[Scan]
initial_time=2016-02-16T04:03:08
final_time=2016-02-16T04:03:27
ip_count=19
run=1030
dataset=9
scan=666
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.7754E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-8.39198E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=4.19223E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.54116E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=8.78406E-10
mult1=-9.72062E-9
mult2=-2.64871E-9
rf_tmon=-4.67465E-3
rf_agc=3.34141E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=4.20558E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=3.07913E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04516E1
cs_ea1_imon=2.18437E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04599E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64967E1
os_ef1alow_imon=2.9853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.58798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83977E1
cs_ef1a_imon=3.02492E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.98839E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.86297E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6345E1
os_ef1bup_imon=3.09894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20904E0
cs_ionrep_imon=1.28713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=3.28591E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=7.36439E-10
tplens_vset=1.4E-1
tplens_vmon=1.64792E0
tplens_imon=-5.46679E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2604E1
iondef3_imon=1.51613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26578E1
iondef2_imon=1.60532E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.1616E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=2.00032E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33304E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.14551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74041E-1
os_ea2_imon=-2.49335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00874E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71495E1
cs_ef2a_imon=3.19243E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64941E0
os_ef2alow_imon=-2.30351E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13825E-1
os_ef2bup_imon=-5.13237E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10654E1
os_restr2_imon=2.85741E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23125E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02076E1
cs_anode2_imon=2.29859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.1229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.11492E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.98855E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.60608E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-2.05677E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=1.91621E-1
window_imon=-8.36956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39206E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.37644E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.503E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33895E1
os_fil1_imon=4.74469E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8087E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66523E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30762E1
cs_fil1_imon=1.00824E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66426E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.17107E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59393E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.04364E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47246E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4291E4	1.5E1	1.47E2	4.1E1	-7.17779E-2	-8.79997E1	-7.15256E-5	-8.80007E1	6.67572E-4	5.60284E-3	9.32932E-2	2.72791E1	-3.26773E1	-3.2616E1	2.68088E1	1.73531E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9968E-1
2.0E0	5.382E3	7.0E0	3.16E2	1.6E2	-7.20871E-2	-8.79998E1	-2.14577E-4	-8.80006E1	6.67572E-4	5.65052E-3	9.33886E-2	2.73033E1	-3.2637E1	-3.26536E1	2.67872E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9968E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.79997E1	9.53674E-5	-8.80005E1	7.15256E-4	5.48363E-3	9.3627E-2	2.73216E1	-3.26545E1	-3.2655E1	2.67775E1	1.73528E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99048E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.8E1	2.38419E-4	-8.80006E1	5.72205E-4	5.45979E-3	9.36985E-2	2.73033E1	-3.26807E1	-3.262E1	2.68136E1	1.73462E-7	2.51369E-3	2.51369E-3	6.29185E-3	1.99119E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80001E1	5.00679E-4	-8.80003E1	5.24521E-4	5.43594E-3	9.32932E-2	2.72632E1	-3.26366E1	-3.26337E1	2.68412E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98592E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80004E1	2.86102E-4	-8.80005E1	6.4373E-4	5.29289E-3	9.31025E-2	2.73189E1	-3.26699E1	-3.26026E1	2.67926E1	1.73457E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.98491E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80005E1	1.90735E-4	-8.80006E1	6.19888E-4	5.53131E-3	9.34124E-2	2.73015E1	-3.26464E1	-3.26098E1	2.67589E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80003E1	-2.14577E-4	-8.80003E1	8.10623E-4	5.38826E-3	9.32693E-2	2.73063E1	-3.26278E1	-3.26008E1	2.67914E1	1.73454E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98419E-1
1.2E1	3.75E2	1.0E0	4.85E2	3.23E2	-7.24736E-2	-8.8E1	-1.43051E-4	-8.80006E1	3.8147E-4	5.48363E-3	9.3317E-2	2.72992E1	-3.26856E1	-3.2639E1	2.67854E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99977E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80001E1	3.57628E-4	-8.80004E1	5.72205E-4	5.24521E-3	9.32932E-2	2.728E1	-3.26652E1	-3.2678E1	2.67932E1	1.73529E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99977E-1
1.4E1	6.61E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8E1	2.14577E-4	-8.80003E1	5.48363E-4	5.43594E-3	9.34601E-2	2.73015E1	-3.26152E1	-3.265E1	2.67499E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.00325E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80003E1	0.0E0	-8.80007E1	5.24521E-4	5.50747E-3	9.34124E-2	2.73321E1	-3.2653E1	-3.25785E1	2.681E1	1.73451E-7	2.51915E-3	2.51915E-3	6.33538E-3	1.99931E-1
1.6E1	3.184E3	2.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80002E1	2.14577E-4	-8.80004E1	3.33786E-4	5.38826E-3	9.35555E-2	2.73358E1	-3.26608E1	-3.26219E1	2.6792E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
1.7E1	3.678E4	2.0E1	6.87E2	4.7E2	-7.30146E-2	-8.80004E1	5.00679E-4	-8.80007E1	4.29153E-4	5.53131E-3	9.35555E-2	2.72985E1	-3.26747E1	-3.26014E1	2.67992E1	1.73457E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.00363E-1
1.8E1	1.61863E5	1.01E2	7.27E2	5.0E2	-7.27828E-2	-8.80001E1	0.0E0	-8.80006E1	3.33786E-4	5.43594E-3	9.34839E-2	2.73159E1	-3.26729E1	-3.2626E1	2.67764E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00499E-1
1.9E1	2.296E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80002E1	1.43051E-4	-8.80008E1	8.10623E-4	5.43594E-3	9.34362E-2	2.73111E1	-3.26398E1	-3.26308E1	2.67866E1	1.73309E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9985E-1
2.0E1	3.12E2	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80001E1	1.43051E-4	-8.80005E1	6.4373E-4	5.67436E-3	9.30786E-2	2.72805E1	-3.26621E1	-3.26615E1	2.67842E1	1.73454E-7	2.53087E-3	2.53087E-3	6.31288E-3	1.99456E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80003E1	4.76837E-5	-8.80007E1	4.76837E-4	5.38826E-3	9.37462E-2	2.73003E1	-3.26657E1	-3.25984E1	2.67902E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.01022E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80005E1	1.66893E-4	-8.80008E1	3.09944E-4	5.6982E-3	9.33886E-2	2.7312E1	-3.26527E1	-3.26109E1	2.68082E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.00499E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80004E1	9.53674E-5	-8.80007E1	7.15256E-4	6.03199E-3	9.30786E-2	2.7321E1	-3.26578E1	-3.2604E1	2.67878E1	1.73457E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00021E-1