[Scan]
initial_time=2016-02-16T03:40:16
final_time=2016-02-16T03:40:36
ip_count=19
run=1030
dataset=8
scan=615
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=6.36864E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=3.10195E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.75089E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.15342E-10
mult1=-1.04147E-8
mult2=-2.8264E-9
rf_tmon=-5.70206E-3
rf_agc=3.30692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.85118E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.69899E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.08613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.1964E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.55742E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.02198E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.97635E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.25598E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01449E1
cs_anode1_imon=3.27859E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=6.74188E-10
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27269E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.71218E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=2.0074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8112E-1
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70453E1
cs_ef2a_imon=3.21407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6366E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54777E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.28713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7376E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.93391E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.09253E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.47719E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33773E1
os_fil1_imon=4.90837E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91167E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30533E1
cs_fil1_imon=1.00911E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67745E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22118E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.87833E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16083E-1	-7.97939E-1	-9.13143E0	-9.1419E0	5.19753E-3	9.2864E-2	2.73281E1	-3.26626E1	-3.26455E1	2.67868E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16488E-1	-7.97582E-1	-9.13131E0	-9.14207E0	5.00679E-3	9.32455E-2	2.7318E1	-3.2694E1	-3.26248E1	2.68026E1	1.73457E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16441E-1	-7.97701E-1	-9.13131E0	-9.14187E0	5.38826E-3	9.30309E-2	2.72803E1	-3.26443E1	-3.26496E1	2.67902E1	1.73374E-7	2.51804E-3	2.51804E-3	6.28511E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16655E-1	-7.97367E-1	-9.13122E0	-9.14183E0	5.26905E-3	9.32693E-2	2.72895E1	-3.26374E1	-3.26254E1	2.68166E1	1.73605E-7	2.51417E-3	2.51417E-3	6.35059E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16274E-1	-7.98106E-1	-9.13148E0	-9.1419E0	5.126E-3	9.33409E-2	2.73111E1	-3.26843E1	-3.26482E1	2.6783E1	1.73383E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16488E-1	-7.97844E-1	-9.13148E0	-9.14159E0	5.126E-3	9.33409E-2	2.72759E1	-3.26581E1	-3.26297E1	2.68139E1	1.73454E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16441E-1	-7.98345E-1	-9.13157E0	-9.14209E0	5.03063E-3	9.3317E-2	2.73269E1	-3.2672E1	-3.26142E1	2.6771E1	1.73503E-7	2.51645E-3	2.51645E-3	6.32964E-3	1.98428E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16107E-1	-7.97892E-1	-9.13157E0	-9.14218E0	5.126E-3	9.32455E-2	2.73141E1	-3.26621E1	-3.26404E1	2.67986E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.97559E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15916E-1	-7.98225E-1	-9.13143E0	-9.14209E0	5.29289E-3	9.34601E-2	2.73333E1	-3.26825E1	-3.25906E1	2.67854E1	1.73379E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.97903E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.15773E-1	-7.97653E-1	-9.13153E0	-9.14202E0	5.50747E-3	9.35316E-2	2.72237E1	-3.26402E1	-3.26585E1	2.67746E1	1.73529E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16441E-1	-7.97367E-1	-9.1315E0	-9.1419E0	5.05447E-3	9.33409E-2	2.72787E1	-3.26639E1	-3.26212E1	2.68935E1	1.73457E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16107E-1	-7.98011E-1	-9.1316E0	-9.14183E0	5.43594E-3	9.3317E-2	2.72261E1	-3.26242E1	-3.27346E1	2.68004E1	1.73383E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9951E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16417E-1	-7.97606E-1	-9.13146E0	-9.14187E0	5.26905E-3	9.3317E-2	2.73486E1	-3.26762E1	-3.26217E1	2.6801E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98247E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16154E-1	-7.9782E-1	-9.13141E0	-9.14178E0	5.29289E-3	9.37462E-2	2.72931E1	-3.26645E1	-3.26092E1	2.67589E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16059E-1	-7.97725E-1	-9.13129E0	-9.14199E0	4.98295E-3	9.3317E-2	2.72594E1	-3.26428E1	-3.2635E1	2.67836E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16059E-1	-7.97725E-1	-9.13115E0	-9.14209E0	5.10216E-3	9.29832E-2	2.72964E1	-3.26359E1	-3.26666E1	2.68215E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16178E-1	-7.97462E-1	-9.13141E0	-9.14199E0	5.43594E-3	9.34839E-2	2.73466E1	-3.2641E1	-3.26242E1	2.68238E1	1.73605E-7	2.52061E-3	2.52061E-3	6.28592E-3	1.98661E-1
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-2.09402E0	-8.16178E-1	-7.97391E-1	-9.13124E0	-9.14204E0	5.29289E-3	9.32932E-2	2.737E1	-3.26449E1	-3.25723E1	2.68022E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9951E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.1594E-1	-7.97772E-1	-9.13124E0	-9.14199E0	5.43594E-3	9.33409E-2	2.72636E1	-3.26428E1	-3.26633E1	2.67872E1	1.73454E-7	2.5117E-3	2.5117E-3	6.3074E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.15892E-1	-7.97749E-1	-9.13117E0	-9.14209E0	5.26905E-3	9.33647E-2	2.7376E1	-3.27269E1	-3.26026E1	2.68094E1