[Scan]
initial_time=2016-02-16T03:59:08
final_time=2016-02-16T03:59:28
ip_count=19
run=1030
dataset=9
scan=657
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.76841E-6
ql1_vset=
ql1_vmon=-8.79977E1
ql1_imon=-3.37975E-9
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=5.36692E-10
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-8.7826E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.39472E-9
mult1=-1.15946E-8
mult2=-2.6747E-9
rf_tmon=-4.69267E-3
rf_agc=3.23482E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.7621E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6522E0
bslens_imon=2.91316E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19992E1
lens5a_imon=1.96183E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53491E1
cs_ef1b_imon=3.09409E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02302E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.19576E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04865E0
lens1_imon=1.82764E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64429E1
os_ef1alow_imon=2.9649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.57414E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84489E1
cs_ef1a_imon=3.04711E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.79066E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10978E1
os_restr1_imon=2.8582E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=1.90442E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63747E1
os_ef1bup_imon=3.10919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25595E0
cs_ionrep_imon=1.28214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01709E1
cs_anode1_imon=3.26253E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=9.87291E-10
tplens_vset=1.4E-1
tplens_vmon=1.63483E0
tplens_imon=-1.05839E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25797E1
iondef3_imon=1.50023E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.5979E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98613E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=5.4661E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26915E0
ionrepsh_imon=2.00472E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33536E1
lens5b_imon=2.20566E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74473E1
cs_ef2b_imon=3.14979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64463E-1
os_ea2_imon=-3.82993E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71118E1
cs_ef2a_imon=3.17697E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64847E0
os_ef2alow_imon=-2.4019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88103E-1
os_ef2bup_imon=-5.27413E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10559E1
os_restr2_imon=2.87867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.32337E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01591E1
cs_anode2_imon=2.27839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72702E1
iondef1_imon=1.10892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.11037E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.02672E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=4.59778E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10889E0
cs_ionaccel_imon=-2.06636E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47505E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55796E1
einzel_imon=7.63751E-6
window_vset=0.0E0
window_vmon=2.14091E-1
window_imon=-8.65117E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82576E2
mask1_imon=2.3902E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-4.12136E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.56538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.68773E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.46969E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44219E0
defgridb_imon=5.77708E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33906E1
os_fil1_imon=5.00613E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71843E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30729E1
cs_fil1_imon=1.00903E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66576E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40358E-2
os_fil2_imon=-2.18565E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68445E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59084E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31098E-1
cs_fil2_imon=-2.28072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4382E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.223E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.97478E-1
chamber_ion_pmon=1.73235E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99951E-1
res40_imon=-2.49249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3735E4	1.3E1	1.47E2	4.1E1	-7.30918E-2	-8.79975E1	1.90735E-4	-8.80013E1	3.57628E-4	5.6982E-3	9.30786E-2	2.73207E1	-3.26397E1	-3.26653E1	2.67639E1	1.73536E-7	2.50924E-3	2.50924E-3	6.30239E-3	1.99706E-1
2.0E0	5.39E3	2.0E0	3.16E2	1.6E2	-7.29374E-2	-8.79977E1	3.57628E-4	-8.80017E1	5.48363E-4	5.53131E-3	9.31263E-2	2.72996E1	-3.26872E1	-3.26254E1	2.67487E1	1.73526E-7	2.51725E-3	2.51725E-3	6.3531E-3	1.99883E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79977E1	-3.09944E-4	-8.80017E1	9.53674E-5	5.53131E-3	9.31263E-2	2.72821E1	-3.26614E1	-3.26207E1	2.67812E1	1.73144E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.79977E1	-2.6226E-4	-8.80016E1	6.67572E-4	5.50747E-3	9.32932E-2	2.72957E1	-3.26366E1	-3.26378E1	2.67885E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.79978E1	9.53674E-5	-8.80018E1	3.09944E-4	5.43594E-3	9.31501E-2	2.72799E1	-3.26543E1	-3.26434E1	2.67935E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.79977E1	-4.76837E-5	-8.80017E1	4.52995E-4	5.38826E-3	9.33647E-2	2.73057E1	-3.26452E1	-3.26122E1	2.68076E1	1.73605E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79977E1	0.0E0	-8.80017E1	3.57628E-4	5.62668E-3	9.31978E-2	2.73171E1	-3.26921E1	-3.26272E1	2.67926E1	1.73457E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.79973E1	4.29153E-4	-8.80013E1	4.76837E-4	6.05583E-3	9.31978E-2	2.73448E1	-3.26476E1	-3.2641E1	2.684E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98764E-1
1.2E1	3.08E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.79978E1	6.19888E-4	-8.80014E1	4.29153E-4	5.57899E-3	9.34124E-2	2.73159E1	-3.26675E1	-3.26206E1	2.68208E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98764E-1
1.3E1	1.9E1	1.0E0	5.25E2	3.53E2	-7.286E-2	-8.79974E1	3.33786E-4	-8.80016E1	4.05312E-4	5.65052E-3	9.32693E-2	2.72745E1	-3.26663E1	-3.26362E1	2.67668E1	1.73379E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98937E-1
1.4E1	7.0E2	3.0E0	5.66E2	3.82E2	-7.3401E-2	-8.79976E1	2.38419E-4	-8.80015E1	4.76837E-4	5.65052E-3	9.29594E-2	2.73246E1	-3.26632E1	-3.26331E1	2.67601E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99283E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.79976E1	-1.90735E-4	-8.80012E1	6.91414E-4	5.6982E-3	9.34124E-2	2.73207E1	-3.26567E1	-3.26063E1	2.67578E1	1.73531E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.9917E-1
1.6E1	3.175E3	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79977E1	1.43051E-4	-8.80013E1	7.62939E-4	5.8651E-3	9.33409E-2	2.73051E1	-3.26722E1	-3.26385E1	2.67864E1	1.73605E-7	2.51393E-3	2.51393E-3	6.29684E-3	1.98229E-1
1.7E1	3.6497E4	1.2E1	6.87E2	4.7E2	-7.24736E-2	-8.79977E1	9.53674E-5	-8.80012E1	3.33786E-4	5.55515E-3	9.34839E-2	2.72793E1	-3.26819E1	-3.25942E1	2.68226E1	1.73448E-7	2.51498E-3	2.51498E-3	6.30171E-3	1.97731E-1
1.8E1	1.58993E5	1.06E2	7.27E2	5.0E2	-7.26282E-2	-8.7998E1	1.43051E-4	-8.80013E1	3.09944E-4	5.62668E-3	9.34124E-2	2.73159E1	-3.26633E1	-3.26362E1	2.67938E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98764E-1
1.9E1	2.19E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.79977E1	4.05312E-4	-8.80013E1	3.33786E-4	5.93662E-3	9.32455E-2	2.72799E1	-3.26765E1	-3.25816E1	2.67746E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.97903E-1
2.0E1	2.6E2	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.79974E1	4.76837E-5	-8.80013E1	5.48363E-4	5.6982E-3	9.34362E-2	2.73087E1	-3.26296E1	-3.26759E1	2.67968E1	1.73567E-7	2.51716E-3	2.51716E-3	6.31563E-3	1.97903E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.79976E1	3.57628E-4	-8.80016E1	7.15256E-4	5.62668E-3	9.30071E-2	2.72992E1	-3.26779E1	-3.26567E1	2.67976E1					
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.79977E1	2.38419E-4	-8.80013E1	6.4373E-4	5.57899E-3	9.31501E-2	2.73303E1	-3.26591E1	-3.26344E1	2.68341E1	1.73303E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.97731E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.79977E1	-1.43051E-4	-8.80017E1	6.91414E-4	5.6982E-3	9.31978E-2	2.72702E1	-3.26843E1	-3.25797E1	2.68316E1	1.73235E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.97478E-1