[Scan]
initial_time=2016-02-16T04:07:08
final_time=2016-02-16T04:07:27
ip_count=19
run=1030
dataset=9
scan=675
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.77809E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.5558E-10
ql2_vset=
ql2_vmon=2.6226E-4
ql2_imon=3.97527E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.10084E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.90775E-10
mult1=-1.04989E-8
mult2=-2.93818E-9
rf_tmon=-5.45572E-3
rf_agc=3.24383E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.00317E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.7627E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20367E1
lens5a_imon=1.96882E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05397E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53214E1
cs_ef1b_imon=3.0728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=2.21303E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.48497E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=3.00252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04056E1
cs_ea2_imon=1.57063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83583E1
cs_ef1a_imon=3.00901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.89624E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=2.88792E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=1.90227E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.24607E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=3.30453E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=7.44343E-10
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-5.89119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25809E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.19211E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.01058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74315E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87609E-1
os_ea2_imon=-3.76754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.20398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59876E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64988E-1
os_ef2bup_imon=-5.13507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.33008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.27236E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72745E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67625E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.97388E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.94237E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=8.12392E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.28243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=6.93212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=7.02415E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.05954E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25496E0
defgridb_imon=6.59942E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=5.58711E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99576E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66322E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.0088E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61837E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01608E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66859E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=1.99227E-1
chamber_ion_pmon=1.73532E-7
chamber_cvt_pmon=2.50867E-3
foreline_cvt_pmon=2.50867E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90236E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4503E4	1.6E1	1.47E2	4.1E1	-7.286E-2	-8.80007E1	4.76837E-5	-8.80009E1	5.96046E-4	5.88894E-3	9.32693E-2	2.72642E1	-3.26939E1	-3.26194E1	2.67887E1	1.73531E-7	2.5131E-3	2.5131E-3	6.28592E-3	1.9917E-1
2.0E0	5.435E3	4.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80005E1	0.0E0	-8.80005E1	5.00679E-4	5.91278E-3	9.3174E-2	2.7242E1	-3.26314E1	-3.26771E1	2.68308E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80008E1	2.6226E-4	-8.80007E1	4.76837E-4	5.48363E-3	9.3174E-2	2.73358E1	-3.27083E1	-3.25808E1	2.67509E1	1.73454E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.9911E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80007E1	9.53674E-5	-8.80007E1	5.00679E-4	5.84126E-3	9.3317E-2	2.72935E1	-3.26603E1	-3.25887E1	2.67493E1	1.73605E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80006E1	9.53674E-5	-8.80007E1	6.19888E-4	5.88894E-3	9.31263E-2	2.72904E1	-3.26897E1	-3.2604E1	2.67963E1	1.73605E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.99577E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80009E1	-2.14577E-4	-8.80005E1	6.91414E-4	5.93662E-3	9.29356E-2	2.73092E1	-3.2672E1	-3.26307E1	2.67966E1	1.73451E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99048E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80009E1	-1.90735E-4	-8.80006E1	6.19888E-4	5.79357E-3	9.31025E-2	2.73003E1	-3.2653E1	-3.26068E1	2.6786E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80006E1	-2.6226E-4	-8.80007E1	8.58307E-4	6.1512E-3	9.31025E-2	2.72815E1	-3.26579E1	-3.26431E1	2.684E1	1.73529E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99456E-1
1.2E1	3.33E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80008E1	-7.15256E-5	-8.80006E1	4.76837E-4	5.96046E-3	9.30786E-2	2.73201E1	-3.2611E1	-3.26374E1	2.68328E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9917E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80007E1	-3.33786E-4	-8.80004E1	4.05312E-4	5.48363E-3	9.30309E-2	2.72384E1	-3.26681E1	-3.26284E1	2.68094E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.9911E-1
1.4E1	7.13E2	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80007E1	9.53674E-5	-8.80006E1	6.67572E-4	5.55515E-3	9.30786E-2	2.7361E1	-3.26675E1	-3.25755E1	2.6804E1	1.73529E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98592E-1
1.5E1	6.4E1	1.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80006E1	-2.14577E-4	-8.80004E1	5.72205E-4	5.38826E-3	9.28164E-2	2.73027E1	-3.26314E1	-3.26915E1	2.6792E1	1.73605E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00151E-1
1.6E1	3.048E3	3.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80007E1	-1.43051E-4	-8.80001E1	6.4373E-4	5.96046E-3	9.30309E-2	2.73405E1	-3.26956E1	-3.25942E1	2.67688E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99456E-1
1.7E1	3.6766E4	1.2E1	6.87E2	4.7E2	-7.30146E-2	-8.80009E1	-2.38419E-4	-8.80006E1	3.33786E-4	5.8651E-3	9.31025E-2	2.73778E1	-3.26927E1	-3.2605E1	2.6828E1	1.73531E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
1.8E1	1.60707E5	9.4E1	7.27E2	5.0E2	-7.33239E-2	-8.80006E1	-1.43051E-4	-8.80006E1	5.00679E-4	5.6982E-3	9.30309E-2	2.73057E1	-3.2688E1	-3.2593E1	2.68268E1	1.73605E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.98937E-1
1.9E1	2.226E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80007E1	-1.66893E-4	-8.80006E1	7.15256E-5	5.53131E-3	9.30309E-2	2.73273E1	-3.26993E1	-3.26573E1	2.6846E1	1.73531E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.9883E-1
2.0E1	3.03E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8001E1	-3.8147E-4	-8.80008E1	4.29153E-4	5.91278E-3	9.31263E-2	2.73454E1	-3.2647E1	-3.26092E1	2.67535E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80008E1	-1.66893E-4	-8.80006E1	6.19888E-4	5.6982E-3	9.3174E-2	2.73021E1	-3.26729E1	-3.26278E1	2.67908E1	1.73303E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00325E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80009E1	0.0E0	-8.80007E1	7.39098E-4	5.57899E-3	9.3317E-2	2.73016E1	-3.26451E1	-3.26347E1	2.67752E1	1.73529E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.9911E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80011E1	2.6226E-4	-8.80007E1	5.48363E-4	5.57899E-3	9.32455E-2	2.72745E1	-3.25809E1	-3.26693E1	2.67625E1	1.73532E-7	2.50867E-3	2.50867E-3	6.30212E-3	1.99227E-1