[Scan]
initial_time=2016-02-16T03:49:12
final_time=2016-02-16T03:49:32
ip_count=19
run=1030
dataset=8
scan=635
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=6.25682E-10
ql2_vset=
ql2_vmon=-7.97534E-1
ql2_imon=3.10135E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.26297E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.41663E-10
mult1=-1.10087E-8
mult2=-2.9192E-9
rf_tmon=-3.8115E-3
rf_agc=3.45527E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=4.00627E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.39814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20261E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.06559E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02478E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05324E1
cs_ea1_imon=2.19888E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.95737E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.57523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83926E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.22323E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=2.86809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=1.91006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.10451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.28005E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=3.28651E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.73282E-10
tplens_vset=1.4E-1
tplens_vmon=1.59188E0
tplens_imon=-5.11285E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26444E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26725E1
iondef2_imon=1.59293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.50213E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.03252E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34029E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7935E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6408E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.32158E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.28786E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72696E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67722E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.09841E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.5419E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.15541E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=8.15322E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.87195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.20655E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33797E1
os_fil1_imon=5.00447E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89966E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66008E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=1.01011E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62252E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65981E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21948E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20559E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.16441E-1	-7.97558E-1	-9.13131E0	-9.14192E0	5.126E-3	9.29594E-2	2.72976E1	-3.26428E1	-3.25855E1	2.68337E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98153E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16011E-1	-7.97653E-1	-9.13153E0	-9.14185E0	5.14984E-3	9.29117E-2	2.7299E1	-3.26523E1	-3.26597E1	2.67801E1	1.73459E-7	2.51603E-3	2.51603E-3	6.35514E-3	1.99227E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.15868E-1	-7.97701E-1	-9.13129E0	-9.14187E0	5.43594E-3	9.29117E-2	2.73294E1	-3.26422E1	-3.26411E1	2.68007E1	1.73214E-7	2.51725E-3	2.51725E-3	6.33592E-3	1.99343E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.15988E-1	-7.97749E-1	-9.13122E0	-9.14204E0	5.10216E-3	9.3317E-2	2.73296E1	-3.26689E1	-3.2667E1	2.67818E1	1.73459E-7	2.51287E-3	2.51287E-3	6.32328E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16298E-1	-7.97796E-1	-9.1311E0	-9.14214E0	5.19753E-3	9.31263E-2	2.72697E1	-3.2662E1	-3.26667E1	2.67938E1	1.73529E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16226E-1	-7.97629E-1	-9.13117E0	-9.1419E0	4.88758E-3	9.3174E-2	2.73063E1	-3.26669E1	-3.26206E1	2.67908E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.15988E-1	-7.97462E-1	-9.13129E0	-9.14183E0	5.31673E-3	9.33409E-2	2.73393E1	-3.26326E1	-3.26591E1	2.67866E1	1.73454E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.1594E-1	-7.9782E-1	-9.13129E0	-9.14187E0	5.38826E-3	9.31978E-2	2.72797E1	-3.26655E1	-3.26378E1	2.67998E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16083E-1	-7.97701E-1	-9.13138E0	-9.14178E0	5.36442E-3	9.32455E-2	2.73015E1	-3.26633E1	-3.26074E1	2.68058E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16274E-1	-7.97939E-1	-9.13155E0	-9.1419E0	5.53131E-3	9.3317E-2	2.72925E1	-3.26819E1	-3.26434E1	2.67896E1	1.73529E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16298E-1	-7.98202E-1	-9.13155E0	-9.14216E0	5.07832E-3	9.3174E-2	2.72811E1	-3.26729E1	-3.26488E1	2.68136E1	1.73454E-7	2.51662E-3	2.51662E-3	6.27461E-3	1.9963E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1656E-1	-7.97725E-1	-9.13143E0	-9.14195E0	5.53131E-3	9.31263E-2	2.72913E1	-3.26993E1	-3.26212E1	2.68166E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16441E-1	-7.97582E-1	-9.1311E0	-9.14183E0	5.38826E-3	9.30309E-2	2.73261E1	-3.26374E1	-3.25972E1	2.6825E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16083E-1	-7.98035E-1	-9.13157E0	-9.14178E0	5.43594E-3	9.32932E-2	2.73315E1	-3.26837E1	-3.26416E1	2.6792E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16393E-1	-7.97319E-1	-9.13169E0	-9.14168E0	5.60284E-3	9.35555E-2	2.73177E1	-3.26639E1	-3.26242E1	2.6804E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16631E-1	-7.97963E-1	-9.13162E0	-9.14166E0	5.50747E-3	9.33647E-2	2.73051E1	-3.26714E1	-3.26319E1	2.67671E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16226E-1	-7.97439E-1	-9.13141E0	-9.14204E0	5.65052E-3	9.36985E-2	2.73231E1	-3.26939E1	-3.26098E1	2.67782E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16131E-1	-7.97796E-1	-9.13141E0	-9.14159E0	5.48363E-3	9.35078E-2	2.73122E1	-3.26785E1	-3.26254E1	2.67686E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.15725E-1	-7.97868E-1	-9.13129E0	-9.14185E0	5.43594E-3	9.32932E-2	2.73311E1	-3.26579E1	-3.26154E1	2.68208E1	1.73605E-7	2.52599E-3	2.52599E-3	6.31278E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16226E-1	-7.97534E-1	-9.13155E0	-9.14187E0	5.81741E-3	9.3317E-2	2.72696E1	-3.26725E1	-3.26444E1	2.67722E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00363E-1