[Scan]
initial_time=2016-02-16T03:57:38
final_time=2016-02-16T03:57:58
ip_count=19
run=1030
dataset=8
scan=654
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=6.28722E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.95925E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.0801E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.17368E-10
mult1=-1.07997E-8
mult2=-2.83693E-9
rf_tmon=-5.95473E-3
rf_agc=3.25953E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.03643E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=2.02155E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=3.08087E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.15605E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41916E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.58408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.02422E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.07946E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63398E1
os_ef1bup_imon=3.11701E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=1.28394E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=3.28E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.0616E-10
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-1.46693E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26472E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.6131E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.80623E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=2.05058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74397E1
cs_ef2b_imon=3.15072E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65193E-1
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70997E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63493E0
os_ef2alow_imon=-2.42167E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44523E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.88E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23118E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.28816E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.12219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.07634E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.97812E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.17347E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10639E0
cs_ionaccel_imon=-1.88301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=1.89305E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82593E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86269E1
mask2_imon=-5.06807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.00999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.91443E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=6.90735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59749E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33921E1
os_fil1_imon=5.18489E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.82608E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30709E1
cs_fil1_imon=1.00945E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66861E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50869E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54837E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.45488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22399E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.97731E-1
chamber_ion_pmon=1.73153E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16226E-1	-7.97725E-1	-9.1315E0	-9.14204E0	5.48363E-3	9.3174E-2	2.7275E1	-3.26413E1	-3.26402E1	2.67896E1	1.73379E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99977E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1656E-1	-7.97629E-1	-9.13157E0	-9.14183E0	5.38826E-3	9.32932E-2	2.72849E1	-3.26707E1	-3.26003E1	2.6792E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16679E-1	-7.98011E-1	-9.13146E0	-9.14176E0	5.74589E-3	9.33886E-2	2.73109E1	-3.26556E1	-3.25878E1	2.67989E1	1.73451E-7	2.50692E-3	2.50692E-3	6.31858E-3	2.0064E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16512E-1	-7.97844E-1	-9.13143E0	-9.14168E0	5.48363E-3	9.33886E-2	2.72961E1	-3.26723E1	-3.26086E1	2.67583E1	1.7339E-7	2.5199E-3	2.5199E-3	6.323E-3	1.99119E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16464E-1	-7.97558E-1	-9.13167E0	-9.14199E0	5.10216E-3	9.32932E-2	2.73345E1	-3.26807E1	-3.26278E1	2.67902E1	1.73374E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.98696E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16655E-1	-7.97939E-1	-9.13155E0	-9.14168E0	5.67436E-3	9.34124E-2	2.73364E1	-3.26343E1	-3.26225E1	2.67968E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16631E-1	-7.97415E-1	-9.13157E0	-9.14176E0	5.26905E-3	9.32217E-2	2.73291E1	-3.26452E1	-3.26494E1	2.68046E1	1.73457E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16107E-1	-7.9813E-1	-9.13131E0	-9.14211E0	5.31673E-3	9.32217E-2	2.73219E1	-3.26963E1	-3.25924E1	2.68196E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.15892E-1	-7.97725E-1	-9.13117E0	-9.14204E0	5.6982E-3	9.29594E-2	2.72787E1	-3.26452E1	-3.26068E1	2.68016E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98661E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.1625E-1	-7.97796E-1	-9.13138E0	-9.14223E0	5.19753E-3	9.3174E-2	2.73189E1	-3.26831E1	-3.265E1	2.67601E1	1.73528E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.97994E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16417E-1	-7.97796E-1	-9.13155E0	-9.14211E0	5.03063E-3	9.35316E-2	2.73117E1	-3.26747E1	-3.26146E1	2.68022E1	1.73454E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.98247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.15749E-1	-7.97749E-1	-9.13134E0	-9.14204E0	5.53131E-3	9.35555E-2	2.73228E1	-3.26803E1	-3.26408E1	2.68082E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.97903E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16512E-1	-7.97319E-1	-9.13124E0	-9.14207E0	5.24521E-3	9.34362E-2	2.73177E1	-3.26813E1	-3.26122E1	2.69073E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.98153E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16321E-1	-7.97701E-1	-9.13105E0	-9.1419E0	4.88758E-3	9.31263E-2	2.73069E1	-3.26832E1	-3.26343E1	2.6804E1	1.73228E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98075E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.15988E-1	-7.97582E-1	-9.13124E0	-9.14192E0	5.19753E-3	9.29594E-2	2.73225E1	-3.26639E1	-3.26278E1	2.68022E1	1.73235E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.98491E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.16393E-1	-7.97319E-1	-9.13129E0	-9.14185E0	5.29289E-3	9.3317E-2	2.72793E1	-3.26747E1	-3.26494E1	2.67866E1	1.73383E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9934E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16536E-1	-7.97606E-1	-9.13153E0	-9.14197E0	5.55515E-3	9.32932E-2	2.73171E1	-3.27011E1	-3.25936E1	2.68274E1	1.73605E-7	2.52139E-3	2.52139E-3	6.32978E-3	1.99048E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16536E-1	-7.97629E-1	-9.13148E0	-9.14211E0	5.26905E-3	9.34362E-2	2.73069E1	-3.2659E1	-3.26248E1	2.67966E1	1.73531E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.98153E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16369E-1	-7.98011E-1	-9.13165E0	-9.14235E0	5.43594E-3	9.31501E-2	2.73039E1	-3.26729E1	-3.26368E1	2.6789E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.97815E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16131E-1	-7.97868E-1	-9.13143E0	-9.14216E0	5.19753E-3	9.32455E-2	2.73098E1	-3.26744E1	-3.26472E1	2.68178E1	1.73153E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.97731E-1