[Scan]
initial_time=2016-02-16T03:49:39
final_time=2016-02-16T03:49:59
ip_count=19
run=1030
dataset=8
scan=636
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.39069E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=3.09157E-10
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=4.78363E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.5331E-10
mult1=-1.03269E-8
mult2=-2.77029E-9
rf_tmon=-4.58616E-3
rf_agc=3.37397E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.26722E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.75405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05356E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53577E1
cs_ef1b_imon=3.0578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.17846E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64965E1
os_ef1alow_imon=2.99199E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.5822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.03339E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.50993E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.88052E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=1.87817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.09743E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.28119E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01774E1
cs_anode1_imon=3.29098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.7498E-10
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26791E1
iondef2_imon=1.59013E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.56917E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=2.00831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.90777E-1
os_ea2_imon=-3.8947E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.19898E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63103E0
os_ef2alow_imon=-2.38256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81108E-1
os_ef2bup_imon=-5.277E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10888E1
os_restr2_imon=2.87132E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01744E1
cs_anode2_imon=2.28359E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72679E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67547E1
iondef4_imon=1.08795E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.04499E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.74003E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1154E0
cs_ionaccel_imon=-1.76333E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47325E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56452E1
einzel_imon=7.79045E-6
window_vset=0.0E0
window_vmon=1.94223E-1
window_imon=-8.00876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86486E1
mask2_imon=-7.58415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66021E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33789E1
os_fil1_imon=4.25004E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73541E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30612E1
cs_fil1_imon=1.00864E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62761E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65949E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.30786E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.41602E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70175E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31241E-1
cs_fil2_imon=-2.06607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01827E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21963E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.97903E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30312E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16274E-1	-7.97606E-1	-9.13117E0	-9.14192E0	5.62668E-3	9.3627E-2	2.72973E1	-3.26735E1	-3.26482E1	2.68034E1	1.73454E-7	2.51443E-3	2.51443E-3	6.27461E-3	1.99456E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.15773E-1	-7.97582E-1	-9.13115E0	-9.14209E0	5.34058E-3	9.31025E-2	2.72906E1	-3.26753E1	-3.26092E1	2.67816E1	1.73457E-7	2.51954E-3	2.51954E-3	6.35601E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16393E-1	-7.97653E-1	-9.13122E0	-9.14197E0	5.31673E-3	9.33409E-2	2.73308E1	-3.26603E1	-3.26242E1	2.68032E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00876E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16727E-1	-7.97462E-1	-9.13124E0	-9.14168E0	5.57899E-3	9.33409E-2	2.72841E1	-3.26464E1	-3.26116E1	2.67662E1	1.73605E-7	2.51952E-3	2.51952E-3	6.30171E-3	1.98267E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16345E-1	-7.97629E-1	-9.13115E0	-9.14168E0	5.10216E-3	9.35316E-2	2.73207E1	-3.26416E1	-3.26008E1	2.68016E1	1.73457E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.16298E-1	-7.97391E-1	-9.13129E0	-9.1419E0	5.14984E-3	9.35078E-2	2.72889E1	-3.26927E1	-3.26404E1	2.67758E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.15988E-1	-7.97915E-1	-9.13119E0	-9.14164E0	5.22137E-3	9.32932E-2	2.73303E1	-3.27125E1	-3.25978E1	2.67824E1	1.73605E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15916E-1	-7.97987E-1	-9.13074E0	-9.14161E0	5.17368E-3	9.32455E-2	2.72496E1	-3.26838E1	-3.26219E1	2.67884E1	1.73451E-7	2.51248E-3	2.51248E-3	6.30182E-3	1.98872E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.15868E-1	-7.98249E-1	-9.13105E0	-9.14173E0	5.26905E-3	9.31978E-2	2.73075E1	-3.26291E1	-3.26052E1	2.67866E1	1.73531E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.00021E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.15392E-1	-7.98082E-1	-9.13129E0	-9.14173E0	5.45979E-3	9.3174E-2	2.72727E1	-3.26272E1	-3.2606E1	2.67729E1	1.73451E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99401E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.15773E-1	-7.98249E-1	-9.13119E0	-9.14183E0	5.45979E-3	9.32455E-2	2.73303E1	-3.26699E1	-3.25816E1	2.67892E1	1.73457E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.98322E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.15535E-1	-7.98011E-1	-9.13119E0	-9.14185E0	5.45979E-3	9.3174E-2	2.73075E1	-3.26182E1	-3.26843E1	2.67958E1	1.73379E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99456E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.15678E-1	-7.97963E-1	-9.13122E0	-9.14214E0	5.03063E-3	9.3174E-2	2.73177E1	-3.2635E1	-3.26254E1	2.68028E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15845E-1	-7.97772E-1	-9.13105E0	-9.14207E0	5.17368E-3	9.33409E-2	2.72892E1	-3.26673E1	-3.26284E1	2.67656E1	1.73379E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.15964E-1	-7.98082E-1	-9.13103E0	-9.14187E0	5.14984E-3	9.35555E-2	2.73147E1	-3.26591E1	-3.26152E1	2.6774E1	1.73457E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.15678E-1	-7.97892E-1	-9.13131E0	-9.14147E0	5.29289E-3	9.30309E-2	2.73592E1	-3.26633E1	-3.26374E1	2.67818E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9917E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16298E-1	-7.97987E-1	-9.13119E0	-9.1418E0	5.31673E-3	9.31501E-2	2.72979E1	-3.26098E1	-3.26543E1	2.67553E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16035E-1	-7.97868E-1	-9.13119E0	-9.1414E0	5.05447E-3	9.31263E-2	2.73027E1	-3.26655E1	-3.26071E1	2.67636E1	1.73454E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16226E-1	-7.97701E-1	-9.13098E0	-9.14192E0	5.14984E-3	9.32693E-2	2.73153E1	-3.26464E1	-3.26416E1	2.68232E1	1.73531E-7	2.51203E-3	2.51203E-3	6.34518E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16059E-1	-7.98011E-1	-9.13098E0	-9.14209E0	5.29289E-3	9.33886E-2	2.72679E1	-3.26791E1	-3.26366E1	2.67547E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.97903E-1