[Scan]
initial_time=2016-02-16T03:46:05
final_time=2016-02-16T03:46:25
ip_count=19
run=1030
dataset=8
scan=628
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=7.15935E-10
ql2_vset=
ql2_vmon=-7.97486E-1
ql2_imon=2.97666E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=4.74775E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.28932E-10
mult1=-1.01255E-8
mult2=-2.72803E-9
rf_tmon=-4.13595E-3
rf_agc=3.44792E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.20129E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.02345E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.0692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.21235E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04279E1
cs_ea2_imon=1.55661E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84094E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.21E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=1.90773E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63275E1
os_ef1bup_imon=3.12722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28154E0
cs_ionrep_imon=1.26605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=3.29516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.67048E-10
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25917E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26401E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.87001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=2.0303E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.20982E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.13008E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70735E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65402E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35866E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.29218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72818E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.06929E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=4.28844E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.99602E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92748E3
multa_neg_imon=6.78799E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.06197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.3554E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33724E1
os_fil1_imon=5.23272E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50923E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66001E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30485E1
cs_fil1_imon=1.01139E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2187E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=1.99061E-1
chamber_ion_pmon=1.73459E-7
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21761E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15868E-1	-7.97963E-1	-9.13126E0	-9.14223E0	5.14984E-3	9.35078E-2	2.7285E1	-3.26343E1	-3.26266E1	2.68221E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99283E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16059E-1	-7.97963E-1	-9.13136E0	-9.1423E0	5.50747E-3	9.32693E-2	2.7299E1	-3.26432E1	-3.25911E1	2.68188E1	1.73383E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15725E-1	-7.98082E-1	-9.13141E0	-9.14197E0	5.38826E-3	9.3174E-2	2.72941E1	-3.26921E1	-3.26254E1	2.67885E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16226E-1	-7.97939E-1	-9.1316E0	-9.14223E0	4.79221E-3	9.29832E-2	2.73081E1	-3.26392E1	-3.26416E1	2.6792E1	1.73383E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16035E-1	-7.97701E-1	-9.13143E0	-9.14209E0	4.93526E-3	9.32693E-2	2.72892E1	-3.26461E1	-3.26136E1	2.67788E1	1.73605E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16321E-1	-7.97534E-1	-9.13172E0	-9.14216E0	5.31673E-3	9.29594E-2	2.73039E1	-3.26578E1	-3.26223E1	2.67998E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.15988E-1	-7.98059E-1	-9.1315E0	-9.1419E0	5.00679E-3	9.31263E-2	2.72915E1	-3.26933E1	-3.26219E1	2.68076E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16202E-1	-7.97606E-1	-9.13146E0	-9.14195E0	5.26905E-3	9.26733E-2	2.73351E1	-3.27137E1	-3.26242E1	2.68082E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16059E-1	-7.98059E-1	-9.13157E0	-9.14161E0	5.14984E-3	9.2864E-2	2.72811E1	-3.26338E1	-3.2614E1	2.6819E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.15773E-1	-7.97987E-1	-9.13131E0	-9.14178E0	5.126E-3	9.31025E-2	2.73622E1	-3.26573E1	-3.26176E1	2.67914E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16488E-1	-7.97963E-1	-9.13169E0	-9.14218E0	4.98295E-3	9.32693E-2	2.73009E1	-3.26464E1	-3.2638E1	2.67659E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16202E-1	-7.97439E-1	-9.13167E0	-9.1418E0	5.07832E-3	9.31025E-2	2.73275E1	-3.26773E1	-3.26301E1	2.68232E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.97478E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16083E-1	-7.98154E-1	-9.13169E0	-9.14199E0	4.86374E-3	9.31025E-2	2.72739E1	-3.26554E1	-3.26524E1	2.67758E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97903E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16345E-1	-7.97987E-1	-9.13167E0	-9.14199E0	5.29289E-3	9.3317E-2	2.73008E1	-3.26725E1	-3.26138E1	2.6807E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97903E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16178E-1	-7.98011E-1	-9.13148E0	-9.14185E0	5.03063E-3	9.32932E-2	2.72874E1	-3.26632E1	-3.2603E1	2.68004E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.97559E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16345E-1	-7.98202E-1	-9.13165E0	-9.14216E0	5.17368E-3	9.31263E-2	2.73045E1	-3.27083E1	-3.25996E1	2.67878E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.98075E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16417E-1	-7.97701E-1	-9.1315E0	-9.14185E0	5.126E-3	9.35555E-2	2.73087E1	-3.26687E1	-3.2605E1	2.67692E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16298E-1	-7.97749E-1	-9.13146E0	-9.14195E0	5.10216E-3	9.33647E-2	2.73375E1	-3.26555E1	-3.26242E1	2.6798E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16131E-1	-7.97701E-1	-9.13141E0	-9.14195E0	4.76837E-3	9.34601E-2	2.73016E1	-3.2682E1	-3.26083E1	2.67659E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3514E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16298E-1	-7.97486E-1	-9.13134E0	-9.14216E0	5.07832E-3	9.36031E-2	2.72818E1	-3.26401E1	-3.25917E1	2.6777E1	1.73459E-7	2.52553E-3	2.52553E-3	6.29157E-3	1.99061E-1