[Scan]
initial_time=2016-02-16T04:04:28
final_time=2016-02-16T04:04:47
ip_count=19
run=1030
dataset=9
scan=669
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77315E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.21025E-10
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=4.0853E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.36151E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=8.18586E-10
mult1=-1.28804E-8
mult2=-2.87612E-9
rf_tmon=-5.02269E-3
rf_agc=3.28136E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.05121E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.79102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.09262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=2.17764E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99998E0
lens1_imon=1.40711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.60142E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83986E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.72696E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=2.87927E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=1.87502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63347E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.28359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93278E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.28219E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.60174E-10
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-1.11298E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.47684E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26968E1
iondef2_imon=1.60461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.13823E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=2.03111E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.341E1
lens5b_imon=2.16561E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64013E-1
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61257E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.03776E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.87782E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.27921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67794E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.99043E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.62933E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=5.86676E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.41583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68943E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66579E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30727E1
cs_fil1_imon=1.00812E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66347E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.2083E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22286E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40046E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49992E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4417E4	1.0E1	1.47E2	4.1E1	-7.201E-2	-8.80003E1	1.43051E-4	-8.80005E1	5.24521E-4	5.65052E-3	9.32455E-2	2.72949E1	-3.26795E1	-3.26092E1	2.68214E1					
2.0E0	5.423E3	4.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80002E1	3.09944E-4	-8.80007E1	7.62939E-4	5.81741E-3	9.3174E-2	2.73051E1	-3.26885E1	-3.2605E1	2.68004E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80001E1	2.14577E-4	-8.80005E1	7.39098E-4	5.6982E-3	9.34362E-2	2.72744E1	-3.26561E1	-3.25717E1	2.68196E1	1.73303E-7	2.50789E-3	2.50789E-3	6.34037E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80003E1	6.4373E-4	-8.80008E1	6.19888E-4	6.03199E-3	9.31025E-2	2.7321E1	-3.26844E1	-3.26225E1	2.68088E1	1.73457E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80003E1	5.48363E-4	-8.80009E1	7.15256E-4	5.88894E-3	9.32455E-2	2.72973E1	-3.26488E1	-3.2635E1	2.67956E1	1.73529E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.98075E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.79999E1	1.90735E-4	-8.80006E1	4.29153E-4	5.57899E-3	9.31978E-2	2.72672E1	-3.265E1	-3.26044E1	2.6783E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.97815E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80002E1	2.14577E-4	-8.80007E1	6.91414E-4	5.6982E-3	9.29117E-2	2.72979E1	-3.26452E1	-3.26314E1	2.67866E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.8E1	4.29153E-4	-8.80005E1	4.05312E-4	5.74589E-3	9.30309E-2	2.73284E1	-3.26471E1	-3.26015E1	2.68116E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.97903E-1
1.2E1	3.24E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80003E1	-7.15256E-5	-8.80004E1	4.29153E-4	5.74589E-3	9.29594E-2	2.72907E1	-3.26697E1	-3.26048E1	2.67952E1	1.73605E-7	2.51575E-3	2.51575E-3	6.29185E-3	1.97812E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80001E1	2.38419E-5	-8.80004E1	5.48363E-4	5.84126E-3	9.30786E-2	2.72925E1	-3.26482E1	-3.26164E1	2.67902E1	1.73525E-7	2.51758E-3	2.51758E-3	6.32483E-3	1.98004E-1
1.4E1	6.69E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80001E1	3.09944E-4	-8.80004E1	1.12057E-3	5.65052E-3	9.29594E-2	2.73159E1	-3.2653E1	-3.26236E1	2.67885E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.98322E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80002E1	-1.43051E-4	-8.80006E1	9.05991E-4	5.57899E-3	9.31501E-2	2.72967E1	-3.25966E1	-3.26056E1	2.67926E1	1.73379E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.96874E-1
1.6E1	3.082E3	3.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80003E1	1.66893E-4	-8.80005E1	7.39098E-4	5.43594E-3	9.32455E-2	2.73087E1	-3.26524E1	-3.26362E1	2.68176E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98075E-1
1.7E1	3.6993E4	1.0E1	6.87E2	4.7E2	-7.41738E-2	-8.80002E1	3.09944E-4	-8.80004E1	3.57628E-4	5.22137E-3	9.31025E-2	2.73004E1	-3.2672E1	-3.26054E1	2.67984E1	1.73374E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99048E-1
1.8E1	1.61544E5	6.9E1	7.27E2	5.0E2	-7.38649E-2	-8.80004E1	1.43051E-4	-8.80007E1	4.76837E-4	5.126E-3	9.30071E-2	2.73021E1	-3.27155E1	-3.2599E1	2.67782E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.99E-1
1.9E1	2.152E3	1.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80005E1	-1.19209E-4	-8.80005E1	5.72205E-4	5.84126E-3	9.30786E-2	2.73216E1	-3.2626E1	-3.26573E1	2.68142E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98491E-1
2.0E1	3.26E2	1.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	1.43051E-4	-8.80008E1	4.29153E-4	5.72205E-3	9.29117E-2	2.72787E1	-3.26861E1	-3.26344E1	2.67468E1	1.73529E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00499E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80007E1	9.53674E-5	-8.80007E1	4.52995E-4	5.62668E-3	9.31025E-2	2.73405E1	-3.2626E1	-3.26301E1	2.67595E1	1.73457E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00534E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80005E1	4.76837E-5	-8.80008E1	3.57628E-4	5.53131E-3	9.30786E-2	2.7349E1	-3.26188E1	-3.26549E1	2.68022E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00325E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80004E1	2.38419E-4	-8.80008E1	3.57628E-4	5.126E-3	9.3317E-2	2.72915E1	-3.26968E1	-3.2603E1	2.67794E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9883E-1