[Scan]
initial_time=2016-02-16T03:44:45
final_time=2016-02-16T03:45:05
ip_count=19
run=1030
dataset=8
scan=625
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.51491E-10
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.56073E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=5.53799E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.48375E-10
mult1=-1.06815E-8
mult2=-2.81341E-9
rf_tmon=-5.38843E-3
rf_agc=3.34684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.62563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.9628E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05387E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.06627E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.2148E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36725E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04434E1
cs_ea2_imon=1.59116E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.01102E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=4.07219E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=1.89838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.09547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21198E0
cs_ionrep_imon=1.26412E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=3.26019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.57797E-10
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.52568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98774E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.58164E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.21233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74368E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72272E-1
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.008E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71032E1
cs_ef2a_imon=3.19799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63724E0
os_ef2alow_imon=-2.38692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.17879E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=2.87513E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.27809E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.01916E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.53737E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10466E0
cs_ionaccel_imon=-1.74747E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.04943E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.79928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=7.13033E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.04893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3372E1
os_fil1_imon=4.57672E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.78553E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66237E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30497E1
cs_fil1_imon=1.0089E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66328E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.31587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68246E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67998E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28528E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21151E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22119E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86053E-1
res40_imon=-2.80742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.1625E-1	-7.98202E-1	-9.13157E0	-9.14171E0	4.86374E-3	9.32217E-2	2.72853E1	-3.26308E1	-3.26723E1	2.67776E1	1.73457E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9917E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09665E0	-8.16011E-1	-7.97915E-1	-9.13126E0	-9.14199E0	5.38826E-3	9.29117E-2	2.73321E1	-3.26422E1	-3.26356E1	2.68268E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16178E-1	-7.98035E-1	-9.13115E0	-9.14214E0	5.72205E-3	9.32932E-2	2.7321E1	-3.26744E1	-3.26337E1	2.67794E1	1.73528E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16131E-1	-7.97772E-1	-9.13134E0	-9.14216E0	5.50747E-3	9.35316E-2	2.7288E1	-3.26815E1	-3.2629E1	2.68354E1	1.73383E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.15892E-1	-7.98106E-1	-9.13148E0	-9.14221E0	5.53131E-3	9.36747E-2	2.73291E1	-3.26296E1	-3.26242E1	2.67595E1	1.73457E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.15845E-1	-7.98082E-1	-9.1315E0	-9.14176E0	5.31673E-3	9.34362E-2	2.72579E1	-3.26482E1	-3.26271E1	2.67856E1	1.73454E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16369E-1	-7.97725E-1	-9.13174E0	-9.14204E0	5.6982E-3	9.36747E-2	2.7296E1	-3.26455E1	-3.26182E1	2.68263E1	1.73533E-7	2.51783E-3	2.51783E-3	6.33341E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16369E-1	-7.97606E-1	-9.1316E0	-9.14173E0	5.60284E-3	9.36508E-2	2.73145E1	-3.26685E1	-3.26555E1	2.6801E1	1.73523E-7	2.51557E-3	2.51557E-3	6.32518E-3	1.99782E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16083E-1	-7.98178E-1	-9.13167E0	-9.14195E0	5.24521E-3	9.36985E-2	2.73027E1	-3.26493E1	-3.25979E1	2.67968E1	1.73605E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.15868E-1	-7.97963E-1	-9.13155E0	-9.14187E0	5.19753E-3	9.35078E-2	2.72721E1	-3.26651E1	-3.2626E1	2.67956E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.15797E-1	-7.97725E-1	-9.13138E0	-9.1418E0	5.19753E-3	9.34124E-2	2.72738E1	-3.26567E1	-3.2616E1	2.6798E1	1.73529E-7	2.51225E-3	2.51225E-3	6.34588E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16035E-1	-7.97963E-1	-9.13141E0	-9.14214E0	5.19753E-3	9.33886E-2	2.72973E1	-3.2602E1	-3.26945E1	2.68124E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3514E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16202E-1	-7.97701E-1	-9.13162E0	-9.14192E0	5.53131E-3	9.34839E-2	2.73165E1	-3.26705E1	-3.2641E1	2.6786E1	1.73454E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16464E-1	-7.97677E-1	-9.13169E0	-9.14192E0	5.10216E-3	9.36985E-2	2.73249E1	-3.26783E1	-3.26452E1	2.68022E1	1.73379E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16298E-1	-7.97915E-1	-9.13157E0	-9.14209E0	5.26905E-3	9.34124E-2	2.73309E1	-3.26765E1	-3.26591E1	2.6813E1	1.73529E-7	2.5199E-3	2.5199E-3	6.27461E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16703E-1	-7.98106E-1	-9.13157E0	-9.14197E0	5.17368E-3	9.34124E-2	2.72965E1	-3.26731E1	-3.26425E1	2.68352E1	1.73228E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.16512E-1	-7.98655E-1	-9.13165E0	-9.14197E0	5.10216E-3	9.31978E-2	2.72588E1	-3.2608E1	-3.26759E1	2.68298E1	1.73528E-7	2.52473E-3	2.52473E-3	6.30182E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16464E-1	-7.98059E-1	-9.13122E0	-9.14197E0	5.34058E-3	9.35078E-2	2.73126E1	-3.26805E1	-3.26034E1	2.68094E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16321E-1	-7.98059E-1	-9.1316E0	-9.14176E0	5.48363E-3	9.33886E-2	2.73105E1	-3.26554E1	-3.26543E1	2.68111E1	1.73532E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.98561E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16417E-1	-7.98202E-1	-9.13138E0	-9.14187E0	5.36442E-3	9.32693E-2	2.73228E1	-3.2672E1	-3.26195E1	2.68088E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1