[Scan]
initial_time=2016-02-16T04:11:07
final_time=2016-02-16T04:11:27
ip_count=19
run=1030
dataset=9
scan=684
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.75823E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.48355E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=3.92461E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.89118E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.03661E-10
mult1=-1.00173E-8
mult2=-2.89626E-9
rf_tmon=-5.78617E-3
rf_agc=3.20418E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=4.35817E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62315E0
bslens_imon=2.90782E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.96067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.08504E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05501E1
cs_ea1_imon=2.20348E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98287E0
lens1_imon=1.74689E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04221E1
cs_ea2_imon=1.59505E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.02318E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.97646E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=2.89668E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.89626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63375E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26685E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.28626E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.60126E-10
tplens_vset=1.4E-1
tplens_vmon=1.63907E0
tplens_imon=-4.82936E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.51825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.59222E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98679E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.09698E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=2.00209E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34088E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.94995E-1
os_ea2_imon=-3.20124E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06168E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70899E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.2483E-1
os_ef2bup_imon=-5.08024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11048E1
os_restr2_imon=2.86089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.29268E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.09847E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.97203E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.40939E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.83088E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.77472E-6
window_vset=0.0E0
window_vmon=2.0726E-1
window_imon=-1.06285E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-7.5355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=8.4116E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.84364E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.81367E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.09221E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.04039E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=1.00957E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62986E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66524E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.77107E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75465E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-1.96255E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10756E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4523E4	1.6E1	1.47E2	4.1E1	-7.23964E-2	-8.80013E1	-2.38419E-5	-8.80007E1	3.09944E-4	5.19753E-3	9.32932E-2	2.73141E1	-3.27077E1	-3.26008E1	2.6789E1	1.73303E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
2.0E0	5.542E3	5.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80011E1	-9.53674E-5	-8.80002E1	5.24521E-4	4.95911E-3	9.35555E-2	2.7285E1	-3.26756E1	-3.26366E1	2.67565E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00705E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80012E1	-1.90735E-4	-8.80006E1	4.05312E-4	5.17368E-3	9.35555E-2	2.72915E1	-3.26673E1	-3.25753E1	2.67978E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9883E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80012E1	-7.15256E-5	-8.80008E1	4.05312E-4	5.26905E-3	9.3627E-2	2.73309E1	-3.26891E1	-3.2641E1	2.67962E1	1.73531E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80013E1	-1.66893E-4	-8.80006E1	4.52995E-4	5.14984E-3	9.33409E-2	2.73045E1	-3.26717E1	-3.25779E1	2.67902E1	1.73605E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80012E1	7.15256E-5	-8.80008E1	3.8147E-4	5.57899E-3	9.33409E-2	2.73381E1	-3.26615E1	-3.2647E1	2.68136E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80014E1	9.53674E-5	-8.80005E1	7.15256E-5	5.43594E-3	9.33647E-2	2.72931E1	-3.26681E1	-3.25846E1	2.68088E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80014E1	-2.14577E-4	-8.80005E1	3.09944E-4	5.96046E-3	9.31501E-2	2.73093E1	-3.26639E1	-3.26152E1	2.67902E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80013E1	-2.6226E-4	-8.80003E1	6.91414E-4	5.8651E-3	9.30071E-2	2.72823E1	-3.26729E1	-3.26296E1	2.67902E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80013E1	-7.15256E-5	-8.80003E1	7.15256E-4	5.65052E-3	9.3317E-2	2.73249E1	-3.26801E1	-3.25906E1	2.67986E1	1.73454E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.99977E-1
1.4E1	7.02E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80012E1	-3.57628E-4	-8.80003E1	4.52995E-4	5.55515E-3	9.34124E-2	2.73285E1	-3.26663E1	-3.26573E1	2.67764E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98764E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80011E1	-4.29153E-4	-8.8E1	4.76837E-5	5.34058E-3	9.34839E-2	2.73334E1	-3.26726E1	-3.26195E1	2.68052E1	1.73228E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
1.6E1	3.146E3	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.8001E1	9.53674E-5	-8.80007E1	9.53674E-5	5.4121E-3	9.36031E-2	2.72955E1	-3.26518E1	-3.26224E1	2.67937E1	1.73531E-7	2.5131E-3	2.5131E-3	6.28592E-3	1.97647E-1
1.7E1	3.7158E4	2.3E1	6.87E2	4.7E2	-7.30918E-2	-8.80011E1	-4.29153E-4	-8.80005E1	1.19209E-4	5.76973E-3	9.32693E-2	2.73496E1	-3.26753E1	-3.2629E1	2.68118E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98247E-1
1.8E1	1.60172E5	9.8E1	7.27E2	5.0E2	-7.24736E-2	-8.8001E1	-1.66893E-4	-8.80004E1	4.05312E-4	5.88894E-3	9.33409E-2	2.73423E1	-3.26614E1	-3.2636E1	2.67986E1	1.73379E-7	2.51116E-3	2.51116E-3	6.29098E-3	1.98764E-1
1.9E1	2.168E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80013E1	-2.14577E-4	-8.80004E1	3.8147E-4	5.22137E-3	9.32693E-2	2.73171E1	-3.26579E1	-3.26038E1	2.68208E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
2.0E1	3.19E2	1.0E0	8.08E2	5.58E2	-7.23964E-2	-8.8001E1	0.0E0	-8.80004E1	4.29153E-4	5.48363E-3	9.32932E-2	2.72626E1	-3.26366E1	-3.2649E1	2.6792E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.00151E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80014E1	-2.86102E-4	-8.80005E1	4.05312E-4	5.34058E-3	9.30786E-2	2.73261E1	-3.26591E1	-3.2587E1	2.68024E1	1.73531E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9934E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80014E1	-3.8147E-4	-8.80006E1	3.8147E-4	6.03199E-3	9.31978E-2	2.72709E1	-3.26661E1	-3.26296E1	2.67962E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.9963E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80012E1	-4.29153E-4	-8.80003E1	4.52995E-4	5.26905E-3	9.32932E-2	2.73075E1	-3.26464E1	-3.26302E1	2.68058E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.00499E-1