[Scan]
initial_time=2016-02-16T04:02:15
final_time=2016-02-16T04:02:34
ip_count=19
run=1030
dataset=9
scan=664
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.76749E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-9.15122E-10
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=4.26722E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.76927E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=8.64708E-10
mult1=-1.11973E-8
mult2=-2.7266E-9
rf_tmon=-4.4223E-3
rf_agc=3.40726E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.28295E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53192E1
cs_ef1b_imon=3.0416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=2.18083E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04363E0
lens1_imon=1.38941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64904E1
os_ef1alow_imon=2.99851E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0428E1
cs_ea2_imon=1.57453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84081E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.11177E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11772E1
os_restr1_imon=2.89529E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63259E1
os_ef1bup_imon=3.06975E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=1.2804E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=3.31371E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.54964E-10
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25924E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.17197E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29811E0
ionrepsh_imon=2.02722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33416E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7994E-1
os_ea2_imon=-4.12148E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58338E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.1035E-1
os_ef2bup_imon=-5.13932E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=2.86853E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.33043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02203E1
cs_anode2_imon=2.31214E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.07252E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.95191E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.80945E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56596E1
einzel_imon=7.94501E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-1.06285E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39449E-4
mask2_vset=0.0E0
mask2_vmon=-1.86095E1
mask2_imon=-8.36956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.16573E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.92505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.04185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58568E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33896E1
os_fil1_imon=5.06904E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.26628E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66644E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=1.01117E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63026E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66492E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22352E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.0285E-1
res40_imon=-2.30351E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4143E4	9.0E0	1.47E2	4.1E1	-7.17007E-2	-8.79996E1	1.90735E-4	-8.80007E1	8.10623E-4	5.81741E-3	9.31263E-2	2.72696E1	-3.26573E1	-3.26272E1	2.67908E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.98661E-1
2.0E0	5.382E3	3.0E0	3.16E2	1.6E2	-7.14689E-2	-8.79998E1	2.38419E-4	-8.80008E1	6.91414E-4	5.6982E-3	9.33647E-2	2.73324E1	-3.26761E1	-3.2618E1	2.6781E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.99E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.79996E1	0.0E0	-8.80008E1	3.33786E-4	5.17368E-3	9.34124E-2	2.73057E1	-3.26609E1	-3.2616E1	2.67708E1	1.73314E-7	2.51287E-3	2.51287E-3	6.3074E-3	1.98727E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.79995E1	-1.19209E-4	-8.80006E1	4.76837E-4	5.76973E-3	9.2864E-2	2.72907E1	-3.26512E1	-3.26374E1	2.68118E1	1.7337E-7	2.51498E-3	2.51498E-3	6.3074E-3	1.97553E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.79998E1	4.76837E-5	-8.80007E1	5.96046E-4	6.03199E-3	9.31501E-2	2.72913E1	-3.26182E1	-3.26482E1	2.67986E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.79996E1	4.76837E-5	-8.80008E1	3.33786E-4	5.60284E-3	9.31263E-2	2.72678E1	-3.26693E1	-3.26008E1	2.68154E1	1.73454E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.79999E1	1.90735E-4	-8.80007E1	3.8147E-4	5.65052E-3	9.32932E-2	2.72865E1	-3.26543E1	-3.26296E1	2.6774E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33211E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.79997E1	9.53674E-5	-8.80008E1	4.29153E-4	5.65052E-3	9.34124E-2	2.72775E1	-3.26603E1	-3.26116E1	2.68208E1					
1.2E1	3.49E2	2.0E0	4.85E2	3.23E2	-7.22418E-2	-8.79995E1	2.14577E-4	-8.80006E1	2.86102E-4	5.26905E-3	9.30071E-2	2.73045E1	-3.26494E1	-3.26188E1	2.67914E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00151E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.79995E1	2.38419E-5	-8.80008E1	5.00679E-4	5.19753E-3	9.31025E-2	2.73177E1	-3.26873E1	-3.26134E1	2.68268E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99456E-1
1.4E1	6.45E2	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.79999E1	2.38419E-5	-8.80007E1	2.38419E-4	5.48363E-3	9.31978E-2	2.7355E1	-3.2629E1	-3.26086E1	2.67932E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.9911E-1
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.79999E1	7.15256E-5	-8.80008E1	5.24521E-4	5.38826E-3	9.31263E-2	2.72835E1	-3.26993E1	-3.26476E1	2.67949E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
1.6E1	3.019E3	5.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8E1	2.6226E-4	-8.8001E1	6.67572E-4	5.84126E-3	9.32217E-2	2.73257E1	-3.26331E1	-3.26526E1	2.67908E1	1.73605E-7	2.50882E-3	2.50882E-3	6.33436E-3	1.98322E-1
1.7E1	3.6688E4	1.6E1	6.87E2	4.7E2	-7.20871E-2	-8.79999E1	1.90735E-4	-8.80012E1	5.00679E-4	5.4121E-3	9.3174E-2	2.73135E1	-3.26843E1	-3.26062E1	2.67601E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98419E-1
1.8E1	1.60464E5	8.4E1	7.27E2	5.0E2	-7.16233E-2	-8.79996E1	4.52995E-4	-8.8001E1	5.48363E-4	5.36442E-3	9.31978E-2	2.73105E1	-3.26723E1	-3.26188E1	2.68112E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98247E-1
1.9E1	2.162E3	2.0E0	7.68E2	5.29E2	-7.20871E-2	-8.79997E1	2.6226E-4	-8.80008E1	5.96046E-4	5.65052E-3	9.32217E-2	2.73327E1	-3.26561E1	-3.2617E1	2.67704E1	1.73303E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98592E-1
2.0E1	3.03E2	3.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79998E1	4.29153E-4	-8.80007E1	5.24521E-4	5.29289E-3	9.30786E-2	2.72839E1	-3.26042E1	-3.26738E1	2.68202E1	1.73383E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9934E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.79998E1	2.6226E-4	-8.80007E1	6.19888E-4	5.65052E-3	9.3317E-2	2.73128E1	-3.26856E1	-3.26178E1	2.68267E1	1.73529E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.98937E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79997E1	-1.66893E-4	-8.80003E1	5.00679E-4	5.17368E-3	9.34362E-2	2.73123E1	-3.26464E1	-3.26254E1	2.67493E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9934E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.79998E1	3.09944E-4	-8.80008E1	5.48363E-4	5.62668E-3	9.3174E-2	2.72991E1	-3.26705E1	-3.25924E1	2.68244E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1