[Scan]
initial_time=2016-02-16T03:54:58
final_time=2016-02-16T03:55:18
ip_count=19
run=1030
dataset=8
scan=648
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.21939E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=3.07059E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=4.72152E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.49424E-10
mult1=-9.98405E-9
mult2=-2.82125E-9
rf_tmon=-5.19966E-3
rf_agc=3.24597E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.9531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69989E0
bslens_imon=2.81971E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19793E1
lens5a_imon=1.98844E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05562E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.05585E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.19354E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38473E0
lens1_imon=2.50685E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.99503E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03621E1
cs_ea2_imon=1.62101E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.02318E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.3323E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=2.87722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15809E1
os_ea1_imon=1.89493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63502E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=3.27861E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.51746E-10
tplens_vset=1.4E-1
tplens_vmon=1.64375E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.50838E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.59181E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98763E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.86214E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26484E0
ionrepsh_imon=2.01521E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33385E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53268E-1
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00758E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70881E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64593E0
os_ef2alow_imon=-2.60933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64795E-1
os_ef2bup_imon=-5.16365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11054E1
os_restr2_imon=2.8734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.29998E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.10653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9884E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=2.53534E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1035E0
cs_ionaccel_imon=-2.07762E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-9.51639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-6.28441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92581E3
multa_neg_imon=8.17307E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.62616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46451E0
defgridb_imon=6.33763E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=5.27177E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7392E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66618E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00813E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61781E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66639E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2575E-2
os_fil2_imon=-2.37379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29277E-1
cs_fil2_imon=-2.32745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.46464E-1
res40_imon=-2.59196E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.15964E-1	-7.97677E-1	-9.13141E0	-9.14214E0	5.36442E-3	9.31025E-2	2.73321E1	-3.26837E1	-3.26092E1	2.68106E1	1.73459E-7	2.51182E-3	2.51182E-3	6.33388E-3	1.99896E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.15487E-1	-7.98035E-1	-9.13122E0	-9.14214E0	5.10216E-3	9.33409E-2	2.72931E1	-3.26615E1	-3.26248E1	2.67664E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15654E-1	-7.97606E-1	-9.13148E0	-9.14178E0	5.126E-3	9.3317E-2	2.72886E1	-3.26809E1	-3.26231E1	2.67619E1	1.73451E-7	2.5147E-3	2.5147E-3	6.28511E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16011E-1	-7.97486E-1	-9.13148E0	-9.14195E0	4.79221E-3	9.3317E-2	2.72862E1	-3.26402E1	-3.26561E1	2.68496E1	1.73532E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16178E-1	-7.97772E-1	-9.13162E0	-9.14183E0	5.29289E-3	9.3317E-2	2.73225E1	-3.26897E1	-3.25954E1	2.68076E1	1.73531E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.15654E-1	-7.97963E-1	-9.13148E0	-9.14183E0	5.31673E-3	9.31263E-2	2.73069E1	-3.26759E1	-3.26128E1	2.67992E1	1.73454E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.1594E-1	-7.98011E-1	-9.13177E0	-9.14168E0	5.24521E-3	9.34362E-2	2.73134E1	-3.26785E1	-3.25977E1	2.67818E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.15606E-1	-7.97915E-1	-9.13141E0	-9.14187E0	5.45979E-3	9.33647E-2	2.72534E1	-3.26579E1	-3.2602E1	2.67698E1	1.73383E-7	2.50775E-3	2.50775E-3	6.31817E-3	1.9917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.16488E-1	-7.97915E-1	-9.13138E0	-9.14166E0	5.05447E-3	9.32932E-2	2.72582E1	-3.2629E1	-3.2626E1	2.67872E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.15558E-1	-7.97892E-1	-9.13148E0	-9.14171E0	5.43594E-3	9.31263E-2	2.72991E1	-3.26711E1	-3.26164E1	2.68238E1	1.73529E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.15797E-1	-7.98202E-1	-9.13179E0	-9.14192E0	5.26905E-3	9.33409E-2	2.73069E1	-3.26783E1	-3.26152E1	2.68064E1	1.73529E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.1594E-1	-7.98011E-1	-9.13165E0	-9.14214E0	5.53131E-3	9.33886E-2	2.73171E1	-3.26465E1	-3.26095E1	2.68345E1	1.73529E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15749E-1	-7.9751E-1	-9.13177E0	-9.14221E0	5.24521E-3	9.29832E-2	2.73051E1	-3.2684E1	-3.26385E1	2.68406E1	1.73533E-7	2.51369E-3	2.51369E-3	6.33341E-3	1.98628E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16083E-1	-7.97486E-1	-9.13191E0	-9.14226E0	4.64916E-3	9.32693E-2	2.73327E1	-3.26549E1	-3.26176E1	2.68082E1	1.73526E-7	2.51725E-3	2.51725E-3	6.29603E-3	1.98088E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16178E-1	-7.97629E-1	-9.13136E0	-9.1419E0	4.33922E-3	9.32455E-2	2.73135E1	-3.27071E1	-3.26158E1	2.67986E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16274E-1	-7.97939E-1	-9.1315E0	-9.14192E0	5.03063E-3	9.32217E-2	2.72618E1	-3.26615E1	-3.2617E1	2.67692E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.97388E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16584E-1	-7.97796E-1	-9.13157E0	-9.14202E0	5.19753E-3	9.31978E-2	2.73357E1	-3.26825E1	-3.26729E1	2.67932E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16488E-1	-7.97701E-1	-9.13167E0	-9.14176E0	4.72069E-3	9.31978E-2	2.73033E1	-3.26703E1	-3.26219E1	2.67764E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16059E-1	-7.97939E-1	-9.13174E0	-9.1419E0	4.8399E-3	9.32932E-2	2.73157E1	-3.26762E1	-3.26119E1	2.67902E1	1.73457E-7	2.51203E-3	2.51203E-3	6.34518E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15797E-1	-7.97939E-1	-9.13165E0	-9.14197E0	4.93526E-3	9.31263E-2	2.73016E1	-3.26514E1	-3.26354E1	2.67944E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9951E-1