.13138E0	-9.14176E0	5.53131E-3	9.32932E-2	2.73111E1	-3.2644E1	-3.26116E1	2.67607E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16321E-1	-7.98416E-1	-9.13122E0	-9.14173E0	5.24521E-3	9.30548E-2	2.73093E1	-3.26254E1	-3.26284E1	2.6798E1	1.73457E-7	2.51096E-3	2.51096E-3	6.3074E-3	1.9883E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16488E-1	-7.9875E-1	-9.13138E0	-9.14187E0	5.26905E-3	9.33886E-2	2.72868E1	-3.26596E1	-3.2626E1	2.68348E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16393E-1	-7.98893E-1	-9.13146E0	-9.14173E0	5.38826E-3	9.34362E-2	2.73442E1	-3.26981E1	-3.26573E1	2.67872E1	1.73529E-7	2.50898E-3	2.50898E-3	6.29645E-3	2.00151E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16536E-1	-7.97939E-1	-9.13165E0	-9.14192E0	5.67436E-3	9.3317E-2	2.72883E1	-3.26765E1	-3.2587E1	2.67914E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00499E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16441E-1	-7.98106E-1	-9.13138E0	-9.14197E0	5.45979E-3	9.32455E-2	2.73297E1	-3.26921E1	-3.2614E1	2.67986E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16536E-1	-7.98225E-1	-9.13124E0	-9.14192E0	5.57899E-3	9.2864E-2	2.72919E1	-3.26506E1	-3.26188E1	2.68166E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16393E-1	-7.98392E-1	-9.13136E0	-9.14192E0	5.43594E-3	9.29594E-2	2.72727E1	-3.2623E1	-3.26176E1	2.67776E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16488E-1	-7.9844E-1	-9.13138E0	-9.14164E0	5.10216E-3	9.29832E-2	2.73175E1	-3.26726E1	-3.26679E1	2.68046E1	1.73531E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16679E-1	-7.97653E-1	-9.13138E0	-9.14199E0	5.48363E-3	9.3174E-2	2.73299E1	-3.26927E1	-3.26119E1	2.67387E1	1.73454E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16417E-1	-7.98202E-1	-9.13134E0	-9.14164E0	5.26905E-3	9.34362E-2	2.73033E1	-3.26632E1	-3.26667E1	2.6822E1	1.73459E-7	2.52553E-3	2.52553E-3	6.3074E-3	1.99562E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16417E-1	-7.97987E-1	-9.13134E0	-9.14154E0	5.48363E-3	9.32217E-2	2.73033E1	-3.26729E1	-3.26344E1	2.67559E1	1.73529E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.00325E-1