[Scan]
initial_time=2016-02-16T03:42:58
final_time=2016-02-16T03:43:18
ip_count=19
run=1030
dataset=8
scan=621
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=6.30438E-10
ql2_vset=
ql2_vmon=-7.97367E-1
ql2_imon=2.86329E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.45239E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.3544E-10
mult1=-9.73579E-9
mult2=-2.81145E-9
rf_tmon=-3.34737E-3
rf_agc=3.39049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.95167E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.75765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.08217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02593E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.17522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36595E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=3.00721E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.60023E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.02162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.9947E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=1.89799E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63209E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=1.28011E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.27895E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.83618E-10
tplens_vset=1.4E-1
tplens_vmon=1.6174E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26484E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98696E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.70479E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22686E0
ionrepsh_imon=2.0202E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33099E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.00991E-1
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61618E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.28425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72986E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67445E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.00187E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.80571E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.50538E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.33737E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33725E1
os_fil1_imon=4.88434E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73147E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6616E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30504E1
cs_fil1_imon=1.00982E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66198E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78296E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22035E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.20269E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16298E-1	-7.98202E-1	-9.13143E0	-9.14159E0	5.05447E-3	9.32693E-2	2.73139E1	-3.26832E1	-3.25847E1	2.68094E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98247E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16679E-1	-7.97725E-1	-9.13126E0	-9.14147E0	5.31673E-3	9.34839E-2	2.72665E1	-3.26444E1	-3.26407E1	2.67668E1	1.73531E-7	2.52599E-3	2.52599E-3	6.33436E-3	1.97815E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16441E-1	-7.98082E-1	-9.13153E0	-9.14168E0	5.126E-3	9.35316E-2	2.73246E1	-3.26561E1	-3.25959E1	2.68424E1	1.73451E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1625E-1	-7.97892E-1	-9.13141E0	-9.14195E0	5.45979E-3	9.34124E-2	2.7301E1	-3.26758E1	-3.25947E1	2.67955E1	1.73531E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16393E-1	-7.98011E-1	-9.13107E0	-9.14199E0	5.55515E-3	9.31263E-2	2.72727E1	-3.26389E1	-3.26156E1	2.67722E1	1.73531E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16655E-1	-7.97796E-1	-9.13115E0	-9.14214E0	5.19753E-3	9.3317E-2	2.72968E1	-3.26797E1	-3.25906E1	2.68268E1	1.73418E-7	2.5116E-3	2.5116E-3	6.3074E-3	1.98541E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16417E-1	-7.97701E-1	-9.13084E0	-9.14207E0	5.62668E-3	9.32455E-2	2.73213E1	-3.26314E1	-3.26134E1	2.6786E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.1594E-1	-7.98106E-1	-9.13091E0	-9.14214E0	5.74589E-3	9.3317E-2	2.72763E1	-3.26819E1	-3.2647E1	2.6807E1	1.73379E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98075E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.15773E-1	-7.9813E-1	-9.1306E0	-9.14233E0	5.57899E-3	9.34124E-2	2.72835E1	-3.26476E1	-3.26062E1	2.6834E1	1.73451E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.98169E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1563E-1	-7.97725E-1	-9.13098E0	-9.14197E0	5.53131E-3	9.32217E-2	2.73249E1	-3.26723E1	-3.25912E1	2.67856E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.97647E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16131E-1	-7.97749E-1	-9.13143E0	-9.14187E0	5.53131E-3	9.37223E-2	2.73181E1	-3.26762E1	-3.26136E1	2.68394E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16035E-1	-7.97749E-1	-9.13107E0	-9.1419E0	5.36442E-3	9.31978E-2	2.72971E1	-3.26707E1	-3.2563E1	2.67788E1	1.73529E-7	2.52318E-3	2.52318E-3	6.29098E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16464E-1	-7.97939E-1	-9.13141E0	-9.14173E0	5.31673E-3	9.32455E-2	2.72886E1	-3.2672E1	-3.26278E1	2.67908E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16679E-1	-7.98059E-1	-9.13138E0	-9.14185E0	5.62668E-3	9.33647E-2	2.73159E1	-3.2653E1	-3.26326E1	2.67854E1	1.73457E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9985E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17013E-1	-7.97319E-1	-9.13143E0	-9.14178E0	5.29289E-3	9.33886E-2	2.7334E1	-3.26472E1	-3.26272E1	2.68088E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16464E-1	-7.97701E-1	-9.13155E0	-9.14204E0	5.79357E-3	9.34362E-2	2.73039E1	-3.26398E1	-3.26122E1	2.67783E1	1.73531E-7	2.52599E-3	2.52599E-3	6.29665E-3	1.98153E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16298E-1	-7.98011E-1	-9.13148E0	-9.14204E0	5.60284E-3	9.32455E-2	2.73075E1	-3.26645E1	-3.26434E1	2.68395E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16464E-1	-7.98321E-1	-9.13148E0	-9.14204E0	5.55515E-3	9.34124E-2	2.73328E1	-3.26767E1	-3.26189E1	2.67547E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16202E-1	-7.97701E-1	-9.13136E0	-9.14204E0	5.45979E-3	9.32217E-2	2.72877E1	-3.26224E1	-3.26567E1	2.67854E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16727E-1	-7.97367E-1	-9.13124E0	-9.14214E0	5.05447E-3	9.32693E-2	2.72986E1	-3.26484E1	-3.26549E1	2.67445E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98764E-1