[Scan]
initial_time=2016-02-16T03:55:52
final_time=2016-02-16T03:56:11
ip_count=19
run=1030
dataset=8
scan=650
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=6.24669E-10
ql2_vset=
ql2_vmon=-7.97534E-1
ql2_imon=2.93076E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.13804E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.20623E-10
mult1=-1.00775E-8
mult2=-2.78847E-9
rf_tmon=-4.53646E-3
rf_agc=3.35379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.89588E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6744E0
bslens_imon=2.71195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19672E1
lens5a_imon=1.99991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05204E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.09408E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02385E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04919E1
cs_ea1_imon=2.17824E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42934E0
lens1_imon=2.74671E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65211E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04107E1
cs_ea2_imon=1.56886E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83983E1
cs_ef1a_imon=3.04855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.96192E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=1.89667E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63062E1
os_ef1bup_imon=3.10207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2492E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=3.27548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.42257E-10
tplens_vset=1.4E-1
tplens_vmon=1.62E0
tplens_imon=-2.39349E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.48126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.58972E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.77154E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31061E0
ionrepsh_imon=2.03433E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3342E1
lens5b_imon=2.18971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74287E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.3357E-1
os_ea2_imon=-3.26254E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00588E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71513E1
cs_ef2a_imon=3.2098E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59786E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49156E-1
os_ef2bup_imon=-4.9447E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10677E1
os_restr2_imon=2.84977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31597E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.28365E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.10409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.10554E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.99385E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.7808E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-2.02549E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47629E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.58358E-6
window_vset=0.0E0
window_vmon=2.5881E-1
window_imon=-7.50074E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.85713E1
mask2_imon=-4.44252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.73159E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.78259E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.54735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3659E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33894E1
os_fil1_imon=4.42033E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.75657E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66542E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=1.00913E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63055E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2575E-2
os_fil2_imon=-2.31008E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.39285E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-1.82354E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22352E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73303E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.85474E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16441E-1	-7.98011E-1	-9.13143E0	-9.14207E0	5.17368E-3	9.35078E-2	2.73092E1	-3.26207E1	-3.26236E1	2.68052E1	1.73532E-7	2.51709E-3	2.51709E-3	6.30212E-3	1.98561E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.15892E-1	-7.97701E-1	-9.13141E0	-9.14211E0	4.93526E-3	9.33886E-2	2.72978E1	-3.2667E1	-3.25942E1	2.68118E1	1.73531E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16083E-1	-7.98011E-1	-9.13157E0	-9.14183E0	5.19753E-3	9.32693E-2	2.73104E1	-3.26697E1	-3.26142E1	2.67866E1	1.73374E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.15892E-1	-7.98011E-1	-9.13157E0	-9.14187E0	4.95911E-3	9.29832E-2	2.72892E1	-3.26966E1	-3.26351E1	2.68377E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16274E-1	-7.97558E-1	-9.13167E0	-9.14207E0	5.24521E-3	9.32932E-2	2.72953E1	-3.26664E1	-3.26217E1	2.68088E1	1.73605E-7	2.51575E-3	2.51575E-3	6.3126E-3	1.99119E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16226E-1	-7.98297E-1	-9.13165E0	-9.14183E0	5.17368E-3	9.3174E-2	2.73305E1	-3.26437E1	-3.26425E1	2.67607E1	1.73528E-7	2.51248E-3	2.51248E-3	6.33538E-3	1.99401E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16298E-1	-7.98416E-1	-9.13122E0	-9.14185E0	5.6982E-3	9.34124E-2	2.72552E1	-3.26446E1	-3.26639E1	2.67932E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16321E-1	-7.97606E-1	-9.13138E0	-9.14173E0	5.29289E-3	9.34124E-2	2.72831E1	-3.26438E1	-3.2604E1	2.67789E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00325E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16202E-1	-7.97963E-1	-9.13117E0	-9.14154E0	5.34058E-3	9.35555E-2	2.73075E1	-3.2636E1	-3.26762E1	2.67694E1	1.73374E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.0064E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16178E-1	-7.97963E-1	-9.13126E0	-9.14176E0	5.4121E-3	9.35793E-2	2.72913E1	-3.26591E1	-3.26554E1	2.68154E1	1.73531E-7	2.50989E-3	2.50989E-3	6.31817E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16178E-1	-7.98106E-1	-9.13141E0	-9.14187E0	5.34058E-3	9.36985E-2	2.73021E1	-3.26801E1	-3.2602E1	2.67956E1	1.73605E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16083E-1	-7.97796E-1	-9.13119E0	-9.1419E0	5.24521E-3	9.34124E-2	2.73004E1	-3.2639E1	-3.26366E1	2.67686E1	1.73309E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.00363E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16226E-1	-7.98011E-1	-9.13153E0	-9.14197E0	5.36442E-3	9.32217E-2	2.73273E1	-3.26086E1	-3.26374E1	2.66941E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16131E-1	-7.98035E-1	-9.13165E0	-9.14199E0	4.95911E-3	9.32693E-2	2.73057E1	-3.26537E1	-3.26095E1	2.68319E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00876E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16321E-1	-7.97892E-1	-9.13134E0	-9.14202E0	4.98295E-3	9.35316E-2	2.72516E1	-3.2739E1	-3.25725E1	2.67656E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1625E-1	-7.97677E-1	-9.13134E0	-9.14223E0	5.05447E-3	9.3627E-2	2.73574E1	-3.26308E1	-3.2644E1	2.68192E1	1.73379E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98419E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.15964E-1	-7.97749E-1	-9.13115E0	-9.14214E0	5.19753E-3	9.36747E-2	2.73014E1	-3.26793E1	-3.26407E1	2.68021E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16059E-1	-7.97725E-1	-9.13124E0	-9.14202E0	5.43594E-3	9.35316E-2	2.72951E1	-3.26915E1	-3.26325E1	2.67943E1	1.73379E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16393E-1	-7.97629E-1	-9.13143E0	-9.14166E0	5.14984E-3	9.33886E-2	2.72666E1	-3.26729E1	-3.2611E1	2.68118E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98592E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16631E-1	-7.97534E-1	-9.13155E0	-9.14187E0	5.07832E-3	9.32693E-2	2.72769E1	-3.26969E1	-3.26116E1	2.68028E1	1.73303E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99283E-1