[Scan]
initial_time=2016-02-16T03:50:59
final_time=2016-02-16T03:51:19
ip_count=19
run=1030
dataset=8
scan=639
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.35314E-10
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=2.76589E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.21874E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.37777E-10
mult1=-1.08111E-8
mult2=-2.81435E-9
rf_tmon=-4.06631E-3
rf_agc=3.46586E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.70181E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.91267E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12564E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53271E1
cs_ef1b_imon=3.05674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.20405E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37556E0
lens1_imon=2.98477E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.99517E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.57427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=3.0118E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.16052E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=2.88796E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=1.93981E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6345E1
os_ef1bup_imon=3.10132E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.26136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01703E1
cs_anode1_imon=3.26091E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.65307E-10
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26706E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26283E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98577E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.72612E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23467E0
ionrepsh_imon=2.03859E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.20658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.14202E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74555E-1
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71081E1
cs_ef2a_imon=3.19262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6157E0
os_ef2alow_imon=-2.51702E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28621E-1
os_ef2bup_imon=-5.08593E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.88229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.33281E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.31119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72796E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.09538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.05971E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=2.77507E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12601E0
cs_ionaccel_imon=-1.92964E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55922E1
einzel_imon=7.89661E-6
window_vset=0.0E0
window_vmon=2.17222E-1
window_imon=-9.81337E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-4.7534E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.90913E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.8637E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33828E1
os_fil1_imon=4.83389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90643E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65956E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=1.00938E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62926E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66278E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.36684E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.12115E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97244E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28444E-1
cs_fil2_imon=-2.14274E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.65519E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18517E-1
res40_imon=-2.55948E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16226E-1	-7.97701E-1	-9.13157E0	-9.1419E0	5.36442E-3	9.32932E-2	2.72974E1	-3.26526E1	-3.2639E1	2.67986E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.97815E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16059E-1	-7.97749E-1	-9.13165E0	-9.14204E0	5.31673E-3	9.33886E-2	2.72855E1	-3.26719E1	-3.25899E1	2.67995E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.15868E-1	-7.9782E-1	-9.13126E0	-9.14207E0	5.26905E-3	9.36031E-2	2.72691E1	-3.26419E1	-3.26349E1	2.67931E1	1.73448E-7	2.51384E-3	2.51384E-3	6.3245E-3	1.99163E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16226E-1	-7.97653E-1	-9.13129E0	-9.14209E0	5.57899E-3	9.35078E-2	2.72727E1	-3.26714E1	-3.26526E1	2.67902E1	1.73457E-7	2.51632E-3	2.51632E-3	6.2752E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16035E-1	-7.98106E-1	-9.13143E0	-9.1418E0	5.43594E-3	9.31025E-2	2.72733E1	-3.26554E1	-3.2629E1	2.67763E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15892E-1	-7.97796E-1	-9.13105E0	-9.14183E0	5.26905E-3	9.33409E-2	2.72992E1	-3.26809E1	-3.26673E1	2.68106E1	1.73454E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.15701E-1	-7.97915E-1	-9.13103E0	-9.1418E0	5.38826E-3	9.33886E-2	2.72853E1	-3.26651E1	-3.25972E1	2.68382E1	1.73457E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.97815E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.15988E-1	-7.97868E-1	-9.13098E0	-9.14187E0	4.91142E-3	9.35316E-2	2.73446E1	-3.2695E1	-3.25676E1	2.67781E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16107E-1	-7.97606E-1	-9.13098E0	-9.14199E0	5.07832E-3	9.34601E-2	2.72898E1	-3.26634E1	-3.26132E1	2.68002E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98322E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.15463E-1	-7.97772E-1	-9.13103E0	-9.14204E0	5.53131E-3	9.33647E-2	2.73358E1	-3.26573E1	-3.26065E1	2.67764E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.97559E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.15749E-1	-7.97701E-1	-9.13129E0	-9.14178E0	5.36442E-3	9.34601E-2	2.72949E1	-3.26392E1	-3.26981E1	2.68148E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16226E-1	-7.97772E-1	-9.13117E0	-9.14197E0	4.98295E-3	9.32932E-2	2.72984E1	-3.26327E1	-3.26444E1	2.68136E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15797E-1	-7.97844E-1	-9.13117E0	-9.14197E0	5.07832E-3	9.32455E-2	2.72656E1	-3.26278E1	-3.26313E1	2.67827E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98592E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1625E-1	-7.98106E-1	-9.13138E0	-9.14168E0	5.00679E-3	9.31978E-2	2.73045E1	-3.26675E1	-3.26236E1	2.6792E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98419E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16417E-1	-7.97892E-1	-9.13134E0	-9.1419E0	5.03063E-3	9.29832E-2	2.72976E1	-3.26463E1	-3.26393E1	2.68076E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16226E-1	-7.97892E-1	-9.13117E0	-9.14195E0	4.81606E-3	9.33647E-2	2.73082E1	-3.26298E1	-3.26198E1	2.67874E1	1.73459E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.98229E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.15964E-1	-7.97772E-1	-9.13129E0	-9.14202E0	4.8399E-3	9.32932E-2	2.72985E1	-3.26266E1	-3.2617E1	2.67995E1	1.73448E-7	2.51725E-3	2.51725E-3	6.3131E-3	1.98088E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16154E-1	-7.97772E-1	-9.1311E0	-9.14197E0	4.86374E-3	9.32217E-2	2.73428E1	-3.26648E1	-3.26382E1	2.67848E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.98592E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.15678E-1	-7.97629E-1	-9.13122E0	-9.14207E0	5.14984E-3	9.34362E-2	2.73255E1	-3.26759E1	-3.2599E1	2.6807E1	1.73532E-7	2.51603E-3	2.51603E-3	6.33388E-3	1.98727E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16107E-1	-7.97772E-1	-9.13136E0	-9.14202E0	4.93526E-3	9.31263E-2	2.72796E1	-3.26283E1	-3.26706E1	2.67758E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1