[Scan]
initial_time=2016-02-16T03:55:25
final_time=2016-02-16T03:55:44
ip_count=19
run=1030
dataset=8
scan=649
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=6.27971E-10
ql2_vset=
ql2_vmon=-7.97486E-1
ql2_imon=3.1265E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=4.98879E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.25451E-10
mult1=-1.03032E-8
mult2=-2.74481E-9
rf_tmon=-4.39739E-3
rf_agc=3.32678E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.75521E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=2.00975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05471E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53337E1
cs_ef1b_imon=3.0694E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.17594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.55552E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.03395E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.97873E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11193E1
os_restr1_imon=2.87896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15534E1
os_ea1_imon=1.87889E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.26533E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=3.28139E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.69782E-10
tplens_vset=1.4E-1
tplens_vmon=1.6144E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.522E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.80683E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=2.00867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74362E1
cs_ef2b_imon=3.1191E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76958E-1
os_ea2_imon=-4.36334E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60539E0
os_ef2alow_imon=-2.60586E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10695E1
os_restr2_imon=2.88591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02093E1
cs_anode2_imon=2.29581E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.12834E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.11214E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.00977E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.26955E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-2.03244E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=2.22899E-1
window_imon=-1.00377E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.95382E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33857E1
os_fil1_imon=5.47449E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.87241E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00892E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6203E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66679E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61539E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2987E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.1594E-1	-7.98202E-1	-9.13146E0	-9.14202E0	5.48363E-3	9.33409E-2	2.73369E1	-3.26488E1	-3.26633E1	2.6789E1	1.73383E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16059E-1	-7.97653E-1	-9.13146E0	-9.14204E0	5.62668E-3	9.3174E-2	2.73075E1	-3.26407E1	-3.26389E1	2.67726E1	1.73454E-7	2.50898E-3	2.50898E-3	6.32386E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16274E-1	-7.97963E-1	-9.13131E0	-9.1419E0	5.14984E-3	9.31025E-2	2.72871E1	-3.26724E1	-3.26017E1	2.68094E1	1.73528E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16059E-1	-7.98249E-1	-9.13112E0	-9.14214E0	5.31673E-3	9.32932E-2	2.73099E1	-3.26272E1	-3.2614E1	2.6768E1	1.73532E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16631E-1	-7.9813E-1	-9.13155E0	-9.14166E0	5.45979E-3	9.35555E-2	2.72835E1	-3.26603E1	-3.26236E1	2.67782E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.97559E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16488E-1	-7.9813E-1	-9.13126E0	-9.14171E0	5.36442E-3	9.34362E-2	2.72943E1	-3.27053E1	-3.26134E1	2.67998E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.97388E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09333E0	-8.16441E-1	-7.97987E-1	-9.13131E0	-9.14192E0	5.22137E-3	9.34839E-2	2.73033E1	-3.2695E1	-3.26231E1	2.68202E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16488E-1	-7.98011E-1	-9.13172E0	-9.1418E0	5.10216E-3	9.35555E-2	2.72907E1	-3.26825E1	-3.26356E1	2.68499E1	1.73531E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.98153E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16059E-1	-7.9782E-1	-9.13124E0	-9.14171E0	4.98295E-3	9.3317E-2	2.72546E1	-3.26194E1	-3.26404E1	2.6783E1	1.73529E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98419E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16083E-1	-7.97391E-1	-9.13134E0	-9.14187E0	5.19753E-3	9.32693E-2	2.72762E1	-3.26455E1	-3.26272E1	2.6783E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98419E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16011E-1	-7.97677E-1	-9.13146E0	-9.14183E0	5.26905E-3	9.32455E-2	2.72997E1	-3.27083E1	-3.26452E1	2.67541E1	1.73457E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9951E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.15845E-1	-7.98059E-1	-9.13141E0	-9.14192E0	4.88758E-3	9.34124E-2	2.73309E1	-3.26867E1	-3.26032E1	2.67686E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16011E-1	-7.98225E-1	-9.13148E0	-9.14166E0	5.03063E-3	9.33886E-2	2.73093E1	-3.27005E1	-3.26308E1	2.66749E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.15535E-1	-7.98035E-1	-9.13172E0	-9.14173E0	4.98295E-3	9.34362E-2	2.73021E1	-3.2659E1	-3.26142E1	2.6771E1	1.73529E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16083E-1	-7.97582E-1	-9.13138E0	-9.14199E0	5.19753E-3	9.33409E-2	2.73225E1	-3.26675E1	-3.26158E1	2.68128E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9934E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15845E-1	-7.97653E-1	-9.13148E0	-9.14187E0	5.03063E-3	9.33647E-2	2.73104E1	-3.26826E1	-3.26284E1	2.68106E1	1.73303E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15892E-1	-7.97653E-1	-9.13155E0	-9.14195E0	5.48363E-3	9.32693E-2	2.73327E1	-3.26669E1	-3.26332E1	2.67571E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16035E-1	-7.97606E-1	-9.13157E0	-9.14197E0	5.19753E-3	9.3317E-2	2.72943E1	-3.26639E1	-3.26392E1	2.67589E1	1.73379E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16298E-1	-7.97558E-1	-9.13181E0	-9.14202E0	4.76837E-3	9.35078E-2	2.73145E1	-3.26579E1	-3.26189E1	2.67346E1	1.73455E-7	2.51593E-3	2.51593E-3	6.3074E-3	1.99312E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16512E-1	-7.97486E-1	-9.13131E0	-9.14183E0	5.07832E-3	9.35555E-2	2.73045E1	-3.26526E1	-3.26579E1	2.68196E1