[Scan]
initial_time=2016-02-16T03:38:56
final_time=2016-02-16T03:39:15
ip_count=19
run=1030
dataset=8
scan=612
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.29687E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.59292E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=5.83458E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.98867E-10
mult1=-9.51207E-9
mult2=-2.60803E-9
rf_tmon=-4.32572E-3
rf_agc=3.33651E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.81124E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1934E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.08505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.16728E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37376E0
lens1_imon=2.83696E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.56382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=3.01405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.88396E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=1.88574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.2729E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.29228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.567E-10
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26358E1
iondef3_imon=1.52272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.97134E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=1.98776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34132E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4211E-1
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64321E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.87819E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.34002E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.28065E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67523E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9335E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=2.8801E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.82839E-6
window_vset=0.0E0
window_vmon=2.08933E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-4.21084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.89614E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=6.82765E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33788E1
os_fil1_imon=5.45497E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=1.00821E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.1494E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.0281E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22104E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49992E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16703E-1	-7.97343E-1	-9.13143E0	-9.14187E0	5.45979E-3	9.35078E-2	2.72856E1	-3.2675E1	-3.26213E1	2.68208E1	1.73605E-7	2.51632E-3	2.51632E-3	6.35059E-3	1.9883E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16512E-1	-7.98035E-1	-9.13126E0	-9.14183E0	5.24521E-3	9.33647E-2	2.73259E1	-3.26517E1	-3.26229E1	2.681E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16274E-1	-7.98154E-1	-9.13136E0	-9.1418E0	5.126E-3	9.34124E-2	2.7308E1	-3.26455E1	-3.26219E1	2.68208E1	1.73381E-7	2.51701E-3	2.51701E-3	6.32099E-3	1.99226E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16488E-1	-7.98249E-1	-9.13138E0	-9.14176E0	5.34058E-3	9.31501E-2	2.72656E1	-3.26236E1	-3.26349E1	2.67565E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16536E-1	-7.98178E-1	-9.13146E0	-9.14202E0	5.19753E-3	9.32455E-2	2.73021E1	-3.26218E1	-3.26398E1	2.67896E1	1.73454E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16703E-1	-7.97629E-1	-9.13141E0	-9.14185E0	5.17368E-3	9.32455E-2	2.72907E1	-3.26561E1	-3.25996E1	2.68094E1	1.73379E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98937E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16751E-1	-7.97701E-1	-9.13148E0	-9.14183E0	5.62668E-3	9.34362E-2	2.73009E1	-3.26597E1	-3.26164E1	2.68035E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16488E-1	-7.98154E-1	-9.13177E0	-9.14183E0	5.36442E-3	9.35316E-2	2.72709E1	-3.26915E1	-3.26434E1	2.67886E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16393E-1	-7.97653E-1	-9.1315E0	-9.14187E0	5.26905E-3	9.37223E-2	2.73123E1	-3.26266E1	-3.26573E1	2.68028E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16369E-1	-7.98178E-1	-9.13146E0	-9.1419E0	5.38826E-3	9.33886E-2	2.72847E1	-3.26567E1	-3.26146E1	2.67968E1	1.73454E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16512E-1	-7.97939E-1	-9.13119E0	-9.14183E0	5.19753E-3	9.30309E-2	2.73009E1	-3.26428E1	-3.26615E1	2.68169E1	1.73379E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16178E-1	-7.97844E-1	-9.13153E0	-9.14207E0	5.19753E-3	9.30309E-2	2.73954E1	-3.26514E1	-3.24703E1	2.68088E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9934E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16059E-1	-7.97892E-1	-9.13148E0	-9.14216E0	5.05447E-3	9.29832E-2	2.72824E1	-3.26744E1	-3.26572E1	2.68057E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16154E-1	-7.97963E-1	-9.13155E0	-9.14192E0	4.98295E-3	9.31978E-2	2.73424E1	-3.26717E1	-3.26398E1	2.67526E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31014E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16131E-1	-7.9782E-1	-9.13172E0	-9.14159E0	4.69685E-3	9.32217E-2	2.73051E1	-3.26777E1	-3.26158E1	2.68106E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16369E-1	-7.9751E-1	-9.132E0	-9.14178E0	5.26905E-3	9.3317E-2	2.72715E1	-3.27375E1	-3.25617E1	2.67902E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99977E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.1625E-1	-7.97391E-1	-9.13167E0	-9.14173E0	5.24521E-3	9.31978E-2	2.72849E1	-3.26829E1	-3.26634E1	2.67715E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.15988E-1	-7.97868E-1	-9.13153E0	-9.14202E0	5.34058E-3	9.33647E-2	2.73115E1	-3.2637E1	-3.26138E1	2.68412E1	1.73451E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.99401E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16584E-1	-7.97653E-1	-9.13148E0	-9.14211E0	5.38826E-3	9.33886E-2	2.7288E1	-3.26449E1	-3.26602E1	2.68337E1	1.73385E-7	2.51405E-3	2.51405E-3	6.29675E-3	2.00127E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16059E-1	-7.98035E-1	-9.13179E0	-9.14204E0	5.17368E-3	9.30786E-2	2.73082E1	-3.26799E1	-3.26358E1	2.67523E1