[Scan]
initial_time=2016-02-16T03:48:46
final_time=2016-02-16T03:49:05
ip_count=19
run=1030
dataset=8
scan=634
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=6.31678E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=3.01468E-10
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=5.1713E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.52607E-10
mult1=-1.04026E-8
mult2=-2.73258E-9
rf_tmon=-3.97168E-3
rf_agc=3.39164E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.23336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53352E1
cs_ef1b_imon=3.04181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=2.19605E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.53264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.58267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.02126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.63307E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=2.89332E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1491E1
os_ea1_imon=1.89378E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.26978E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.26237E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.28917E-10
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.80909E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=2.00456E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8348E-1
os_ea2_imon=-3.62597E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.20903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60416E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-4.99812E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10493E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32618E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.31236E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.12431E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.15536E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.36595E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0899E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-8.28332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.73746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.26129E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.31981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33794E1
os_fil1_imon=4.85431E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.42824E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30622E1
cs_fil1_imon=1.00941E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66158E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.86051E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67112E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22037E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32644E-3
inlet_lpb_pmon=1.98883E-1
chamber_ion_pmon=1.73567E-7
chamber_cvt_pmon=2.51701E-3
foreline_cvt_pmon=2.51701E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53886E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16298E-1	-7.97844E-1	-9.13148E0	-9.14199E0	5.60284E-3	9.29356E-2	2.73069E1	-3.26458E1	-3.26825E1	2.67908E1	1.73303E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.15916E-1	-7.98225E-1	-9.13136E0	-9.14207E0	5.62668E-3	9.31978E-2	2.72757E1	-3.26321E1	-3.25868E1	2.68007E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.15868E-1	-7.97558E-1	-9.13157E0	-9.14226E0	5.8651E-3	9.3317E-2	2.72802E1	-3.26202E1	-3.26695E1	2.68233E1	1.73451E-7	2.5147E-3	2.5147E-3	6.28511E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.15868E-1	-7.97653E-1	-9.13157E0	-9.14164E0	5.17368E-3	9.37223E-2	2.72997E1	-3.26464E1	-3.26044E1	2.67931E1	1.73532E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15964E-1	-7.97987E-1	-9.13157E0	-9.14178E0	5.19753E-3	9.31978E-2	2.73225E1	-3.26885E1	-3.26314E1	2.68244E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16011E-1	-7.98059E-1	-9.13165E0	-9.1419E0	5.10216E-3	9.35316E-2	2.72859E1	-3.26699E1	-3.2644E1	2.68296E1	1.73303E-7	2.51225E-3	2.51225E-3	6.34588E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16154E-1	-7.97868E-1	-9.13134E0	-9.14195E0	5.43594E-3	9.34124E-2	2.73279E1	-3.26603E1	-3.2608E1	2.67968E1	1.73529E-7	2.51116E-3	2.51116E-3	6.34037E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15582E-1	-7.97796E-1	-9.13134E0	-9.14173E0	5.57899E-3	9.32217E-2	2.72845E1	-3.2636E1	-3.26431E1	2.67884E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16107E-1	-7.97868E-1	-9.13146E0	-9.1418E0	5.43594E-3	9.34124E-2	2.72877E1	-3.2706E1	-3.26017E1	2.68012E1	1.73531E-7	2.51525E-3	2.51525E-3	6.34518E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16011E-1	-7.97653E-1	-9.13155E0	-9.14187E0	5.22137E-3	9.36747E-2	2.73172E1	-3.26756E1	-3.26044E1	2.68026E1	1.73532E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.00231E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16107E-1	-7.97868E-1	-9.13167E0	-9.14185E0	5.126E-3	9.35316E-2	2.73243E1	-3.2602E1	-3.26284E1	2.67583E1	1.73445E-7	2.51642E-3	2.51642E-3	6.34815E-3	1.9965E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16178E-1	-7.97915E-1	-9.13143E0	-9.14202E0	5.19753E-3	9.3317E-2	2.72892E1	-3.26726E1	-3.26325E1	2.6825E1	1.73529E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.16202E-1	-7.97796E-1	-9.13136E0	-9.14223E0	5.17368E-3	9.32693E-2	2.72757E1	-3.26687E1	-3.2605E1	2.68232E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16107E-1	-7.98082E-1	-9.13126E0	-9.14187E0	4.95911E-3	9.33647E-2	2.73381E1	-3.26514E1	-3.27056E1	2.68052E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98419E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.16154E-1	-7.9782E-1	-9.13134E0	-9.14204E0	4.86374E-3	9.35555E-2	2.73454E1	-3.26476E1	-3.26825E1	2.67637E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16131E-1	-7.97296E-1	-9.13134E0	-9.14209E0	5.14984E-3	9.31978E-2	2.72733E1	-3.26829E1	-3.26089E1	2.68046E1	1.73309E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.97142E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16298E-1	-7.97582E-1	-9.13155E0	-9.14197E0	5.26905E-3	9.31025E-2	2.72606E1	-3.27077E1	-3.25767E1	2.68106E1	1.73605E-7	2.51693E-3	2.51693E-3	6.34661E-3	1.97994E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16345E-1	-7.9751E-1	-9.13148E0	-9.14195E0	5.126E-3	9.3174E-2	2.73424E1	-3.26645E1	-3.26062E1	2.67866E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98592E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16131E-1	-7.97939E-1	-9.13162E0	-9.14197E0	5.126E-3	9.30071E-2	2.72868E1	-3.26431E1	-3.26502E1	2.67833E1	1.73454E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.98247E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16321E-1	-7.98011E-1	-9.13174E0	-9.1419E0	5.17368E-3	9.31263E-2	2.72901E1	-3.26476E1	-3.26338E1	2.67968E1	1.73567E-7	2.51701E-3	2.51701E-3	6.32644E-3	1.98883E-1