[Scan]
initial_time=2016-02-16T03:38:28
final_time=2016-02-16T03:38:48
ip_count=19
run=1030
dataset=8
scan=611
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=6.22857E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.80595E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.72705E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=5.0807E-10
mult1=-1.05633E-8
mult2=-2.79969E-9
rf_tmon=-4.07295E-3
rf_agc=3.22237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.68118E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.055E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.06739E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.19782E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.61051E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=3.00793E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.57099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.02018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.8209E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.88323E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.26518E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=3.28651E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.59108E-10
tplens_vset=1.4E-1
tplens_vmon=1.67978E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.52462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26832E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.4498E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23027E0
ionrepsh_imon=2.0166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.20631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53395E-1
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.004E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67684E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.3276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67794E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.93831E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.79903E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-1.7241E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.82948E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6034E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33822E1
os_fil1_imon=4.60203E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86963E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66642E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30569E1
cs_fil1_imon=1.00952E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66853E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40787E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51799E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.60473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.07655E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16679E-1	-7.97868E-1	-9.13129E0	-9.14192E0	5.57899E-3	9.32693E-2	2.73364E1	-3.2708E1	-3.26001E1	2.68262E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16345E-1	-7.98249E-1	-9.13148E0	-9.14226E0	5.53131E-3	9.31501E-2	2.73375E1	-3.26909E1	-3.26003E1	2.68419E1	1.73457E-7	2.50989E-3	2.50989E-3	6.29665E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16011E-1	-7.97987E-1	-9.13153E0	-9.14173E0	5.57899E-3	9.31978E-2	2.73097E1	-3.26776E1	-3.26254E1	2.67989E1	1.73605E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16107E-1	-7.98059E-1	-9.13165E0	-9.14192E0	5.62668E-3	9.31263E-2	2.72979E1	-3.26825E1	-3.262E1	2.67972E1	1.73532E-7	2.51182E-3	2.51182E-3	6.3074E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16488E-1	-7.98464E-1	-9.13181E0	-9.1419E0	5.53131E-3	9.27687E-2	2.73122E1	-3.2675E1	-3.26431E1	2.68226E1	1.73605E-7	2.51096E-3	2.51096E-3	6.28592E-3	1.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16345E-1	-7.97558E-1	-9.13148E0	-9.1418E0	5.65052E-3	9.28164E-2	2.72454E1	-3.2648E1	-3.26474E1	2.68267E1	1.73457E-7	2.52061E-3	2.52061E-3	6.32626E-3	1.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16488E-1	-7.97963E-1	-9.13119E0	-9.14192E0	5.48363E-3	9.30309E-2	2.72845E1	-3.26422E1	-3.26634E1	2.68238E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16202E-1	-7.9782E-1	-9.1315E0	-9.14171E0	5.45979E-3	9.29594E-2	2.73129E1	-3.26302E1	-3.26248E1	2.6825E1	1.73526E-7	2.51725E-3	2.51725E-3	6.3131E-3	1.98267E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16607E-1	-7.98178E-1	-9.13117E0	-9.14178E0	5.67436E-3	9.30786E-2	2.72818E1	-3.26676E1	-3.25801E1	2.67914E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.97903E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16369E-1	-7.98249E-1	-9.13143E0	-9.1418E0	5.26905E-3	9.32217E-2	2.72927E1	-3.26632E1	-3.26095E1	2.67764E1	1.73454E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16321E-1	-7.97939E-1	-9.13119E0	-9.14176E0	5.10216E-3	9.30309E-2	2.73129E1	-3.26561E1	-3.25978E1	2.6837E1	1.73379E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16631E-1	-7.97844E-1	-9.13122E0	-9.14235E0	5.19753E-3	9.30786E-2	2.71824E1	-3.25151E1	-3.26573E1	2.67885E1	1.73455E-7	2.51322E-3	2.51322E-3	6.32371E-3	1.99054E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16298E-1	-7.98035E-1	-9.13146E0	-9.14207E0	5.07832E-3	9.32693E-2	2.73381E1	-3.27131E1	-3.2599E1	2.67995E1					
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09588E0	-8.16464E-1	-7.97892E-1	-9.13117E0	-9.14216E0	5.19753E-3	9.31978E-2	2.72955E1	-3.26356E1	-3.25912E1	2.682E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16584E-1	-7.98059E-1	-9.1311E0	-9.14216E0	5.36442E-3	9.29356E-2	2.73139E1	-3.26419E1	-3.26124E1	2.67828E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16345E-1	-7.97772E-1	-9.13112E0	-9.14216E0	5.07832E-3	9.33886E-2	2.72985E1	-3.26579E1	-3.26302E1	2.67752E1	1.73531E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16727E-1	-7.97439E-1	-9.13141E0	-9.1423E0	4.95911E-3	9.32693E-2	2.73069E1	-3.26848E1	-3.2626E1	2.68621E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.1656E-1	-7.97915E-1	-9.13134E0	-9.1424E0	4.74453E-3	9.34124E-2	2.73099E1	-3.26524E1	-3.26398E1	2.68058E1	1.73451E-7	2.5225E-3	2.5225E-3	6.28511E-3	1.98872E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.1656E-1	-7.97987E-1	-9.1311E0	-9.14197E0	5.26905E-3	9.32693E-2	2.73322E1	-3.2685E1	-3.2629E1	2.67926E1	1.73531E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.1656E-1	-7.98059E-1	-9.1311E0	-9.14166E0	5.36442E-3	9.34124E-2	2.73476E1	-3.26832E1	-3.26148E1	2.67794E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9883E-1