[Scan]
initial_time=2016-02-16T03:57:11
final_time=2016-02-16T03:57:31
ip_count=19
run=1030
dataset=8
scan=653
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08703E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=6.30891E-10
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=2.90573E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.43118E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.22625E-10
mult1=-7.9085E-9
mult2=-2.95679E-9
rf_tmon=-5.2656E-3
rf_agc=3.3581E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.96001E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.07532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05288E1
cs_ea1_imon=2.17485E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.70358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64326E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.58436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.824E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=2.89909E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=1.88357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=1.27073E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.29156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.28559E-10
tplens_vset=1.4E-1
tplens_vmon=1.58856E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26614E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26283E1
iondef2_imon=1.61645E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=3.70932E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=2.02741E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7816E-1
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00767E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64861E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10571E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.32704E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01503E1
cs_anode2_imon=2.29867E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67821E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.95494E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.04914E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08329E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-3.12965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.82261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.14271E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.51619E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65721E0
defgridb_imon=6.23643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33895E1
os_fil1_imon=5.00447E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.05583E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66494E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=1.0098E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63909E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66489E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22324E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.51794E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.15988E-1	-7.97844E-1	-9.1316E0	-9.14214E0	5.24521E-3	9.33409E-2	2.73099E1	-3.26615E1	-3.2638E1	2.67968E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98592E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16607E-1	-7.97319E-1	-9.13141E0	-9.14176E0	5.53131E-3	9.35793E-2	2.73088E1	-3.26829E1	-3.26125E1	2.6825E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16488E-1	-7.9813E-1	-9.13148E0	-9.14207E0	5.4121E-3	9.36031E-2	2.72626E1	-3.26844E1	-3.26384E1	2.67662E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16488E-1	-7.97653E-1	-9.1311E0	-9.14178E0	5.36442E-3	9.32932E-2	2.7298E1	-3.26638E1	-3.26856E1	2.67858E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16441E-1	-7.97892E-1	-9.13138E0	-9.14209E0	5.6982E-3	9.34362E-2	2.73063E1	-3.26446E1	-3.2641E1	2.67675E1	1.73605E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16512E-1	-7.97701E-1	-9.13105E0	-9.14204E0	5.24521E-3	9.31025E-2	2.73051E1	-3.26699E1	-3.26296E1	2.67866E1	1.73454E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16631E-1	-7.97844E-1	-9.131E0	-9.14202E0	5.36442E-3	9.31978E-2	2.72697E1	-3.26602E1	-3.2639E1	2.67836E1	1.73457E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16369E-1	-7.97796E-1	-9.13146E0	-9.14221E0	5.57899E-3	9.32455E-2	2.72812E1	-3.2667E1	-3.25783E1	2.68076E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16345E-1	-7.97844E-1	-9.13134E0	-9.14209E0	5.45979E-3	9.32693E-2	2.72492E1	-3.26512E1	-3.26801E1	2.6804E1	1.73454E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16488E-1	-7.98035E-1	-9.13146E0	-9.14207E0	5.57899E-3	9.32217E-2	2.72986E1	-3.26502E1	-3.26767E1	2.68028E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.1625E-1	-7.98321E-1	-9.13181E0	-9.14207E0	5.48363E-3	9.30071E-2	2.72654E1	-3.2653E1	-3.26242E1	2.67968E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16202E-1	-7.98082E-1	-9.13169E0	-9.14192E0	5.67436E-3	9.3174E-2	2.73009E1	-3.26813E1	-3.26392E1	2.67926E1	1.73454E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16441E-1	-7.98321E-1	-9.13153E0	-9.14233E0	5.38826E-3	9.32455E-2	2.73387E1	-3.2652E1	-3.25824E1	2.67306E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.00499E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16011E-1	-7.9813E-1	-9.13169E0	-9.14197E0	5.19753E-3	9.31025E-2	2.73314E1	-3.26897E1	-3.26052E1	2.67957E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00876E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.15749E-1	-7.98154E-1	-9.13155E0	-9.14235E0	5.38826E-3	9.29832E-2	2.73175E1	-3.2662E1	-3.26095E1	2.67625E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.15749E-1	-7.97939E-1	-9.13155E0	-9.14218E0	5.48363E-3	9.27925E-2	2.72927E1	-3.26428E1	-3.26256E1	2.68197E1	1.73529E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15749E-1	-7.9751E-1	-9.1315E0	-9.14209E0	5.43594E-3	9.30548E-2	2.73226E1	-3.26442E1	-3.26104E1	2.67829E1	1.73404E-7	2.5148E-3	2.5148E-3	6.31106E-3	1.99168E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16131E-1	-7.97367E-1	-9.13146E0	-9.14211E0	5.74589E-3	9.31025E-2	2.72842E1	-3.26718E1	-3.2604E1	2.68279E1	1.73605E-7	2.51874E-3	2.51874E-3	6.29581E-3	1.991E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.15701E-1	-7.97725E-1	-9.13136E0	-9.14216E0	5.81741E-3	9.29594E-2	2.73243E1	-3.26386E1	-3.26506E1	2.68214E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9968E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16441E-1	-7.97796E-1	-9.13141E0	-9.14195E0	5.07832E-3	9.29117E-2	2.73387E1	-3.26283E1	-3.26614E1	2.67821E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00499E-1