[Scan]
initial_time=2016-02-16T03:59:35
final_time=2016-02-16T03:59:54
ip_count=19
run=1030
dataset=9
scan=658
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.73199E-6
ql1_vset=
ql1_vmon=-8.79978E1
ql1_imon=-1.65354E-9
ql2_vset=
ql2_vmon=2.6226E-4
ql2_imon=4.61757E-10
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-5.07772E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.15435E-9
mult1=-1.04508E-8
mult2=-2.86033E-9
rf_tmon=-3.71333E-3
rf_agc=3.40486E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.13363E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.85119E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53406E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=2.18967E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0454E0
lens1_imon=1.81414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.58798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.53043E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.90702E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=1.90581E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63251E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.26377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91834E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=3.29228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=8.13937E-10
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26308E1
iondef2_imon=1.61664E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.6463E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=2.02332E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43956E-1
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00927E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60897E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.08462E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.89296E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.29254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.10909E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.07802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=4.21071E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.99962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.19068E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66613E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=1.00921E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28387E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22351E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30171E-3
inlet_lpb_pmon=1.99343E-1
chamber_ion_pmon=1.7337E-7
chamber_cvt_pmon=2.51952E-3
foreline_cvt_pmon=2.51952E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77312E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3954E4	1.7E1	1.47E2	4.1E1	-7.24736E-2	-8.7998E1	6.4373E-4	-8.80015E1	5.72205E-4	5.38826E-3	9.33409E-2	2.73092E1	-3.27068E1	-3.26225E1	2.67781E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
2.0E0	5.369E3	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.79981E1	3.33786E-4	-8.80012E1	5.24521E-4	5.60284E-3	9.30309E-2	2.73282E1	-3.26749E1	-3.26227E1	2.67903E1	1.73605E-7	2.51393E-3	2.51393E-3	6.29684E-3	1.99227E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.7998E1	3.57628E-4	-8.80012E1	5.72205E-4	5.48363E-3	9.32932E-2	2.73155E1	-3.26892E1	-3.26521E1	2.67566E1	1.73536E-7	2.51623E-3	2.51623E-3	6.31242E-3	1.99389E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.79981E1	2.86102E-4	-8.80015E1	7.15256E-4	5.07832E-3	9.33647E-2	2.73092E1	-3.2695E1	-3.26313E1	2.67595E1	1.73532E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79979E1	5.24521E-4	-8.80012E1	2.38419E-4	5.07832E-3	9.35078E-2	2.72763E1	-3.26609E1	-3.2629E1	2.67806E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.79979E1	3.09944E-4	-8.80014E1	3.33786E-4	5.36442E-3	9.31025E-2	2.72823E1	-3.26609E1	-3.25858E1	2.67728E1	1.73303E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79979E1	1.90735E-4	-8.80012E1	3.09944E-4	5.53131E-3	9.3174E-2	2.72751E1	-3.26386E1	-3.26488E1	2.678E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.79977E1	-7.15256E-5	-8.80009E1	3.33786E-4	5.53131E-3	9.34362E-2	2.72831E1	-3.26499E1	-3.26615E1	2.68338E1	1.73451E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.99401E-1
1.2E1	3.51E2	1.0E0	4.85E2	3.23E2	-7.29374E-2	-8.79979E1	3.09944E-4	-8.80009E1	2.38419E-4	5.88894E-3	9.3174E-2	2.73135E1	-3.26326E1	-3.26056E1	2.67625E1	1.73567E-7	2.5117E-3	2.5117E-3	6.31288E-3	1.98764E-1
1.3E1	8.0E0	1.0E0	5.25E2	3.53E2	-7.30146E-2	-8.79979E1	4.76837E-4	-8.80011E1	9.53674E-5	5.60284E-3	9.34124E-2	2.73358E1	-3.26779E1	-3.26172E1	2.67908E1					
1.4E1	6.47E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79978E1	9.53674E-5	-8.80011E1	2.14577E-4	5.31673E-3	9.31978E-2	2.73201E1	-3.26482E1	-3.26615E1	2.68298E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.79978E1	2.6226E-4	-8.80013E1	3.09944E-4	5.48363E-3	9.33647E-2	2.72654E1	-3.26783E1	-3.26044E1	2.67746E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
1.6E1	3.11E3	1.0E0	6.47E2	4.41E2	-7.22418E-2	-8.79977E1	2.86102E-4	-8.80012E1	4.29153E-4	5.50747E-3	9.3317E-2	2.73228E1	-3.26585E1	-3.26343E1	2.67607E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9911E-1
1.7E1	3.6417E4	1.4E1	6.87E2	4.7E2	-7.22418E-2	-8.79977E1	0.0E0	-8.80012E1	1.66893E-4	5.53131E-3	9.3317E-2	2.72721E1	-3.2647E1	-3.26332E1	2.67902E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00021E-1
1.8E1	1.59667E5	1.01E2	7.27E2	5.0E2	-7.17779E-2	-8.79979E1	1.66893E-4	-8.80013E1	4.05312E-4	5.38826E-3	9.35316E-2	2.73141E1	-3.27065E1	-3.25876E1	2.67902E1	1.73379E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.98419E-1
1.9E1	2.25E3	1.0E0	7.68E2	5.29E2	-7.13915E-2	-8.79978E1	1.90735E-4	-8.80013E1	2.38419E-4	5.57899E-3	9.31501E-2	2.7269E1	-3.26284E1	-3.26404E1	2.6822E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
2.0E1	3.09E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.7998E1	3.57628E-4	-8.80011E1	1.66893E-4	5.34058E-3	9.34601E-2	2.73538E1	-3.26765E1	-3.26681E1	2.68076E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.79981E1	3.8147E-4	-8.80013E1	2.6226E-4	5.84126E-3	9.35793E-2	2.73051E1	-3.26053E1	-3.26473E1	2.67948E1	1.73529E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99283E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.79981E1	3.09944E-4	-8.80009E1	2.6226E-4	5.88894E-3	9.35078E-2	2.73475E1	-3.26722E1	-3.26547E1	2.68325E1	1.73394E-7	2.51752E-3	2.51752E-3	6.31761E-3	1.99176E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79978E1	2.6226E-4	-8.80011E1	4.29153E-4	5.65052E-3	9.36031E-2	2.73159E1	-3.26308E1	-3.26506E1	2.68202E1	1.7337E-7	2.51952E-3	2.51952E-3	6.30171E-3	1.99343E-1