[Scan]
initial_time=2016-02-16T04:08:54
final_time=2016-02-16T04:09:14
ip_count=19
run=1030
dataset=9
scan=679
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.82732E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.91545E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=3.87073E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.01627E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=7.85506E-10
mult1=-1.00414E-8
mult2=-2.7226E-9
rf_tmon=-4.41028E-3
rf_agc=3.32374E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.66557E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20181E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.06884E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=2.16548E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00471E0
lens1_imon=1.7699E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.56454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=3.52454E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10847E1
os_restr1_imon=2.88647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=1.91458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=1.27073E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=3.28796E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.3328E-10
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-6.1419E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.60383E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.90697E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23107E0
ionrepsh_imon=2.05265E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36703E-1
os_ea2_imon=-2.63296E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61558E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.88431E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.33713E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.28461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.11464E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89861E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.87609E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10311E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82574E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.60632E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.93579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63315E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=5.04051E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66335E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30684E1
cs_fil1_imon=1.00916E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63111E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66375E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.25752E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00407E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69789E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22195E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9353E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4333E4	1.6E1	1.47E2	4.1E1	-7.44059E-2	-8.80012E1	-2.6226E-4	-8.80008E1	3.33786E-4	5.72205E-3	9.32693E-2	2.73275E1	-3.26809E1	-3.2652E1	2.68018E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
2.0E0	5.57E3	6.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80011E1	-3.57628E-4	-8.8001E1	6.91414E-4	5.79357E-3	9.29832E-2	2.73027E1	-3.26609E1	-3.25997E1	2.67982E1	1.73532E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.99227E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80011E1	-1.90735E-4	-8.80004E1	4.29153E-4	5.45979E-3	9.29356E-2	2.73163E1	-3.26726E1	-3.26201E1	2.68024E1	1.73605E-7	2.51384E-3	2.51384E-3	6.33021E-3	2.00064E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80011E1	-5.72205E-4	-8.80004E1	6.19888E-4	5.55515E-3	9.27925E-2	2.73177E1	-3.26488E1	-3.26446E1	2.67824E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.8001E1	-5.00679E-4	-8.80005E1	4.05312E-4	5.55515E-3	9.30071E-2	2.72727E1	-3.26176E1	-3.262E1	2.67583E1	1.73529E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80009E1	-7.15256E-4	-8.80002E1	3.8147E-4	5.60284E-3	9.2721E-2	2.73122E1	-3.26644E1	-3.2613E1	2.67854E1	1.73531E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80009E1	-5.96046E-4	-8.80003E1	4.05312E-4	5.53131E-3	9.27925E-2	2.73015E1	-3.2641E1	-3.26122E1	2.68076E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.96874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80012E1	-3.8147E-4	-8.80005E1	2.38419E-4	5.93662E-3	9.29356E-2	2.72757E1	-3.26206E1	-3.26188E1	2.6796E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97045E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80011E1	-3.8147E-4	-8.80004E1	3.8147E-4	6.05583E-3	9.31501E-2	2.7324E1	-3.26219E1	-3.26113E1	2.68004E1	1.73457E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.97142E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80011E1	-3.09944E-4	-8.80006E1	7.39098E-4	5.76973E-3	9.30309E-2	2.73237E1	-3.26603E1	-3.26242E1	2.67686E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.97045E-1
1.4E1	6.46E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80011E1	-3.57628E-4	-8.80007E1	5.96046E-4	5.91278E-3	9.28402E-2	2.73246E1	-3.26885E1	-3.2649E1	2.68184E1	1.73309E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.97478E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80014E1	-4.05312E-4	-8.80006E1	3.8147E-4	5.74589E-3	9.33886E-2	2.73177E1	-3.2641E1	-3.26002E1	2.6768E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98592E-1
1.6E1	3.131E3	5.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80014E1	-2.86102E-4	-8.80008E1	6.67572E-4	5.45979E-3	9.30786E-2	2.73087E1	-3.26488E1	-3.26699E1	2.67902E1	1.73416E-7	2.51498E-3	2.51498E-3	6.31563E-3	1.99803E-1
1.7E1	3.7038E4	1.2E1	6.87E2	4.7E2	-7.47149E-2	-8.80013E1	2.38419E-5	-8.80008E1	6.67572E-4	5.48363E-3	9.29356E-2	2.73116E1	-3.26638E1	-3.26638E1	2.67937E1					
1.8E1	1.60793E5	9.4E1	7.27E2	5.0E2	-7.40192E-2	-8.80014E1	-9.53674E-5	-8.80005E1	7.62939E-4	5.50747E-3	9.30071E-2	2.72702E1	-3.26303E1	-3.26217E1	2.68106E1	1.73567E-7	2.51484E-3	2.51484E-3	6.3074E-3	1.98627E-1
1.9E1	2.189E3	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80012E1	-2.14577E-4	-8.80007E1	5.24521E-4	5.72205E-3	9.29594E-2	2.73147E1	-3.26536E1	-3.2629E1	2.67824E1					
2.0E1	3.16E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80009E1	-1.90735E-4	-8.80006E1	7.86781E-4	5.50747E-3	9.2864E-2	2.73193E1	-3.2672E1	-3.25971E1	2.67932E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80017E1	-1.90735E-4	-8.80003E1	6.67572E-4	5.67436E-3	9.30309E-2	2.72809E1	-3.26419E1	-3.26284E1	2.67592E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98491E-1
2.2E1	3.3E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80013E1	-1.90735E-4	-8.80004E1	4.29153E-4	5.36442E-3	9.30309E-2	2.73234E1	-3.26744E1	-3.26142E1	2.68017E1	1.73531E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.97647E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.8001E1	-4.05312E-4	-8.80004E1	7.86781E-4	5.31673E-3	9.29832E-2	2.73057E1	-3.26591E1	-3.26116E1	2.67734E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1