[Scan]
initial_time=2016-02-16T04:07:34
final_time=2016-02-16T04:07:54
ip_count=19
run=1030
dataset=9
scan=676
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.80509E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-7.62403E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=3.92282E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.07775E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.05867E-10
mult1=-1.03978E-8
mult2=-2.9114E-9
rf_tmon=-3.12911E-3
rf_agc=3.36984E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=4.00841E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63141E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20243E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05397E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53389E1
cs_ef1b_imon=3.08539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.19746E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.70442E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.56249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.03395E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.71063E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=2.87722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1563E1
os_ea1_imon=1.89944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.10867E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.28182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=3.28243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.5469E-10
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26661E1
iondef3_imon=1.53949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2639E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.98481E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=2.03182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.201E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10922E-1
os_ea2_imon=-4.22766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00909E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.20563E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61234E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70008E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.85081E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.3368E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01572E1
cs_anode2_imon=2.28434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.11192E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.94215E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=3.07941E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-1.74747E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.97629E-6
window_vset=0.0E0
window_vmon=2.35062E-1
window_imon=-1.17406E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82593E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.85915E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.16927E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.32766E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77974E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66357E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30717E1
cs_fil1_imon=1.00974E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66187E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.85622E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74199E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.57092E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4375E4	2.1E1	1.47E2	4.1E1	-7.16233E-2	-8.80009E1	-9.53674E-5	-8.80007E1	4.05312E-4	5.91278E-3	9.31025E-2	2.72939E1	-3.2639E1	-3.26537E1	2.68082E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00534E-1
2.0E0	5.373E3	4.0E0	3.16E2	1.6E2	-7.10825E-2	-8.80009E1	2.38419E-5	-8.80006E1	2.14577E-4	5.72205E-3	9.32932E-2	2.7299E1	-3.26701E1	-3.26419E1	2.6783E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.01047E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80011E1	-2.86102E-4	-8.80005E1	2.38419E-4	5.4121E-3	9.3317E-2	2.73511E1	-3.26697E1	-3.26089E1	2.67818E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.10051E-2	-8.80012E1	-4.76837E-5	-8.80006E1	2.86102E-4	5.17368E-3	9.33647E-2	2.73159E1	-3.26621E1	-3.26344E1	2.68184E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.8001E1	1.43051E-4	-8.80005E1	5.24521E-4	5.29289E-3	9.32693E-2	2.72733E1	-3.26987E1	-3.25954E1	2.68348E1	1.73303E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.8001E1	3.09944E-4	-8.80003E1	4.76837E-4	5.76973E-3	9.33647E-2	2.73092E1	-3.26443E1	-3.26012E1	2.68118E1	1.73493E-7	2.52134E-3	2.52134E-3	6.31012E-3	1.99312E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80008E1	4.29153E-4	-8.80001E1	2.6226E-4	5.36442E-3	9.34124E-2	2.7254E1	-3.27137E1	-3.26098E1	2.68316E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80013E1	-4.05312E-4	-8.8E1	5.96046E-4	5.48363E-3	9.30071E-2	2.73086E1	-3.26425E1	-3.25989E1	2.67433E1	1.73303E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.99283E-1
1.2E1	3.07E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80011E1	-2.86102E-4	-8.80002E1	2.86102E-4	5.55515E-3	9.32932E-2	2.72943E1	-3.26735E1	-3.25882E1	2.68364E1	1.73531E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9934E-1
1.3E1	1.6E1	1.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80011E1	-4.05312E-4	-8.80006E1	2.14577E-4	5.74589E-3	9.32455E-2	2.72865E1	-3.26356E1	-3.26098E1	2.68065E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
1.4E1	6.63E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80011E1	-5.00679E-4	-8.80009E1	1.19209E-4	5.79357E-3	9.30548E-2	2.73033E1	-3.2675E1	-3.26307E1	2.6783E1	1.73605E-7	2.50882E-3	2.50882E-3	6.31278E-3	1.9883E-1
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.8001E1	-7.15256E-5	-8.80007E1	5.00679E-4	5.31673E-3	9.29117E-2	2.73325E1	-3.26898E1	-3.26154E1	2.68714E1	1.73454E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9963E-1
1.6E1	3.105E3	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.8001E1	7.15256E-5	-8.80007E1	3.33786E-4	5.55515E-3	9.32217E-2	2.73307E1	-3.25979E1	-3.26578E1	2.68126E1	1.73534E-7	2.5165E-3	2.5165E-3	6.3023E-3	1.9966E-1
1.7E1	3.7076E4	2.3E1	6.87E2	4.7E2	-7.30146E-2	-8.80009E1	9.53674E-5	-8.80007E1	2.86102E-4	5.57899E-3	9.35793E-2	2.72555E1	-3.26854E1	-3.26168E1	2.68052E1	1.73605E-7	2.51498E-3	2.51498E-3	6.30171E-3	1.98446E-1
1.8E1	1.61702E5	6.7E1	7.27E2	5.0E2	-7.33239E-2	-8.8001E1	-2.14577E-4	-8.80006E1	5.72205E-4	5.38826E-3	9.3174E-2	2.73045E1	-3.27487E1	-3.26124E1	2.68136E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98937E-1
1.9E1	2.149E3	4.0E0	7.68E2	5.29E2	-7.286E-2	-8.8001E1	-3.8147E-4	-8.80007E1	4.76837E-4	5.29289E-3	9.32455E-2	2.7351E1	-3.27215E1	-3.26015E1	2.6798E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98937E-1
2.0E1	3.19E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.8001E1	-2.38419E-5	-8.80005E1	3.8147E-4	5.38826E-3	9.30786E-2	2.73457E1	-3.26393E1	-3.26405E1	2.67601E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80013E1	-1.90735E-4	-8.80004E1	2.6226E-4	5.65052E-3	9.32932E-2	2.72751E1	-3.2626E1	-3.2623E1	2.6803E1	1.73457E-7	2.52707E-3	2.52707E-3	6.30202E-3	1.9934E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80014E1	2.86102E-4	-8.80007E1	6.67572E-4	5.19753E-3	9.31025E-2	2.72927E1	-3.26472E1	-3.26443E1	2.67181E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9934E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80014E1	-1.90735E-4	-8.80006E1	3.8147E-4	5.79357E-3	9.32217E-2	2.7301E1	-3.2639E1	-3.26661E1	2.68058E1	1.73454E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98419E-1