[Scan]
initial_time=2016-02-16T04:01:21
final_time=2016-02-16T04:01:41
ip_count=19
run=1030
dataset=9
scan=662
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77985E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-1.02925E-9
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=3.73256E-10
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.94008E-9
ql4_vset=
ql4_vmon=8.10623E-4
ql4_imon=8.96215E-10
mult1=-9.45073E-9
mult2=-2.84802E-9
rf_tmon=-5.13377E-3
rf_agc=3.36344E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.32599E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62433E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5322E1
cs_ef1b_imon=3.07568E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.21587E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05248E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.57488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.0191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.21631E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=2.89332E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=1.8913E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.29697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.55095E-10
tplens_vset=1.4E-1
tplens_vmon=1.64084E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26542E1
iondef3_imon=1.51931E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2645E1
iondef2_imon=1.59541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.23276E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30106E0
ionrepsh_imon=2.01412E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.56344E-1
os_ea2_imon=-2.45796E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70783E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.87927E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.29218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73124E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67832E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.99008E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=3.03173E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93663E3
defgrida_imon=6.09682E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.47719E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=4.92639E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46718E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66449E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30692E1
cs_fil1_imon=1.00825E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.18467E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4517E4	8.0E0	1.47E2	4.1E1	-7.21643E-2	-8.79992E1	0.0E0	-8.80012E1	5.72205E-4	5.76973E-3	9.30786E-2	2.72763E1	-3.26314E1	-3.26056E1	2.6792E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98764E-1
2.0E0	5.634E3	5.0E0	3.16E2	1.6E2	-7.14689E-2	-8.79992E1	7.15256E-5	-8.80009E1	5.72205E-4	5.4121E-3	9.31501E-2	2.72433E1	-3.26487E1	-3.26744E1	2.6802E1	1.73457E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.99E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.10051E-2	-8.79995E1	-9.53674E-5	-8.80007E1	6.4373E-4	6.05583E-3	9.30071E-2	2.7298E1	-3.26354E1	-3.26419E1	2.68099E1	1.73526E-7	2.51725E-3	2.51725E-3	6.31879E-3	1.98088E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.79994E1	0.0E0	-8.80009E1	5.00679E-4	5.4121E-3	9.31025E-2	2.72903E1	-3.26738E1	-3.2662E1	2.67914E1	1.73459E-7	2.51393E-3	2.51393E-3	6.33388E-3	1.97731E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.10825E-2	-8.79993E1	2.38419E-5	-8.80011E1	4.05312E-4	5.4121E-3	9.31025E-2	2.73508E1	-3.26771E1	-3.2629E1	2.6777E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97045E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.79995E1	-1.66893E-4	-8.80011E1	3.09944E-4	5.55515E-3	9.29832E-2	2.73107E1	-3.26585E1	-3.26368E1	2.68133E1	1.73478E-7	2.51624E-3	2.51624E-3	6.31429E-3	1.98343E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.79995E1	-2.38419E-5	-8.80009E1	4.05312E-4	5.55515E-3	9.30071E-2	2.72845E1	-3.2649E1	-3.26086E1	2.67604E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.79993E1	0.0E0	-8.80009E1	4.05312E-4	5.6982E-3	9.31263E-2	2.72967E1	-3.2653E1	-3.26326E1	2.68034E1	1.73605E-7	2.51318E-3	2.51318E-3	6.3074E-3	1.98752E-1
1.2E1	3.03E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79996E1	2.14577E-4	-8.80007E1	6.91414E-4	5.53131E-3	9.29832E-2	2.72882E1	-3.2681E1	-3.26225E1	2.67603E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98937E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.79996E1	-2.14577E-4	-8.80009E1	5.24521E-4	5.53131E-3	9.28164E-2	2.72642E1	-3.26711E1	-3.26152E1	2.6813E1	1.73516E-7	2.51049E-3	2.51049E-3	6.33965E-3	1.98539E-1
1.4E1	6.9E2	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.79996E1	-2.86102E-4	-8.80007E1	3.33786E-4	5.98431E-3	9.30786E-2	2.73051E1	-3.26708E1	-3.26378E1	2.67468E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
1.5E1	8.4E1	1.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79996E1	1.43051E-4	-8.80011E1	3.33786E-4	5.53131E-3	9.3317E-2	2.73015E1	-3.26681E1	-3.26392E1	2.68064E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.00705E-1
1.6E1	3.135E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.79992E1	2.6226E-4	-8.8001E1	2.6226E-4	5.72205E-3	9.30786E-2	2.72991E1	-3.26122E1	-3.26488E1	2.67896E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99803E-1
1.7E1	3.6473E4	1.9E1	6.87E2	4.7E2	-7.201E-2	-8.79996E1	5.48363E-4	-8.80006E1	6.91414E-4	5.48363E-3	9.3174E-2	2.73165E1	-3.26645E1	-3.26374E1	2.67926E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99803E-1
1.8E1	1.59926E5	9.3E1	7.27E2	5.0E2	-7.15461E-2	-8.79993E1	4.29153E-4	-8.8001E1	5.24521E-4	5.22137E-3	9.3174E-2	2.73057E1	-3.26777E1	-3.26314E1	2.68797E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
1.9E1	2.251E3	3.0E0	7.68E2	5.29E2	-7.11597E-2	-8.79995E1	3.57628E-4	-8.80007E1	6.19888E-4	5.43594E-3	9.31025E-2	2.73135E1	-3.26284E1	-3.26332E1	2.67968E1	1.73454E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.9911E-1
2.0E1	3.25E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.79997E1	3.57628E-4	-8.80008E1	6.4373E-4	5.14984E-3	9.29356E-2	2.7367E1	-3.2644E1	-3.25791E1	2.67716E1	1.73529E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98592E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.79996E1	4.29153E-4	-8.80009E1	5.48363E-4	5.26905E-3	9.29117E-2	2.72528E1	-3.26597E1	-3.26278E1	2.68833E1	1.73605E-7	2.51203E-3	2.51203E-3	6.28592E-3	1.9985E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.79999E1	4.76837E-4	-8.8001E1	7.39098E-4	5.126E-3	9.32693E-2	2.73219E1	-3.26642E1	-3.26179E1	2.67665E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00325E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.79998E1	3.09944E-4	-8.8001E1	8.10623E-4	5.50747E-3	9.34124E-2	2.73124E1	-3.2645E1	-3.26542E1	2.67832E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9917E-1