[Scan]
initial_time=2016-02-16T03:46:59
final_time=2016-02-16T03:47:18
ip_count=19
run=1030
dataset=8
scan=630
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08752E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=6.71148E-10
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=3.05569E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.24247E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.14901E-10
mult1=-9.38114E-9
mult2=-2.80165E-9
rf_tmon=-5.01679E-3
rf_agc=3.21647E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.08292E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.82641E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19305E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=3.0883E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02489E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05377E1
cs_ea1_imon=2.18047E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.58691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.06019E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.27997E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=2.8562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.2942E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.27823E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.39098E-10
tplens_vset=1.4E-1
tplens_vmon=1.65264E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.5232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.79038E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=2.02084E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34053E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73889E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29209E-1
os_ea2_imon=-1.85626E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.20867E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.06123E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.31092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.07365E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=3.4827E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06407E0
cs_ionaccel_imon=-1.93475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56003E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.21174E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.93212E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33737E1
os_fil1_imon=5.40692E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72547E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=1.00844E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65869E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86222E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22061E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3245E-3
inlet_lpb_pmon=1.98984E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52521E-3
foreline_cvt_pmon=2.52521E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74308E-1
res40_imon=-2.71321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.15582E-1	-7.98178E-1	-9.13112E0	-9.14185E0	5.14984E-3	9.35793E-2	2.73464E1	-3.27092E1	-3.2606E1	2.67937E1	1.73309E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9917E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15916E-1	-7.98011E-1	-9.1315E0	-9.14171E0	4.88758E-3	9.37223E-2	2.73192E1	-3.26823E1	-3.26529E1	2.6813E1	1.73605E-7	2.51182E-3	2.51182E-3	6.31269E-3	1.98395E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16393E-1	-7.98225E-1	-9.13146E0	-9.14187E0	5.38826E-3	9.35078E-2	2.72939E1	-3.26337E1	-3.26172E1	2.6819E1	1.73605E-7	2.51456E-3	2.51456E-3	6.34346E-3	1.99429E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16083E-1	-7.98106E-1	-9.13134E0	-9.1418E0	5.4121E-3	9.29594E-2	2.72727E1	-3.26514E1	-3.26065E1	2.67794E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.15988E-1	-7.98321E-1	-9.13136E0	-9.14204E0	5.38826E-3	9.31263E-2	2.73033E1	-3.26633E1	-3.26326E1	2.6822E1	1.73383E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16369E-1	-7.97892E-1	-9.13157E0	-9.14161E0	5.36442E-3	9.32932E-2	2.72763E1	-3.26297E1	-3.25825E1	2.67878E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.1625E-1	-7.98106E-1	-9.13165E0	-9.14209E0	5.03063E-3	9.31978E-2	2.7324E1	-3.26455E1	-3.26148E1	2.67497E1	1.73379E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16345E-1	-7.97558E-1	-9.13131E0	-9.14185E0	5.4121E-3	9.3174E-2	2.72534E1	-3.26687E1	-3.26044E1	2.6851E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16035E-1	-7.97725E-1	-9.13157E0	-9.14149E0	5.24521E-3	9.32693E-2	2.72638E1	-3.26744E1	-3.26467E1	2.68395E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.98696E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.1625E-1	-7.98035E-1	-9.13157E0	-9.14216E0	5.03063E-3	9.31501E-2	2.73213E1	-3.2653E1	-3.2602E1	2.67631E1	1.73457E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16154E-1	-7.97725E-1	-9.13124E0	-9.14192E0	5.29289E-3	9.32455E-2	2.73442E1	-3.26615E1	-3.26428E1	2.67944E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16274E-1	-7.97796E-1	-9.13122E0	-9.14195E0	5.4121E-3	9.32932E-2	2.73357E1	-3.26723E1	-3.26518E1	2.68166E1	1.73529E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16655E-1	-7.97629E-1	-9.13126E0	-9.14173E0	5.126E-3	9.3174E-2	2.73159E1	-3.26885E1	-3.26512E1	2.67635E1	1.73457E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.98491E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16679E-1	-7.97486E-1	-9.13138E0	-9.14161E0	5.53131E-3	9.30309E-2	2.73201E1	-3.26657E1	-3.26633E1	2.68265E1	1.73605E-7	2.51359E-3	2.51359E-3	6.3074E-3	1.9852E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16345E-1	-7.98059E-1	-9.13141E0	-9.1418E0	5.03063E-3	9.31263E-2	2.73075E1	-3.26591E1	-3.2614E1	2.681E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1656E-1	-7.97677E-1	-9.13181E0	-9.14199E0	5.126E-3	9.30548E-2	2.72979E1	-3.26693E1	-3.2635E1	2.67836E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97903E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15845E-1	-7.97677E-1	-9.13196E0	-9.14192E0	5.17368E-3	9.30786E-2	2.72931E1	-3.26476E1	-3.26314E1	2.68262E1	1.73529E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.15749E-1	-7.97439E-1	-9.13146E0	-9.14207E0	4.93526E-3	9.3174E-2	2.73091E1	-3.26664E1	-3.26237E1	2.68076E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97903E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16011E-1	-7.97963E-1	-9.13143E0	-9.14197E0	4.86374E-3	9.32932E-2	2.73319E1	-3.26672E1	-3.26809E1	2.68614E1	1.73605E-7	2.51783E-3	2.51783E-3	6.34385E-3	1.98465E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16393E-1	-7.97582E-1	-9.13141E0	-9.14197E0	4.95911E-3	9.31501E-2	2.72909E1	-3.26726E1	-3.26443E1	2.68106E1	1.73605E-7	2.52521E-3	2.52521E-3	6.3245E-3	1.98984E-1