[Scan]
initial_time=2016-02-16T04:06:14
final_time=2016-02-16T04:06:34
ip_count=19
run=1030
dataset=9
scan=673
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.77362E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-7.54905E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=3.94869E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.19595E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=8.22568E-10
mult1=-1.12214E-8
mult2=-2.83838E-9
rf_tmon=-5.09523E-3
rf_agc=3.37301E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.10008E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.83349E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.08541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.17906E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04304E0
lens1_imon=1.72919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.55966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.06241E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.89404E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=1.88599E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.28182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93682E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=3.30309E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.38335E-10
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=2.3199E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.59505E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.9871E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.05657E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=2.02615E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34518E-1
os_ea2_imon=-3.87372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70921E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67684E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=2.88575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.33645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.30191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72877E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.94631E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.55101E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-2.15099E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.48073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.53217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=4.99847E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66559E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30703E1
cs_fil1_imon=1.0085E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62954E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66348E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22335E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9731E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.85721E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4458E4	1.3E1	1.47E2	4.1E1	-7.23964E-2	-8.80008E1	-9.53674E-5	-8.80005E1	6.4373E-4	5.57899E-3	9.29832E-2	2.72997E1	-3.26386E1	-3.2635E1	2.67887E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98661E-1
2.0E0	5.446E3	5.0E0	3.16E2	1.6E2	-7.21643E-2	-8.8001E1	1.19209E-4	-8.80005E1	4.52995E-4	5.29289E-3	9.32217E-2	2.72973E1	-3.26663E1	-3.26134E1	2.67911E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98937E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80009E1	-1.90735E-4	-8.80008E1	4.76837E-4	5.38826E-3	9.34362E-2	2.73151E1	-3.2685E1	-3.26213E1	2.6781E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80009E1	0.0E0	-8.80009E1	7.39098E-4	5.62668E-3	9.31501E-2	2.73195E1	-3.27083E1	-3.26248E1	2.68016E1	1.73457E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9934E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80006E1	-3.33786E-4	-8.80008E1	7.15256E-4	5.00679E-3	9.31978E-2	2.73303E1	-3.26374E1	-3.26374E1	2.68022E1	1.73529E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80007E1	-2.38419E-5	-8.80006E1	3.8147E-4	5.34058E-3	9.30071E-2	2.72782E1	-3.26854E1	-3.26083E1	2.67998E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80007E1	3.8147E-4	-8.80007E1	6.4373E-4	5.31673E-3	9.33647E-2	2.73004E1	-3.26897E1	-3.25965E1	2.6798E1	1.73528E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.99401E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80004E1	2.38419E-4	-8.80007E1	5.00679E-4	5.00679E-3	9.32455E-2	2.73137E1	-3.26383E1	-3.26034E1	2.68022E1	1.73457E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9934E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80005E1	1.66893E-4	-8.80008E1	6.67572E-4	5.34058E-3	9.33647E-2	2.73147E1	-3.26476E1	-3.2608E1	2.67932E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.97643E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80006E1	1.43051E-4	-8.80006E1	5.48363E-4	5.22137E-3	9.34124E-2	2.73411E1	-3.26645E1	-3.26074E1	2.67583E1	1.73531E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.97647E-1
1.4E1	6.93E2	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80007E1	-7.15256E-5	-8.80007E1	4.05312E-4	5.38826E-3	9.34839E-2	2.73393E1	-3.27011E1	-3.2605E1	2.6822E1	1.73451E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.97994E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.8001E1	3.57628E-4	-8.80008E1	4.05312E-4	5.36442E-3	9.32455E-2	2.73175E1	-3.26673E1	-3.26496E1	2.67717E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.97216E-1
1.6E1	2.873E3	2.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80008E1	1.43051E-4	-8.80006E1	4.52995E-4	5.43594E-3	9.29117E-2	2.73021E1	-3.26494E1	-3.25936E1	2.67547E1	1.73457E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9951E-1
1.7E1	3.6217E4	1.6E1	6.87E2	4.7E2	-7.16233E-2	-8.80008E1	5.24521E-4	-8.80004E1	4.29153E-4	5.43594E-3	9.29594E-2	2.73051E1	-3.26567E1	-3.26543E1	2.681E1	1.73454E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99456E-1
1.8E1	1.59167E5	9.1E1	7.27E2	5.0E2	-7.17007E-2	-8.80006E1	3.8147E-4	-8.8001E1	6.91414E-4	5.93662E-3	9.30309E-2	2.73135E1	-3.26573E1	-3.26254E1	2.67962E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98419E-1
1.9E1	2.259E3	2.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80006E1	1.90735E-4	-8.80008E1	7.86781E-4	5.76973E-3	9.29832E-2	2.72781E1	-3.26945E1	-3.26122E1	2.67848E1	1.73529E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.97559E-1
2.0E1	3.16E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80008E1	-3.09944E-4	-8.80006E1	5.48363E-4	5.36442E-3	9.32455E-2	2.72968E1	-3.26579E1	-3.26567E1	2.67856E1	1.73529E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98419E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.8001E1	3.8147E-4	-8.80009E1	4.29153E-4	5.45979E-3	9.32932E-2	2.73387E1	-3.26729E1	-3.26248E1	2.67722E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.97478E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80008E1	-9.53674E-5	-8.80004E1	1.66893E-4	6.03199E-3	9.31263E-2	2.73275E1	-3.2675E1	-3.26372E1	2.67974E1	1.73303E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98075E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80009E1	2.14577E-4	-8.80007E1	4.76837E-4	5.65052E-3	9.33409E-2	2.72877E1	-3.26524E1	-3.26146E1	2.6798E1	1.73383E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9731E-1