[Scan]
initial_time=2016-02-16T03:56:45
final_time=2016-02-16T03:57:04
ip_count=19
run=1030
dataset=8
scan=652
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=6.11341E-10
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=3.00407E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.25463E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.33521E-10
mult1=-1.03424E-8
mult2=-2.66871E-9
rf_tmon=-4.81885E-3
rf_agc=3.35919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.90422E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=3.06847E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02463E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.1936E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4002E0
lens1_imon=2.57741E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.55192E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.06754E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=2.89368E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=1.9189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20824E0
cs_ionrep_imon=1.27362E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.28724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.34735E-10
tplens_vset=1.4E-1
tplens_vmon=1.63002E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.51335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.62258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98659E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.82805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=2.00722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7816E-1
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6366E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.87602E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.11788E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67656E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.97864E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.49028E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58202E0
defgridb_imon=6.48157E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33889E1
os_fil1_imon=4.96243E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03781E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6663E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=1.0098E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62408E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46587E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.222E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19358E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16441E-1	-7.97772E-1	-9.13131E0	-9.14211E0	5.24521E-3	9.30786E-2	2.73411E1	-3.26608E1	-3.26455E1	2.67862E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.15916E-1	-7.98178E-1	-9.13146E0	-9.14223E0	5.53131E-3	9.31263E-2	2.73382E1	-3.26716E1	-3.26316E1	2.68294E1	1.73605E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16226E-1	-7.97725E-1	-9.1311E0	-9.14207E0	5.34058E-3	9.3317E-2	2.73207E1	-3.26695E1	-3.26422E1	2.68176E1	1.73528E-7	2.51693E-3	2.51693E-3	6.29624E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.16512E-1	-7.9782E-1	-9.13117E0	-9.14204E0	5.43594E-3	9.33409E-2	2.73063E1	-3.26783E1	-3.26218E1	2.67917E1	1.73457E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.97984E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16226E-1	-7.97939E-1	-9.13107E0	-9.14187E0	5.17368E-3	9.38416E-2	2.72924E1	-3.26614E1	-3.26098E1	2.67613E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.1594E-1	-7.97868E-1	-9.13136E0	-9.14214E0	5.4121E-3	9.32932E-2	2.73155E1	-3.26438E1	-3.26425E1	2.68151E1	1.73459E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.97897E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16131E-1	-7.97606E-1	-9.13117E0	-9.14187E0	5.4121E-3	9.34839E-2	2.73131E1	-3.26676E1	-3.26095E1	2.6774E1	1.73528E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.97818E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16321E-1	-7.97462E-1	-9.13143E0	-9.14207E0	5.34058E-3	9.3627E-2	2.7265E1	-3.26225E1	-3.26673E1	2.67728E1	1.73379E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15916E-1	-7.98011E-1	-9.1315E0	-9.14178E0	5.07832E-3	9.31025E-2	2.73437E1	-3.26762E1	-3.26272E1	2.6792E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16083E-1	-7.97725E-1	-9.13126E0	-9.1418E0	5.29289E-3	9.33409E-2	2.73234E1	-3.2636E1	-3.26608E1	2.67836E1	1.73528E-7	2.51136E-3	2.51136E-3	6.33538E-3	2.00285E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.15821E-1	-7.97892E-1	-9.13129E0	-9.14204E0	5.34058E-3	9.31978E-2	2.7255E1	-3.27009E1	-3.26201E1	2.68047E1	1.73531E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.00021E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16131E-1	-7.97653E-1	-9.13172E0	-9.14183E0	5.4121E-3	9.35555E-2	2.72997E1	-3.26705E1	-3.26104E1	2.6768E1	1.73457E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00876E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16536E-1	-7.97415E-1	-9.13153E0	-9.14183E0	5.43594E-3	9.33647E-2	2.73153E1	-3.26741E1	-3.26494E1	2.6829E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98247E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.1625E-1	-7.97987E-1	-9.13172E0	-9.14183E0	5.19753E-3	9.33409E-2	2.73075E1	-3.26633E1	-3.25858E1	2.68041E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16417E-1	-7.97915E-1	-9.13181E0	-9.14204E0	5.43594E-3	9.33886E-2	2.73122E1	-3.26272E1	-3.25906E1	2.68058E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.15988E-1	-7.98345E-1	-9.13179E0	-9.14195E0	5.31673E-3	9.36031E-2	2.72732E1	-3.26537E1	-3.25912E1	2.67445E1	1.73457E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.97984E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16107E-1	-7.9813E-1	-9.1315E0	-9.14202E0	5.00679E-3	9.34124E-2	2.72841E1	-3.26705E1	-3.2644E1	2.67968E1	1.73235E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.15988E-1	-7.98106E-1	-9.13141E0	-9.14211E0	4.93526E-3	9.33886E-2	2.73351E1	-3.26518E1	-3.26206E1	2.68215E1	1.73529E-7	2.50898E-3	2.50898E-3	6.34037E-3	1.98592E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16321E-1	-7.97915E-1	-9.13143E0	-9.1423E0	5.29289E-3	9.3174E-2	2.72915E1	-3.2675E1	-3.26136E1	2.67938E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.99803E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16035E-1	-7.97629E-1	-9.13146E0	-9.14202E0	5.07832E-3	9.33886E-2	2.73165E1	-3.26266E1	-3.26266E1	2.67656E1	1.73605E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.00021E-1