[Scan]
initial_time=2016-02-16T03:41:10
final_time=2016-02-16T03:41:30
ip_count=19
run=1030
dataset=8
scan=617
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=6.42645E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.50375E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.36406E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.32901E-10
mult1=-9.83036E-9
mult2=-2.74873E-9
rf_tmon=-5.74827E-3
rf_agc=3.37692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.61764E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.39814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.06127E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.18012E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36489E0
lens1_imon=3.02108E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.56178E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.76582E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=2.88864E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15506E1
os_ea1_imon=1.90334E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.25562E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93735E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.27138E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=7.1131E-10
tplens_vset=1.4E-1
tplens_vmon=1.59837E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98686E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.67904E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=2.02049E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33439E1
lens5b_imon=2.21834E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62243E-1
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61918E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20539E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10661E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.30552E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.12714E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.91375E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=2.25389E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.21362E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54729E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33766E1
os_fil1_imon=4.62005E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.97775E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6649E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=1.00908E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63075E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6628E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22035E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73494E-7
chamber_cvt_pmon=2.519E-3
foreline_cvt_pmon=2.519E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24764E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16631E-1	-7.9782E-1	-9.13131E0	-9.14168E0	5.29289E-3	9.35078E-2	2.73765E1	-3.26254E1	-3.26384E1	2.68154E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16512E-1	-7.97653E-1	-9.13138E0	-9.14202E0	5.48363E-3	9.36508E-2	2.72979E1	-3.26585E1	-3.26356E1	2.67944E1	1.73605E-7	2.51814E-3	2.51814E-3	6.33919E-3	1.99562E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16512E-1	-7.9782E-1	-9.13157E0	-9.14209E0	5.24521E-3	9.31978E-2	2.73198E1	-3.26364E1	-3.26106E1	2.68148E1	1.73528E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16774E-1	-7.9782E-1	-9.13157E0	-9.14195E0	4.93526E-3	9.33647E-2	2.72332E1	-3.26567E1	-3.26085E1	2.67493E1	1.73459E-7	2.51568E-3	2.51568E-3	6.31445E-3	1.98838E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16393E-1	-7.97892E-1	-9.13141E0	-9.14195E0	5.26905E-3	9.32455E-2	2.73269E1	-3.26644E1	-3.26095E1	2.67812E1	1.73472E-7	2.51947E-3	2.51947E-3	6.29776E-3	1.99351E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16679E-1	-7.98035E-1	-9.13119E0	-9.1419E0	4.76837E-3	9.32455E-2	2.72626E1	-3.26916E1	-3.25741E1	2.67941E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16464E-1	-7.97701E-1	-9.13146E0	-9.14176E0	5.17368E-3	9.30786E-2	2.73021E1	-3.26514E1	-3.26272E1	2.67764E1	1.73605E-7	2.51947E-3	2.51947E-3	6.32673E-3	1.98539E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16679E-1	-7.97796E-1	-9.13157E0	-9.14166E0	5.34058E-3	9.33647E-2	2.72998E1	-3.26714E1	-3.26001E1	2.6792E1	1.73529E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16607E-1	-7.97653E-1	-9.13134E0	-9.14221E0	5.03063E-3	9.29117E-2	2.73123E1	-3.26879E1	-3.25749E1	2.67794E1	1.73383E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9883E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16798E-1	-7.97582E-1	-9.13115E0	-9.14185E0	5.45979E-3	9.29832E-2	2.73057E1	-3.26849E1	-3.26236E1	2.68148E1	1.73529E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16512E-1	-7.97772E-1	-9.13093E0	-9.14166E0	5.36442E-3	9.30071E-2	2.72895E1	-3.26711E1	-3.26368E1	2.67794E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9951E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16488E-1	-7.97796E-1	-9.13103E0	-9.14209E0	5.55515E-3	9.29594E-2	2.73045E1	-3.27414E1	-3.27119E1	2.67625E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98419E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.15821E-1	-7.97772E-1	-9.13126E0	-9.14171E0	5.03063E-3	9.33409E-2	2.72709E1	-3.26803E1	-3.25865E1	2.6807E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.97903E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16178E-1	-7.97868E-1	-9.13146E0	-9.14171E0	5.62668E-3	9.31978E-2	2.73326E1	-3.2664E1	-3.26285E1	2.67674E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16154E-1	-7.97963E-1	-9.13157E0	-9.14178E0	5.38826E-3	9.31263E-2	2.73069E1	-3.27068E1	-3.26467E1	2.67866E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16083E-1	-7.98273E-1	-9.13177E0	-9.14176E0	5.38826E-3	9.34124E-2	2.72534E1	-3.26476E1	-3.2611E1	2.67752E1	1.73531E-7	2.51525E-3	2.51525E-3	6.28592E-3	2.00192E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16345E-1	-7.97582E-1	-9.13153E0	-9.14161E0	5.26905E-3	9.32693E-2	2.73021E1	-3.26975E1	-3.25954E1	2.68076E1	1.73605E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.00463E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16154E-1	-7.97558E-1	-9.1315E0	-9.14178E0	5.07832E-3	9.29832E-2	2.73145E1	-3.26685E1	-3.26555E1	2.68569E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.00363E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.1625E-1	-7.97415E-1	-9.13136E0	-9.1418E0	5.48363E-3	9.34124E-2	2.72709E1	-3.2659E1	-3.26903E1	2.68146E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99283E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.15964E-1	-7.97915E-1	-9.13143E0	-9.14199E0	5.14984E-3	9.32932E-2	2.73086E1	-3.26437E1	-3.25888E1	2.6807E1	1.73494E-7	2.519E-3	2.519E-3	6.3074E-3	1.9917E-1