[Scan]
initial_time=2016-02-16T03:45:39
final_time=2016-02-16T03:45:58
ip_count=19
run=1030
dataset=8
scan=627
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.36899E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.94745E-10
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=5.08785E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.43046E-10
mult1=-1.03151E-8
mult2=-2.76441E-9
rf_tmon=-3.25888E-3
rf_agc=3.42588E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.78013E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62457E0
bslens_imon=2.87185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20083E1
lens5a_imon=1.98357E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.04982E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=3.06245E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02187E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0489E1
cs_ea1_imon=2.17824E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40848E0
lens1_imon=2.4999E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=2.99885E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03777E1
cs_ea2_imon=1.56817E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=3.00754E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.0524E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.89738E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15056E1
os_ea1_imon=1.89319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63375E1
os_ef1bup_imon=3.09755E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26079E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93663E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=3.28348E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=7.90179E-10
tplens_vset=1.4E-1
tplens_vmon=1.63042E0
tplens_imon=-1.45492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2652E1
iondef3_imon=1.50629E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.60258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98683E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.45612E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29787E0
ionrepsh_imon=2.02042E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33831E1
lens5b_imon=2.20709E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7438E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.79919E-1
os_ea2_imon=-4.23588E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00727E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61813E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4684E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.31284E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.29859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73352E1
iondef1_imon=1.09436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.02397E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.69711E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10408E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.97976E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.84283E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=7.07459E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.56473E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43261E0
defgridb_imon=6.35849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33728E1
os_fil1_imon=5.16751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83766E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66115E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30504E1
cs_fil1_imon=1.00935E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38187E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23443E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7808E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-1.9973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21981E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24078E-1
res40_imon=-2.4182E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16512E-1	-7.97939E-1	-9.13181E0	-9.14187E0	5.31673E-3	9.3627E-2	2.73345E1	-3.26777E1	-3.2596E1	2.67956E1	1.73309E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.15845E-1	-7.97915E-1	-9.13131E0	-9.14178E0	5.50747E-3	9.33886E-2	2.72757E1	-3.2648E1	-3.26309E1	2.67752E1	1.73383E-7	2.50989E-3	2.50989E-3	6.29128E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16441E-1	-7.97939E-1	-9.13138E0	-9.14204E0	5.38826E-3	9.32693E-2	2.73034E1	-3.26849E1	-3.26051E1	2.68037E1	1.73528E-7	2.5225E-3	2.5225E-3	6.33538E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16154E-1	-7.97939E-1	-9.13157E0	-9.14209E0	5.05447E-3	9.35078E-2	2.73312E1	-3.26788E1	-3.26343E1	2.67446E1	1.73394E-7	2.5165E-3	2.5165E-3	6.32784E-3	2.00145E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16488E-1	-7.97677E-1	-9.13148E0	-9.14204E0	5.31673E-3	9.3317E-2	2.73339E1	-3.2653E1	-3.26627E1	2.68175E1	1.73445E-7	2.51527E-3	2.51527E-3	6.29581E-3	2.01125E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16369E-1	-7.97629E-1	-9.1315E0	-9.14183E0	5.14984E-3	9.35078E-2	2.72821E1	-3.2675E1	-3.26024E1	2.67746E1	1.73455E-7	2.51918E-3	2.51918E-3	6.31283E-3	1.99655E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16584E-1	-7.97534E-1	-9.13143E0	-9.14173E0	5.19753E-3	9.377E-2	2.72847E1	-3.26482E1	-3.26344E1	2.67992E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16488E-1	-7.97629E-1	-9.13126E0	-9.14161E0	5.03063E-3	9.34839E-2	2.73151E1	-3.26567E1	-3.26018E1	2.67842E1	1.73303E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16202E-1	-7.98273E-1	-9.13115E0	-9.14173E0	5.03063E-3	9.32455E-2	2.72856E1	-3.26585E1	-3.26107E1	2.68111E1	1.73383E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.97815E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16202E-1	-7.97725E-1	-9.13122E0	-9.14204E0	5.48363E-3	9.36747E-2	2.73105E1	-3.26681E1	-3.2629E1	2.67692E1	1.73531E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.98153E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1594E-1	-7.97915E-1	-9.13115E0	-9.14197E0	4.52995E-3	9.35555E-2	2.73363E1	-3.26681E1	-3.2614E1	2.67884E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16369E-1	-7.98106E-1	-9.13124E0	-9.14183E0	5.05447E-3	9.35555E-2	2.73442E1	-3.26681E1	-3.2599E1	2.67944E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16393E-1	-7.97892E-1	-9.13129E0	-9.14161E0	5.36442E-3	9.33647E-2	2.73193E1	-3.26467E1	-3.25947E1	2.67523E1	1.73457E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9883E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16369E-1	-7.98202E-1	-9.1311E0	-9.14154E0	5.00679E-3	9.33409E-2	2.72991E1	-3.26597E1	-3.2635E1	2.67657E1	1.73529E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16178E-1	-7.9782E-1	-9.13136E0	-9.14202E0	5.19753E-3	9.32932E-2	2.73092E1	-3.26921E1	-3.25824E1	2.68147E1	1.73379E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16011E-1	-7.98106E-1	-9.13107E0	-9.14173E0	4.93526E-3	9.31501E-2	2.73424E1	-3.26695E1	-3.26444E1	2.68334E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16417E-1	-7.98345E-1	-9.13129E0	-9.14207E0	5.05447E-3	9.31263E-2	2.73706E1	-3.26726E1	-3.26284E1	2.68034E1	1.73529E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16369E-1	-7.97844E-1	-9.13141E0	-9.14192E0	5.22137E-3	9.33647E-2	2.72999E1	-3.26515E1	-3.2644E1	2.68047E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16321E-1	-7.98178E-1	-9.13141E0	-9.14199E0	5.19753E-3	9.37939E-2	2.73357E1	-3.26416E1	-3.26693E1	2.68214E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16298E-1	-7.98035E-1	-9.13115E0	-9.14209E0	5.31673E-3	9.35316E-2	2.73352E1	-3.26649E1	-3.2652E1	2.68208E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1