[Scan]
initial_time=2016-02-16T03:38:01
final_time=2016-02-16T03:38:21
ip_count=19
run=1030
dataset=8
scan=610
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.0884E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=6.28293E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.59519E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.70107E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.4127E-10
mult1=-9.85401E-9
mult2=-3.02703E-9
rf_tmon=-5.51231E-3
rf_agc=3.21234E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.98791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6143E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=2.02438E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.06595E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02493E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.18118E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41208E0
lens1_imon=2.61051E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.57205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.89373E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=2.89801E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15524E1
os_ea1_imon=1.89838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18898E0
cs_ionrep_imon=1.29987E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.27859E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.58369E-10
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=1.25808E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.61487E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.61407E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=2.04031E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75378E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29799E-1
os_ea2_imon=-3.16584E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60657E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.05218E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=2.89008E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23129E2
cs_ionfoca_imon=6.32052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.29542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72939E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67816E1
iondef4_imon=1.11981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.95243E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=1.98412E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.58692E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57682E0
defgridb_imon=6.34812E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33842E1
os_fil1_imon=4.81827E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65339E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.666E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30618E1
cs_fil1_imon=1.00957E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66814E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22333E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.53596E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16298E-1	-7.98178E-1	-9.13172E0	-9.14228E0	5.00679E-3	9.31263E-2	2.73074E1	-3.26486E1	-3.26167E1	2.67705E1	1.73605E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.98491E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1656E-1	-7.98202E-1	-9.1316E0	-9.14218E0	5.29289E-3	9.34362E-2	2.73051E1	-3.26646E1	-3.26346E1	2.67764E1	1.73459E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.99227E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16727E-1	-7.98297E-1	-9.13177E0	-9.14195E0	5.31673E-3	9.36747E-2	2.72819E1	-3.26735E1	-3.26138E1	2.6719E1	1.73451E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16631E-1	-7.98178E-1	-9.13157E0	-9.14183E0	5.14984E-3	9.34124E-2	2.73009E1	-3.26458E1	-3.26296E1	2.68304E1	1.73314E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16464E-1	-7.98035E-1	-9.13169E0	-9.1419E0	5.03063E-3	9.35078E-2	2.73532E1	-3.26921E1	-3.26368E1	2.67788E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16512E-1	-7.97844E-1	-9.1316E0	-9.14195E0	5.126E-3	9.35555E-2	2.73039E1	-3.26591E1	-3.26413E1	2.67902E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16798E-1	-7.98035E-1	-9.13165E0	-9.14197E0	5.05447E-3	9.34124E-2	2.73003E1	-3.26903E1	-3.25942E1	2.67884E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99224E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16393E-1	-7.9813E-1	-9.13165E0	-9.14173E0	5.26905E-3	9.32932E-2	2.73045E1	-3.26531E1	-3.26166E1	2.68202E1	1.73379E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16321E-1	-7.98416E-1	-9.13148E0	-9.14185E0	4.93526E-3	9.35555E-2	2.72943E1	-3.26759E1	-3.26266E1	2.68018E1	1.73383E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98491E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16393E-1	-7.97653E-1	-9.13146E0	-9.14214E0	5.48363E-3	9.35078E-2	2.73134E1	-3.26891E1	-3.26124E1	2.67698E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16464E-1	-7.98082E-1	-9.13165E0	-9.1418E0	5.03063E-3	9.32455E-2	2.72803E1	-3.2613E1	-3.26549E1	2.68893E1	1.73567E-7	2.51647E-3	2.51647E-3	6.32099E-3	1.99397E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16083E-1	-7.98321E-1	-9.13155E0	-9.14192E0	5.126E-3	9.35555E-2	2.73249E1	-3.27221E1	-3.27528E1	2.6816E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.1625E-1	-7.98321E-1	-9.13146E0	-9.14192E0	5.29289E-3	9.3317E-2	2.72925E1	-3.26338E1	-3.26458E1	2.68064E1	1.73454E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.00151E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16178E-1	-7.98106E-1	-9.13146E0	-9.14211E0	5.19753E-3	9.35078E-2	2.73159E1	-3.26765E1	-3.26452E1	2.67932E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16154E-1	-7.98035E-1	-9.13148E0	-9.14211E0	4.93526E-3	9.32932E-2	2.72931E1	-3.26705E1	-3.2632E1	2.67763E1	1.73454E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98764E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16035E-1	-7.98035E-1	-9.13162E0	-9.14195E0	5.43594E-3	9.34124E-2	2.72862E1	-3.26909E1	-3.25953E1	2.67547E1	1.73567E-7	2.51918E-3	2.51918E-3	6.30197E-3	1.98883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16488E-1	-7.98202E-1	-9.13141E0	-9.1419E0	5.48363E-3	9.33409E-2	2.73314E1	-3.2708E1	-3.26254E1	2.68172E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16369E-1	-7.98225E-1	-9.13115E0	-9.14204E0	5.53131E-3	9.31263E-2	2.73116E1	-3.26756E1	-3.26124E1	2.67656E1	1.73374E-7	2.51804E-3	2.51804E-3	6.29624E-3	1.99401E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16631E-1	-7.98225E-1	-9.1311E0	-9.14209E0	5.126E-3	9.31501E-2	2.72986E1	-3.26054E1	-3.26278E1	2.67656E1	1.73531E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16846E-1	-7.97868E-1	-9.13117E0	-9.1418E0	5.43594E-3	9.32217E-2	2.72939E1	-3.26638E1	-3.26195E1	2.67816E1	1.73457E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1