[Scan]
initial_time=2016-02-16T04:02:41
final_time=2016-02-16T04:03:01
ip_count=19
run=1030
dataset=9
scan=665
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.80172E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-8.86798E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=4.07231E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.68614E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=8.59427E-10
mult1=-1.03665E-8
mult2=-2.7745E-9
rf_tmon=-3.82748E-3
rf_agc=3.37181E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.46546E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.82995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20279E1
lens5a_imon=2.00881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.08921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.17693E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03596E0
lens1_imon=1.67964E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.9992E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0326E1
cs_ea2_imon=1.57877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84713E1
cs_ef1a_imon=3.01936E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.03714E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10996E1
os_restr1_imon=2.87166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=1.88741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6338E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.27049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0152E1
cs_anode1_imon=3.27965E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.16901E-10
tplens_vset=1.4E-1
tplens_vmon=1.58716E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98597E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.1784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=2.01872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.341E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30389E-1
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00863E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64188E0
os_ef2alow_imon=-2.30699E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51473E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10591E1
os_restr2_imon=2.86054E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.31698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01618E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.07669E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.98375E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.0371E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09828E0
cs_ionaccel_imon=-1.93861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.7921E-6
window_vset=0.0E0
window_vmon=2.08998E-1
window_imon=-7.57025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-3.99074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67427E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33907E1
os_fil1_imon=4.80261E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91296E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30719E1
cs_fil1_imon=1.00913E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62262E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.30428E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02037E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62303E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.41433E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22282E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7331E-1
res40_imon=-2.45295E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.432E4	1.2E1	1.47E2	4.1E1	-7.30918E-2	-8.79996E1	3.09944E-4	-8.80003E1	3.57628E-4	5.79357E-3	9.34839E-2	2.7298E1	-3.27074E1	-3.26337E1	2.68106E1	1.73457E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98661E-1
2.0E0	5.516E3	6.0E0	3.16E2	1.6E2	-7.21643E-2	-8.79993E1	9.53674E-5	-8.80007E1	5.24521E-4	5.48363E-3	9.3174E-2	2.73007E1	-3.26828E1	-3.2583E1	2.67848E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.79999E1	2.14577E-4	-8.80007E1	5.96046E-4	5.38826E-3	9.34839E-2	2.72958E1	-3.26457E1	-3.26625E1	2.67908E1	1.73451E-7	2.52362E-3	2.52362E-3	6.3074E-3	1.97994E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.79999E1	-9.53674E-5	-8.80006E1	5.24521E-4	5.6982E-3	9.3317E-2	2.72992E1	-3.26478E1	-3.25658E1	2.68018E1	1.73383E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.79998E1	2.38419E-5	-8.80006E1	5.72205E-4	5.4121E-3	9.34124E-2	2.73008E1	-3.26572E1	-3.26346E1	2.67854E1	1.73605E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.79998E1	0.0E0	-8.80007E1	2.6226E-4	5.14984E-3	9.33886E-2	2.72886E1	-3.26897E1	-3.26195E1	2.68262E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79996E1	-1.90735E-4	-8.80008E1	1.43051E-4	5.4121E-3	9.34362E-2	2.72805E1	-3.27005E1	-3.25966E1	2.67944E1	1.73531E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.98153E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.79997E1	7.15256E-5	-8.80008E1	5.00679E-4	5.60284E-3	9.3627E-2	2.72913E1	-3.26506E1	-3.26182E1	2.67848E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.97559E-1
1.2E1	3.19E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.79997E1	1.19209E-4	-8.80006E1	3.33786E-4	5.57899E-3	9.33409E-2	2.72787E1	-3.26615E1	-3.2647E1	2.6816E1	1.73528E-7	2.51136E-3	2.51136E-3	6.31299E-3	1.97643E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.79997E1	2.6226E-4	-8.80009E1	4.29153E-4	5.55515E-3	9.31501E-2	2.72817E1	-3.27083E1	-3.26122E1	2.67914E1	1.73383E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.96805E-1
1.4E1	6.62E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.79999E1	5.72205E-4	-8.80008E1	2.6226E-4	5.81741E-3	9.32217E-2	2.73117E1	-3.26554E1	-3.26074E1	2.67908E1	1.73379E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.97216E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.79996E1	3.57628E-4	-8.80008E1	3.33786E-4	5.96046E-3	9.32932E-2	2.72702E1	-3.25984E1	-3.26272E1	2.6819E1	1.73528E-7	2.51622E-3	2.51622E-3	6.3157E-3	1.98556E-1
1.6E1	3.132E3	3.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79998E1	3.33786E-4	-8.80011E1	5.00679E-4	5.38826E-3	9.31501E-2	2.72586E1	-3.26701E1	-3.26217E1	2.6792E1					
1.7E1	3.6845E4	2.0E1	6.87E2	4.7E2	-7.23964E-2	-8.8E1	4.52995E-4	-8.80009E1	7.39098E-4	5.4121E-3	9.34124E-2	2.73273E1	-3.26627E1	-3.26579E1	2.67957E1	1.73605E-7	2.51007E-3	2.51007E-3	6.34037E-3	1.98592E-1
1.8E1	1.5965E5	8.9E1	7.27E2	5.0E2	-7.26282E-2	-8.80001E1	2.86102E-4	-8.80011E1	3.09944E-4	5.79357E-3	9.31501E-2	2.72811E1	-3.26536E1	-3.25894E1	2.6801E1	1.73379E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98419E-1
1.9E1	2.118E3	2.0E0	7.68E2	5.29E2	-7.201E-2	-8.8E1	-1.66893E-4	-8.80007E1	5.72205E-4	5.48363E-3	9.31263E-2	2.72757E1	-3.26428E1	-3.26032E1	2.68022E1	1.73451E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.00463E-1
2.0E1	3.13E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80001E1	-3.33786E-4	-8.80006E1	6.4373E-4	5.126E-3	9.31263E-2	2.73016E1	-3.26502E1	-3.26992E1	2.68215E1	1.73228E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80001E1	-3.8147E-4	-8.80011E1	4.52995E-4	5.62668E-3	9.29832E-2	2.73303E1	-3.26422E1	-3.2641E1	2.67734E1	1.73383E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00363E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80002E1	9.53674E-5	-8.8001E1	5.48363E-4	5.36442E-3	9.31501E-2	2.73116E1	-3.26437E1	-3.25936E1	2.68028E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80003E1	-4.76837E-5	-8.80007E1	4.76837E-4	5.65052E-3	9.3317E-2	2.73309E1	-3.26621E1	-3.26524E1	2.68124E1	1.73383E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98153E-1