[Scan]
initial_time=2016-02-16T03:37:06
final_time=2016-02-16T03:37:26
ip_count=19
run=1030
dataset=8
scan=608
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=6.41894E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.75934E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.84221E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.01978E-10
mult1=-1.01377E-8
mult2=-2.76851E-9
rf_tmon=-4.64461E-3
rf_agc=3.34778E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=3.65353E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20307E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.07604E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.17449E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37016E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.57247E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.0328E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.11785E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.88683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.156E1
os_ea1_imon=1.88682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26472E0
cs_ionrep_imon=1.25163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93644E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.29552E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.47783E-10
tplens_vset=1.4E-1
tplens_vmon=1.60719E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.143E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=2.01732E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74261E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45715E-1
os_ea2_imon=-4.21914E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00774E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62699E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.28173E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72684E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68186E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.94179E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.47979E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.89471E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60006E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=5.25675E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47319E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66697E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30675E1
cs_fil1_imon=1.00861E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66504E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86322E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16512E-1	-7.98082E-1	-9.13172E0	-9.1418E0	5.126E-3	9.3627E-2	2.73375E1	-3.26254E1	-3.26651E1	2.681E1	1.73531E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16798E-1	-7.9782E-1	-9.13136E0	-9.14166E0	5.03063E-3	9.31501E-2	2.72943E1	-3.26386E1	-3.26518E1	2.6768E1	1.73454E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.98075E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16584E-1	-7.98392E-1	-9.13153E0	-9.14176E0	4.76837E-3	9.31978E-2	2.7324E1	-3.26549E1	-3.26573E1	2.68007E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16607E-1	-7.9844E-1	-9.13153E0	-9.14168E0	5.60284E-3	9.30309E-2	2.72901E1	-3.27017E1	-3.26146E1	2.67908E1	1.73605E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16417E-1	-7.98273E-1	-9.13141E0	-9.14187E0	5.55515E-3	9.31978E-2	2.73099E1	-3.27065E1	-3.26248E1	2.6783E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16798E-1	-7.98345E-1	-9.13157E0	-9.14209E0	5.36442E-3	9.29594E-2	2.72799E1	-3.26891E1	-3.25954E1	2.6777E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16655E-1	-7.98368E-1	-9.13157E0	-9.14223E0	5.26905E-3	9.34362E-2	2.73159E1	-3.2647E1	-3.26524E1	2.67986E1	1.73454E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16417E-1	-7.97915E-1	-9.13155E0	-9.14185E0	4.86374E-3	9.32932E-2	2.73039E1	-3.26591E1	-3.26146E1	2.68388E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16417E-1	-7.97915E-1	-9.1315E0	-9.14207E0	5.24521E-3	9.33409E-2	2.73502E1	-3.26543E1	-3.26374E1	2.68016E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16393E-1	-7.98321E-1	-9.13126E0	-9.14197E0	5.24521E-3	9.35793E-2	2.72991E1	-3.26657E1	-3.2608E1	2.68064E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16584E-1	-7.98011E-1	-9.13165E0	-9.14192E0	5.126E-3	9.3317E-2	2.73099E1	-3.26753E1	-3.2653E1	2.68382E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16512E-1	-7.97963E-1	-9.13131E0	-9.14221E0	4.98295E-3	9.32455E-2	2.72618E1	-3.26825E1	-3.26687E1	2.68052E1	1.73379E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.00673E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16631E-1	-7.98249E-1	-9.13172E0	-9.14183E0	5.31673E-3	9.30071E-2	2.73399E1	-3.26732E1	-3.26284E1	2.6807E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16798E-1	-7.98178E-1	-9.13155E0	-9.14192E0	5.53131E-3	9.33409E-2	2.72968E1	-3.26632E1	-3.25983E1	2.6796E1	1.73457E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.98661E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16512E-1	-7.98059E-1	-9.13162E0	-9.14183E0	5.57899E-3	9.31501E-2	2.72913E1	-3.26591E1	-3.26573E1	2.67842E1	1.73454E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16703E-1	-7.97367E-1	-9.13126E0	-9.14171E0	5.48363E-3	9.33886E-2	2.73099E1	-3.26621E1	-3.26212E1	2.68088E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00021E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16512E-1	-7.97677E-1	-9.13126E0	-9.14176E0	5.31673E-3	9.32455E-2	2.7357E1	-3.27233E1	-3.26378E1	2.67926E1	1.73529E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16321E-1	-7.98202E-1	-9.13134E0	-9.14199E0	5.48363E-3	9.36031E-2	2.73033E1	-3.26378E1	-3.2629E1	2.67949E1	1.73529E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16655E-1	-7.97892E-1	-9.13153E0	-9.14204E0	5.65052E-3	9.32455E-2	2.73175E1	-3.26602E1	-3.2659E1	2.67992E1	1.73532E-7	2.51919E-3	2.51919E-3	6.32858E-3	1.99394E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16464E-1	-7.97868E-1	-9.13131E0	-9.14185E0	5.22137E-3	9.35555E-2	2.72684E1	-3.26452E1	-3.26404E1	2.68186E1	1.73605E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.9951E-1