[Scan]
initial_time=2016-02-16T04:00:01
final_time=2016-02-16T04:00:21
ip_count=19
run=1030
dataset=9
scan=659
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.79509E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-1.36715E-9
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=4.34899E-10
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-4.20107E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.00789E-9
mult1=-1.16187E-8
mult2=-2.95814E-9
rf_tmon=-5.40165E-3
rf_agc=3.32795E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.06461E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20566E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.07424E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=2.21235E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04015E0
lens1_imon=1.38056E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.58581E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.02919E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.57275E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15678E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27493E0
cs_ionrep_imon=1.27578E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=3.28183E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=8.10766E-10
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=2.87048E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26675E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.66311E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=2.02705E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.20514E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.77559E-1
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00897E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=2.88359E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.12041E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.09303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=4.28569E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.65364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56748E1
einzel_imon=8.14915E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-1.22477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39304E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.23861E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.84207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50166E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=5.90117E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33918E1
os_fil1_imon=4.42784E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30712E1
cs_fil1_imon=1.00748E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63099E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66427E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63344E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-1.90313E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2227E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42784E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.415E4	1.6E1	1.47E2	4.1E1	-7.30146E-2	-8.79985E1	1.66893E-4	-8.80013E1	6.91414E-4	5.26905E-3	9.3627E-2	2.73523E1	-3.26325E1	-3.26195E1	2.67937E1	1.73298E-7	2.5147E-3	2.5147E-3	6.29067E-3	1.98872E-1
2.0E0	5.538E3	3.0E0	3.16E2	1.6E2	-7.30918E-2	-8.79986E1	1.19209E-4	-8.80013E1	5.48363E-4	5.84126E-3	9.3174E-2	2.73137E1	-3.26352E1	-3.26187E1	2.68544E1	1.73605E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9968E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.79984E1	5.00679E-4	-8.80014E1	2.6226E-4	5.31673E-3	9.32217E-2	2.73148E1	-3.26607E1	-3.26237E1	2.67607E1	1.73454E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98419E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.79984E1	1.90735E-4	-8.80013E1	2.14577E-4	5.17368E-3	9.33647E-2	2.73253E1	-3.26891E1	-3.26095E1	2.67995E1	1.73533E-7	2.50439E-3	2.50439E-3	6.3282E-3	1.9994E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.79988E1	3.57628E-4	-8.80012E1	4.76837E-4	5.45979E-3	9.35555E-2	2.72943E1	-3.26795E1	-3.26188E1	2.67722E1	1.73451E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.01174E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.79989E1	4.05312E-4	-8.80016E1	5.00679E-4	5.65052E-3	9.35555E-2	2.72853E1	-3.26188E1	-3.26543E1	2.68208E1	1.73379E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79986E1	6.4373E-4	-8.80011E1	3.57628E-4	5.19753E-3	9.34601E-2	2.73291E1	-3.26482E1	-3.26158E1	2.67529E1	1.73529E-7	2.50898E-3	2.50898E-3	6.31288E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.79986E1	3.09944E-4	-8.80011E1	5.96046E-4	5.55515E-3	9.35793E-2	2.72715E1	-3.26803E1	-3.2603E1	2.68065E1	1.73529E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.9963E-1
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.79984E1	5.24521E-4	-8.80012E1	5.24521E-4	5.55515E-3	9.31978E-2	2.72985E1	-3.26158E1	-3.26404E1	2.67968E1	1.73235E-7	2.50989E-3	2.50989E-3	6.33436E-3	1.9883E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.79984E1	4.76837E-5	-8.80014E1	1.00136E-3	5.34058E-3	9.3317E-2	2.73015E1	-3.26975E1	-3.2605E1	2.67553E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1
1.4E1	7.28E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.79982E1	3.09944E-4	-8.80016E1	5.48363E-4	5.34058E-3	9.37223E-2	2.73381E1	-3.26741E1	-3.26374E1	2.68004E1	1.73379E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.79984E1	-4.76837E-5	-8.80012E1	6.67572E-4	5.57899E-3	9.33886E-2	2.73027E1	-3.26795E1	-3.25773E1	2.67788E1	1.73303E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
1.6E1	3.0E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79982E1	7.15256E-5	-8.80012E1	4.76837E-4	5.76973E-3	9.32455E-2	2.73228E1	-3.26799E1	-3.26089E1	2.68001E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.97388E-1
1.7E1	3.6515E4	2.0E1	6.87E2	4.7E2	-7.201E-2	-8.79985E1	1.43051E-4	-8.80012E1	6.19888E-4	5.53131E-3	9.34124E-2	2.72939E1	-3.2652E1	-3.26962E1	2.67734E1	1.73528E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.97818E-1
1.8E1	1.58967E5	1.0E2	7.27E2	5.0E2	-7.08504E-2	-8.79986E1	1.66893E-4	-8.80013E1	6.91414E-4	5.67436E-3	9.31263E-2	2.73098E1	-3.26537E1	-3.26248E1	2.6852E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.97815E-1
1.9E1	2.25E3	2.0E0	7.68E2	5.29E2	-7.15461E-2	-8.79986E1	-1.43051E-4	-8.80014E1	7.86781E-4	5.57899E-3	9.3317E-2	2.72839E1	-3.2616E1	-3.26461E1	2.68052E1	1.73383E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.97647E-1
2.0E1	3.11E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.79988E1	-9.53674E-5	-8.80012E1	6.91414E-4	5.76973E-3	9.34839E-2	2.73153E1	-3.26837E1	-3.25954E1	2.68153E1	1.73379E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.98592E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.79989E1	3.33786E-4	-8.8001E1	5.00679E-4	5.57899E-3	9.33647E-2	2.72939E1	-3.26372E1	-3.26301E1	2.68016E1	1.73383E-7	2.50989E-3	2.50989E-3	6.33977E-3	1.9968E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.79989E1	2.14577E-4	-8.80012E1	5.72205E-4	5.74589E-3	9.36508E-2	2.73257E1	-3.26697E1	-3.26419E1	2.67949E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98491E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.79991E1	2.38419E-5	-8.80009E1	1.19209E-4	5.36442E-3	9.32455E-2	2.73081E1	-3.26524E1	-3.26675E1	2.67854E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.00534E-1