[Scan]
initial_time=2016-02-16T04:00:55
final_time=2016-02-16T04:01:14
ip_count=19
run=1030
dataset=9
scan=661
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.7667E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-1.06961E-9
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=4.47845E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-3.30225E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=9.74226E-10
mult1=-1.00896E-8
mult2=-2.81243E-9
rf_tmon=-5.04115E-3
rf_agc=3.33035E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.46308E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.75562E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5337E1
cs_ef1b_imon=3.0692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.17835E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0277E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04445E1
cs_ea2_imon=1.57311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.02343E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.13847E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10931E1
os_restr1_imon=2.88683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=1.88068E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.25315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01311E1
cs_anode1_imon=3.28724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.81798E-10
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.48179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98689E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.29201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=2.02722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55165E-1
os_ea2_imon=-4.65239E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61738E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.87242E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.34919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.27813E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67385E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.0054E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=4.1151E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.41537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33913E1
os_fil1_imon=4.67411E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52725E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00914E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69897E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22299E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77022E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4153E4	1.5E1	1.47E2	4.1E1	-7.24736E-2	-8.79987E1	2.6226E-4	-8.80013E1	4.05312E-4	5.79357E-3	9.36031E-2	2.73045E1	-3.26302E1	-3.26308E1	2.68178E1	1.73457E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.97984E-1
2.0E0	5.508E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.79991E1	2.38419E-4	-8.80014E1	6.67572E-4	5.88894E-3	9.3317E-2	2.73473E1	-3.26695E1	-3.26511E1	2.68244E1	1.73379E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97559E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79992E1	2.38419E-5	-8.8001E1	6.67572E-4	5.76973E-3	9.33647E-2	2.73068E1	-3.2677E1	-3.26289E1	2.67769E1	1.73374E-7	2.5225E-3	2.5225E-3	6.3074E-3	1.97818E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.79991E1	5.24521E-4	-8.80008E1	5.24521E-4	5.74589E-3	9.34124E-2	2.73363E1	-3.26518E1	-3.2599E1	2.67938E1	1.73459E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.79989E1	2.38419E-4	-8.80008E1	6.4373E-4	5.79357E-3	9.36031E-2	2.72979E1	-3.26939E1	-3.2614E1	2.6789E1	1.73454E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.98419E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.7999E1	3.09944E-4	-8.80011E1	6.19888E-4	5.50747E-3	9.36031E-2	2.72727E1	-3.26478E1	-3.26166E1	2.6834E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.79991E1	2.6226E-4	-8.80009E1	9.05991E-4	5.55515E-3	9.36985E-2	2.73442E1	-3.26212E1	-3.2617E1	2.68208E1	1.73529E-7	2.5199E-3	2.5199E-3	6.28006E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.79989E1	1.43051E-4	-8.80008E1	7.15256E-4	5.67436E-3	9.33647E-2	2.73171E1	-3.26446E1	-3.26104E1	2.67827E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98419E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79991E1	1.19209E-4	-8.8001E1	7.39098E-4	5.48363E-3	9.32693E-2	2.72727E1	-3.2685E1	-3.2652E1	2.67884E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.98153E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79993E1	9.53674E-5	-8.80009E1	7.86781E-4	5.38826E-3	9.33647E-2	2.73333E1	-3.26591E1	-3.2638E1	2.67992E1	1.73529E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.98247E-1
1.4E1	6.75E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.79992E1	1.66893E-4	-8.80008E1	5.72205E-4	5.48363E-3	9.32455E-2	2.73099E1	-3.26398E1	-3.26795E1	2.67914E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00847E-1
1.5E1	7.5E1	2.0E0	6.06E2	4.11E2	-7.25507E-2	-8.79993E1	2.38419E-5	-8.80007E1	6.19888E-4	5.43594E-3	9.32693E-2	2.73517E1	-3.27169E1	-3.26006E1	2.68238E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99456E-1
1.6E1	3.062E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.79994E1	4.76837E-5	-8.80011E1	5.00679E-4	5.67436E-3	9.31978E-2	2.72841E1	-3.26861E1	-3.26092E1	2.6798E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00192E-1
1.7E1	3.6624E4	2.8E1	6.87E2	4.7E2	-7.27828E-2	-8.79992E1	1.19209E-4	-8.80011E1	5.72205E-4	5.22137E-3	9.3174E-2	2.73159E1	-3.26747E1	-3.26032E1	2.6804E1	1.73529E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.9911E-1
1.8E1	1.59521E5	1.1E2	7.27E2	5.0E2	-7.21643E-2	-8.7999E1	2.14577E-4	-8.80007E1	4.52995E-4	5.34058E-3	9.31978E-2	2.73137E1	-3.2667E1	-3.26432E1	2.6813E1	1.73379E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
1.9E1	2.233E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.79994E1	4.76837E-5	-8.80009E1	4.52995E-4	5.17368E-3	9.32693E-2	2.73183E1	-3.27023E1	-3.26428E1	2.6822E1	1.73451E-7	2.51581E-3	2.51581E-3	6.34099E-3	2.00108E-1
2.0E1	3.25E2	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.79994E1	3.09944E-4	-8.8001E1	3.8147E-4	5.22137E-3	9.3317E-2	2.73183E1	-3.26759E1	-3.2596E1	2.68412E1	1.73383E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.98491E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.79995E1	2.38419E-4	-8.80008E1	3.33786E-4	5.55515E-3	9.31263E-2	2.73045E1	-3.26484E1	-3.26325E1	2.67842E1	1.73605E-7	2.51693E-3	2.51693E-3	6.27954E-3	1.98872E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.79995E1	0.0E0	-8.80006E1	4.05312E-4	5.45979E-3	9.33647E-2	2.73574E1	-3.26573E1	-3.26392E1	2.68112E1	1.73383E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.99E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.79994E1	-4.76837E-5	-8.80006E1	4.52995E-4	5.48363E-3	9.35555E-2	2.72955E1	-3.26524E1	-3.26356E1	2.67385E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.9963E-1