[Scan]
initial_time=2016-02-16T03:47:26
final_time=2016-02-16T03:47:45
ip_count=19
run=1030
dataset=8
scan=631
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.27208E-10
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=3.17276E-10
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=4.98414E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=5.50199E-10
mult1=-9.44025E-9
mult2=-2.9016E-9
rf_tmon=-5.39433E-3
rf_agc=3.25835E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.06981E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.82287E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.0244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0543E1
cs_ea1_imon=2.21339E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39793E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64122E1
os_ef1alow_imon=3.02198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.55187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.00793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.14681E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10937E1
os_restr1_imon=2.88359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=1.9005E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6399E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28572E0
cs_ionrep_imon=1.28996E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01256E1
cs_anode1_imon=3.26886E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.33471E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25977E1
iondef3_imon=1.51719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.60072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.9859E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.90983E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=2.01093E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34236E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.15245E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87019E-1
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60356E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-4.94767E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.31804E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02103E1
cs_anode2_imon=2.28713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.06397E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=2.90227E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.4705E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55913E1
einzel_imon=8.07346E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82544E2
mask1_imon=2.39005E-4
mask2_vset=0.0E0
mask2_vmon=-1.87305E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.76389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3377E1
os_fil1_imon=5.16065E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.87563E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66206E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30561E1
cs_fil1_imon=1.0098E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62144E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66334E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.22749E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.0341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22053E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73379E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.22071E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16274E-1	-7.98035E-1	-9.13117E0	-9.14199E0	5.03063E-3	9.32455E-2	2.73222E1	-3.26885E1	-3.26408E1	2.67845E1	1.73379E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.9911E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16369E-1	-7.98202E-1	-9.13112E0	-9.14166E0	4.8399E-3	9.2864E-2	2.73057E1	-3.26897E1	-3.26404E1	2.67452E1	1.73605E-7	2.51417E-3	2.51417E-3	6.35601E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16417E-1	-7.97844E-1	-9.1315E0	-9.14183E0	5.05447E-3	9.32455E-2	2.72964E1	-3.26868E1	-3.26301E1	2.67943E1	1.73528E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16011E-1	-7.97915E-1	-9.13124E0	-9.14199E0	4.76837E-3	9.33409E-2	2.73003E1	-3.26585E1	-3.26002E1	2.67704E1	1.73531E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16059E-1	-7.97963E-1	-9.13136E0	-9.14195E0	5.24521E-3	9.33409E-2	2.72715E1	-3.2639E1	-3.2606E1	2.68172E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98419E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16441E-1	-7.97987E-1	-9.1316E0	-9.14199E0	5.05447E-3	9.31025E-2	2.72408E1	-3.26503E1	-3.26248E1	2.68532E1	1.73457E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1656E-1	-7.97534E-1	-9.13131E0	-9.14192E0	4.8399E-3	9.29594E-2	2.73249E1	-3.26302E1	-3.26536E1	2.67752E1	1.73605E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.97294E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-2.09627E0	-8.16059E-1	-7.97629E-1	-9.13148E0	-9.14199E0	4.81606E-3	9.27687E-2	2.72883E1	-3.26783E1	-3.26416E1	2.67764E1	1.73303E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97731E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.16274E-1	-7.97772E-1	-9.13136E0	-9.14171E0	5.19753E-3	9.29356E-2	2.72903E1	-3.2649E1	-3.26484E1	2.67782E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98075E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16011E-1	-7.9751E-1	-9.13138E0	-9.14187E0	5.17368E-3	9.33409E-2	2.7288E1	-3.26499E1	-3.2615E1	2.68232E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.16011E-1	-7.97963E-1	-9.13126E0	-9.14192E0	5.126E-3	9.3317E-2	2.72781E1	-3.26554E1	-3.26122E1	2.67902E1	1.73605E-7	2.5147E-3	2.5147E-3	6.33538E-3	1.99754E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16035E-1	-7.97772E-1	-9.13143E0	-9.14214E0	5.00679E-3	9.3317E-2	2.72886E1	-3.27056E1	-3.2636E1	2.68214E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.98661E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.15701E-1	-7.98225E-1	-9.13174E0	-9.1418E0	5.00679E-3	9.32932E-2	2.7321E1	-3.27178E1	-3.26076E1	2.68132E1	1.73531E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98661E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.15892E-1	-7.98202E-1	-9.13162E0	-9.14207E0	5.4121E-3	9.34124E-2	2.72892E1	-3.26815E1	-3.25983E1	2.67972E1	1.73448E-7	2.52293E-3	2.52293E-3	6.30171E-3	1.99703E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.15821E-1	-7.97915E-1	-9.13172E0	-9.14202E0	5.60284E-3	9.3317E-2	2.73195E1	-3.26669E1	-3.26362E1	2.6786E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98322E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16178E-1	-7.98011E-1	-9.13186E0	-9.1418E0	5.14984E-3	9.3317E-2	2.72889E1	-3.26807E1	-3.26284E1	2.67668E1	1.73455E-7	2.51701E-3	2.51701E-3	6.33188E-3	1.98883E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16369E-1	-7.97868E-1	-9.13174E0	-9.14171E0	5.53131E-3	9.33886E-2	2.72974E1	-3.26266E1	-3.26496E1	2.6831E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16083E-1	-7.97963E-1	-9.13153E0	-9.14168E0	5.67436E-3	9.33886E-2	2.73328E1	-3.2649E1	-3.26366E1	2.68175E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16178E-1	-7.97987E-1	-9.13167E0	-9.14199E0	5.26905E-3	9.33409E-2	2.73207E1	-3.26915E1	-3.26212E1	2.67926E1	1.73605E-7	2.51287E-3	2.51287E-3	6.3445E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15797E-1	-7.97725E-1	-9.13162E0	-9.14171E0	5.38826E-3	9.34601E-2	2.73039E1	-3.2659E1	-3.25977E1	2.6786E1	1.73379E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.9963E-1