[Scan]
initial_time=2016-02-16T03:42:31
final_time=2016-02-16T03:42:51
ip_count=19
run=1030
dataset=8
scan=620
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=6.15573E-10
ql2_vset=
ql2_vmon=-7.97606E-1
ql2_imon=2.82681E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.45347E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.31471E-10
mult1=-1.00655E-8
mult2=-2.86233E-9
rf_tmon=-4.46436E-3
rf_agc=3.32915E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.10306E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=3.05411E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02457E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.19463E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39321E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04056E1
cs_ea2_imon=1.57205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.02978E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.05014E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=2.88278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.10728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.28146E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93675E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.26714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.84535E-10
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-1.53771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27071E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.58009E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=2.03571E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13682E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31568E-1
os_ea2_imon=-2.42257E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71449E1
cs_ef2a_imon=3.19903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22513E-1
os_ef2bup_imon=-5.13237E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.87896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31804E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02041E1
cs_anode2_imon=2.28399E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68001E1
iondef4_imon=1.09893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.01238E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=2.22802E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09365E0
cs_ionaccel_imon=-1.90386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5589E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-9.41213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39115E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-6.07589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.39225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3374E1
os_fil1_imon=5.07484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7334E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66445E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30499E1
cs_fil1_imon=1.0089E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62997E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6607E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.30428E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.16117E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70276E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.16527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22087E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98322E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69053E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16321E-1	-7.97939E-1	-9.13107E0	-9.1419E0	5.50747E-3	9.30071E-2	2.72949E1	-3.26699E1	-3.26266E1	2.68118E1	1.73531E-7	2.50561E-3	2.50561E-3	6.31278E-3	2.00192E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1625E-1	-7.98106E-1	-9.13131E0	-9.14192E0	5.14984E-3	9.32693E-2	2.73106E1	-3.26627E1	-3.2645E1	2.68022E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3514E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16631E-1	-7.97629E-1	-9.13169E0	-9.14209E0	5.24521E-3	9.35555E-2	2.73045E1	-3.2681E1	-3.2622E1	2.6789E1	1.73451E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16774E-1	-7.97796E-1	-9.13172E0	-9.14192E0	5.38826E-3	9.3317E-2	2.73033E1	-3.26596E1	-3.26284E1	2.67879E1	1.73605E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16679E-1	-7.97868E-1	-9.13174E0	-9.14204E0	5.43594E-3	9.33647E-2	2.73316E1	-3.26561E1	-3.26148E1	2.68208E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16584E-1	-7.98154E-1	-9.13162E0	-9.14216E0	5.67436E-3	9.32932E-2	2.73021E1	-3.26308E1	-3.26224E1	2.68148E1	1.73605E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16202E-1	-7.97939E-1	-9.13126E0	-9.14192E0	5.17368E-3	9.32932E-2	2.73015E1	-3.26777E1	-3.26026E1	2.67884E1	1.73529E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16369E-1	-7.97939E-1	-9.13117E0	-9.14199E0	4.95911E-3	9.34124E-2	2.726E1	-3.26735E1	-3.26134E1	2.67949E1	1.73605E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.9934E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16274E-1	-7.97725E-1	-9.13146E0	-9.14204E0	5.53131E-3	9.35078E-2	2.72636E1	-3.26777E1	-3.25972E1	2.67734E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
1.3E1	0.0E0	1.0E0	5.25E2	3.53E2	-2.09387E0	-8.15916E-1	-7.9813E-1	-9.13107E0	-9.14197E0	5.84126E-3	9.3627E-2	2.73027E1	-3.26543E1	-3.26014E1	2.67525E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.16345E-1	-7.98368E-1	-9.13119E0	-9.14202E0	5.36442E-3	9.35793E-2	2.73269E1	-3.2672E1	-3.26632E1	2.67675E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16512E-1	-7.97677E-1	-9.13124E0	-9.14216E0	5.53131E-3	9.34839E-2	2.73291E1	-3.27011E1	-3.26032E1	2.68046E1	1.73379E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99456E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.1625E-1	-7.98154E-1	-9.13119E0	-9.14235E0	5.29289E-3	9.35078E-2	2.73246E1	-3.26673E1	-3.26142E1	2.68134E1	1.73379E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16798E-1	-7.98559E-1	-9.13103E0	-9.14209E0	5.07832E-3	9.38177E-2	2.72889E1	-3.26454E1	-3.26148E1	2.68313E1	1.73532E-7	2.52448E-3	2.52448E-3	6.32328E-3	1.99227E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.17013E-1	-7.97987E-1	-9.13112E0	-9.14221E0	5.26905E-3	9.35078E-2	2.7263E1	-3.26717E1	-3.2632E1	2.67848E1	1.73526E-7	2.51271E-3	2.51271E-3	6.31879E-3	1.99163E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16965E-1	-7.98202E-1	-9.1311E0	-9.14178E0	5.17368E-3	9.37939E-2	2.73234E1	-3.26632E1	-3.26048E1	2.6771E1	1.73454E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16894E-1	-7.98321E-1	-9.13112E0	-9.14185E0	5.07832E-3	9.35316E-2	2.72991E1	-3.26765E1	-3.26512E1	2.6813E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16488E-1	-7.97963E-1	-9.13095E0	-9.14211E0	5.14984E-3	9.34839E-2	2.73086E1	-3.26685E1	-3.25989E1	2.67986E1	1.73529E-7	2.51443E-3	2.51443E-3	6.35692E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16607E-1	-7.97892E-1	-9.13134E0	-9.14211E0	5.05447E-3	9.35316E-2	2.73189E1	-3.26278E1	-3.26098E1	2.68076E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.99456E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16441E-1	-7.97606E-1	-9.13129E0	-9.14199E0	5.14984E-3	9.33886E-2	2.7352E1	-3.27071E1	-3.26272E1	2.68001E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.98322E-1