[Scan]
initial_time=2016-02-16T03:47:52
final_time=2016-02-16T03:48:12
ip_count=19
run=1030
dataset=8
scan=632
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.25908E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=3.00097E-10
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=4.99737E-10
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=5.14829E-10
mult1=-9.89692E-9
mult2=-2.84437E-9
rf_tmon=-4.79481E-3
rf_agc=3.44631E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=4.48811E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53489E1
cs_ef1b_imon=3.04825E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.20312E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45279E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.647E1
os_ef1alow_imon=2.98279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.58621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84303E1
cs_ef1a_imon=3.03197E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.30679E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=2.88548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=1.91466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63656E1
os_ef1bup_imon=3.11158E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.25138E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.25666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=7.5587E-10
tplens_vset=1.4E-1
tplens_vmon=1.62433E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.51825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26146E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.88086E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=2.0212E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.21657E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13034E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.56344E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71199E1
cs_ef2a_imon=3.18306E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63398E0
os_ef2alow_imon=-2.38256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41595E-1
os_ef2bup_imon=-5.26285E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10693E1
os_restr2_imon=2.87451E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.32193E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01939E1
cs_anode2_imon=2.28501E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.09538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.09813E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.80857E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12188E0
cs_ionaccel_imon=-1.97918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47272E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56264E1
einzel_imon=7.89307E-6
window_vset=0.0E0
window_vmon=2.30786E-1
window_imon=-1.01318E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82584E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86403E1
mask2_imon=-6.13339E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.68956E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=7.09848E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.80715E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3378E1
os_fil1_imon=4.74542E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85335E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66167E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30565E1
cs_fil1_imon=1.00875E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63074E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65865E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.50248E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.18012E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28317E-1
cs_fil2_imon=-2.41402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08314E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22035E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40065E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.73363E-1
res40_imon=-2.49579E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.15964E-1	-7.98202E-1	-9.13157E0	-9.14171E0	5.03063E-3	9.3174E-2	2.73051E1	-3.26779E1	-3.26349E1	2.6784E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16274E-1	-7.97892E-1	-9.13167E0	-9.14176E0	4.98295E-3	9.3317E-2	2.73137E1	-3.2637E1	-3.26144E1	2.6777E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16274E-1	-7.97796E-1	-9.13155E0	-9.14192E0	5.03063E-3	9.34124E-2	2.72962E1	-3.2659E1	-3.2613E1	2.6846E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16178E-1	-7.97892E-1	-9.13136E0	-9.14142E0	5.00679E-3	9.3174E-2	2.73057E1	-3.26561E1	-3.26408E1	2.67769E1	1.73605E-7	2.51096E-3	2.51096E-3	6.3074E-3	1.9968E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.15988E-1	-7.98106E-1	-9.1315E0	-9.14199E0	4.79221E-3	9.36508E-2	2.72768E1	-3.2672E1	-3.26006E1	2.67722E1	1.73605E-7	2.51525E-3	2.51525E-3	6.28592E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.1625E-1	-7.98035E-1	-9.13165E0	-9.14211E0	4.98295E-3	9.36031E-2	2.72997E1	-3.26627E1	-3.2629E1	2.68082E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16488E-1	-7.97629E-1	-9.1315E0	-9.14197E0	5.45979E-3	9.36747E-2	2.72775E1	-3.26807E1	-3.2614E1	2.68304E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16703E-1	-7.97701E-1	-9.13141E0	-9.14178E0	5.26905E-3	9.32455E-2	2.72985E1	-3.26326E1	-3.26218E1	2.68298E1	1.73531E-7	2.51417E-3	2.51417E-3	6.28592E-3	1.9934E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16584E-1	-7.97677E-1	-9.13115E0	-9.14173E0	5.53131E-3	9.31263E-2	2.72998E1	-3.26608E1	-3.26478E1	2.68214E1	1.73529E-7	2.51662E-3	2.51662E-3	6.28006E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16584E-1	-7.97486E-1	-9.13141E0	-9.14168E0	5.62668E-3	9.33647E-2	2.73087E1	-3.2629E1	-3.2608E1	2.68018E1	1.73379E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16417E-1	-7.9782E-1	-9.13124E0	-9.14176E0	5.36442E-3	9.31978E-2	2.72811E1	-3.26789E1	-3.26669E1	2.67801E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16107E-1	-7.97868E-1	-9.13148E0	-9.14197E0	5.10216E-3	9.3174E-2	2.73015E1	-3.26633E1	-3.26212E1	2.67716E1	1.73605E-7	2.50914E-3	2.50914E-3	6.34099E-3	1.99754E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16107E-1	-7.98202E-1	-9.1315E0	-9.14168E0	5.17368E-3	9.31263E-2	2.72954E1	-3.26778E1	-3.25993E1	2.67997E1	1.73457E-7	2.50989E-3	2.50989E-3	6.33977E-3	1.98322E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15916E-1	-7.9813E-1	-9.13122E0	-9.14185E0	5.07832E-3	9.31978E-2	2.72822E1	-3.26356E1	-3.26712E1	2.68194E1	1.73533E-7	2.51265E-3	2.51265E-3	6.323E-3	1.98955E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16274E-1	-7.98106E-1	-9.13115E0	-9.14187E0	4.95911E-3	9.30548E-2	2.73207E1	-3.26452E1	-3.2614E1	2.67926E1	1.73525E-7	2.51411E-3	2.51411E-3	6.3074E-3	1.991E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16154E-1	-7.97868E-1	-9.131E0	-9.14185E0	5.36442E-3	9.29356E-2	2.73339E1	-3.26434E1	-3.26344E1	2.67982E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98075E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16512E-1	-7.98297E-1	-9.13122E0	-9.14178E0	5.31673E-3	9.32455E-2	2.72616E1	-3.26248E1	-3.26842E1	2.67818E1	1.73605E-7	2.51225E-3	2.51225E-3	6.35692E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16417E-1	-7.98011E-1	-9.13134E0	-9.1419E0	5.36442E-3	9.29356E-2	2.73511E1	-3.26596E1	-3.26301E1	2.67385E1	1.73605E-7	2.51025E-3	2.51025E-3	6.35223E-3	1.97818E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.15988E-1	-7.97868E-1	-9.13129E0	-9.14156E0	5.34058E-3	9.31025E-2	2.72585E1	-3.26832E1	-3.26138E1	2.67964E1	1.73424E-7	2.51859E-3	2.51859E-3	6.34257E-3	1.98178E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.15797E-1	-7.98082E-1	-9.13162E0	-9.14149E0	5.36442E-3	9.32455E-2	2.73087E1	-3.26146E1	-3.26416E1	2.68328E1