[Scan]
initial_time=2016-02-16T03:43:52
final_time=2016-02-16T03:44:11
ip_count=19
run=1030
dataset=8
scan=623
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.31595E-10
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=2.9788E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.16617E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=5.19967E-10
mult1=-9.81877E-9
mult2=-2.81548E-9
rf_tmon=-3.96454E-3
rf_agc=3.36406E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=3.9314E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.96799E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20798E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53172E1
cs_ef1b_imon=3.08685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04611E1
cs_ea1_imon=2.19463E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43509E0
lens1_imon=2.40876E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65041E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03248E1
cs_ea2_imon=1.57488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8398E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.89242E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15913E1
os_ea1_imon=1.90334E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.1247E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.27792E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02175E1
cs_anode1_imon=3.25192E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.0684E-10
tplens_vset=1.4E-1
tplens_vmon=1.53289E0
tplens_imon=-1.0068E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26468E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26646E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98689E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.16231E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22555E0
ionrepsh_imon=2.0127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34188E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74033E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34518E-1
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70819E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45166E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10487E1
os_restr2_imon=2.84863E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.32406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.30371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73559E1
iondef1_imon=1.13635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.1281E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.00454E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=2.97761E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.59679E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82578E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=8.00103E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93672E3
defgrida_imon=6.92505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50179E3
multb_neg_imon=6.91089E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70675E0
defgridb_imon=5.85968E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33747E1
os_fil1_imon=4.49992E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92969E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66328E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30499E1
cs_fil1_imon=1.00927E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63579E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55849E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21953E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36244E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16083E-1	-7.97939E-1	-9.13169E0	-9.14185E0	5.57899E-3	9.35078E-2	2.73213E1	-3.26416E1	-3.26236E1	2.68268E1	1.73531E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1625E-1	-7.9782E-1	-9.13136E0	-9.14199E0	5.57899E-3	9.3317E-2	2.73039E1	-3.26303E1	-3.26499E1	2.67956E1	1.73379E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98247E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16059E-1	-7.97915E-1	-9.13131E0	-9.14202E0	5.57899E-3	9.31263E-2	2.7347E1	-3.2672E1	-3.26201E1	2.67968E1	1.73451E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16011E-1	-7.97677E-1	-9.13136E0	-9.14202E0	5.45979E-3	9.35555E-2	2.72642E1	-3.26789E1	-3.2587E1	2.67968E1	1.73457E-7	2.50989E-3	2.50989E-3	6.3074E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16154E-1	-7.97534E-1	-9.13136E0	-9.14214E0	5.48363E-3	9.377E-2	2.73045E1	-3.2638E1	-3.26356E1	2.67854E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98419E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16131E-1	-7.9782E-1	-9.13172E0	-9.14204E0	5.24521E-3	9.35555E-2	2.72907E1	-3.27251E1	-3.26104E1	2.67943E1	1.73451E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.99048E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16226E-1	-7.9751E-1	-9.13146E0	-9.14199E0	5.43594E-3	9.3317E-2	2.73057E1	-3.26768E1	-3.2604E1	2.67951E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00876E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.15892E-1	-7.97701E-1	-9.13155E0	-9.1419E0	5.36442E-3	9.29832E-2	2.72715E1	-3.26449E1	-3.26661E1	2.67607E1	1.73528E-7	2.51136E-3	2.51136E-3	6.31858E-3	2.00818E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16631E-1	-7.97987E-1	-9.13157E0	-9.14195E0	5.29289E-3	9.29594E-2	2.72925E1	-3.26807E1	-3.26062E1	2.68007E1	1.73531E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00021E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16464E-1	-7.98106E-1	-9.13129E0	-9.14216E0	5.45979E-3	9.29832E-2	2.72967E1	-3.26705E1	-3.2617E1	2.67631E1	1.73454E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-8.16369E-1	-7.98035E-1	-9.13141E0	-9.14202E0	5.07832E-3	9.31025E-2	2.72907E1	-3.27071E1	-3.25834E1	2.68238E1	1.73529E-7	2.51007E-3	2.51007E-3	6.32936E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16846E-1	-7.98202E-1	-9.13155E0	-9.14199E0	5.53131E-3	9.31501E-2	2.73057E1	-3.26446E1	-3.2653E1	2.67565E1	1.73529E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.1656E-1	-7.98202E-1	-9.13172E0	-9.14204E0	5.19753E-3	9.29594E-2	2.72968E1	-3.26868E1	-3.26018E1	2.67974E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9883E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16536E-1	-7.97629E-1	-9.13162E0	-9.14161E0	5.31673E-3	9.31978E-2	2.72709E1	-3.26863E1	-3.25958E1	2.67949E1	1.73529E-7	2.5199E-3	2.5199E-3	6.26371E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16345E-1	-7.98011E-1	-9.13126E0	-9.14211E0	5.48363E-3	9.30071E-2	2.72669E1	-3.27195E1	-3.26107E1	2.6797E1	1.73605E-7	2.52509E-3	2.52509E-3	6.31779E-3	2.00435E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16178E-1	-7.98059E-1	-9.13115E0	-9.14226E0	5.43594E-3	9.3317E-2	2.72799E1	-3.26158E1	-3.265E1	2.67758E1	1.73525E-7	2.51065E-3	2.51065E-3	6.31902E-3	2.00202E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16226E-1	-7.97272E-1	-9.13131E0	-9.14209E0	5.36442E-3	9.33886E-2	2.73015E1	-3.2653E1	-3.25978E1	2.67589E1	1.73529E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16059E-1	-7.97796E-1	-9.13136E0	-9.14195E0	5.31673E-3	9.32693E-2	2.73336E1	-3.26522E1	-3.26254E1	2.68007E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00847E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16107E-1	-7.97844E-1	-9.13134E0	-9.14176E0	5.34058E-3	9.34124E-2	2.73315E1	-3.26615E1	-3.26038E1	2.68178E1	1.73605E-7	2.51886E-3	2.51886E-3	6.323E-3	1.99776E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16059E-1	-7.97772E-1	-9.13126E0	-9.14173E0	4.88758E-3	9.34362E-2	2.73559E1	-3.26646E1	-3.26468E1	2.68166E1	1.73454E-7	2.51552E-3	2.51552E-3	6.36244E-3	1.98764E-1