[Scan]
initial_time=2016-02-16T04:12:01
final_time=2016-02-16T04:12:20
ip_count=19
run=1030
dataset=9
scan=686
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.83432E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.18756E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=3.78764E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.88584E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=7.89094E-10
mult1=-1.01257E-8
mult2=-2.87431E-9
rf_tmon=-4.77679E-3
rf_agc=3.40125E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.90935E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62949E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1925E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.08866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.19973E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.60407E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.59085E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.02306E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.83568E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=2.88683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14885E1
os_ea1_imon=1.87853E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19202E0
cs_ionrep_imon=1.26208E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.26849E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.44689E-10
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-1.37123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.59842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.87323E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22867E0
ionrepsh_imon=2.02669E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71551E-1
os_ea2_imon=-3.4621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10577E1
os_restr2_imon=2.8735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.28281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.91667E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.48568E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-3.56213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.04394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54893E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33917E1
os_fil1_imon=5.25675E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49722E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=1.01013E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66515E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63215E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22275E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.00231E-1
chamber_ion_pmon=1.73532E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.26566E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4472E4	1.8E1	1.47E2	4.1E1	-7.37874E-2	-8.8001E1	-4.76837E-5	-8.80003E1	5.00679E-4	5.55515E-3	9.31978E-2	2.73294E1	-3.26689E1	-3.26156E1	2.67968E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.97731E-1
2.0E0	5.297E3	8.0E0	3.16E2	1.6E2	-7.42513E-2	-8.8001E1	-3.57628E-4	-8.80001E1	4.05312E-4	5.14984E-3	9.32932E-2	2.73314E1	-3.26634E1	-3.26315E1	2.67896E1	1.73605E-7	2.51287E-3	2.51287E-3	6.33388E-3	1.97565E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80011E1	-7.15256E-5	-8.80001E1	5.00679E-4	5.53131E-3	9.35316E-2	2.73273E1	-3.26843E1	-3.26164E1	2.67932E1	1.73452E-7	2.51071E-3	2.51071E-3	6.31294E-3	1.97948E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80011E1	-2.86102E-4	-8.80002E1	2.86102E-4	5.126E-3	9.31263E-2	2.73387E1	-3.26585E1	-3.26296E1	2.68146E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80009E1	-3.8147E-4	-8.80005E1	4.29153E-4	5.19753E-3	9.32455E-2	2.73435E1	-3.26693E1	-3.2608E1	2.68052E1	1.73383E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.8001E1	-5.72205E-4	-8.80005E1	1.90735E-4	5.26905E-3	9.31501E-2	2.73045E1	-3.26494E1	-3.26236E1	2.67986E1	1.73605E-7	2.51203E-3	2.51203E-3	6.33977E-3	1.98491E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80009E1	-3.57628E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.3174E-2	2.73021E1	-3.26891E1	-3.26325E1	2.67908E1	1.73605E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.0064E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80011E1	-2.38419E-5	-8.80006E1	3.33786E-4	5.31673E-3	9.32217E-2	2.72889E1	-3.26543E1	-3.26338E1	2.67974E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00021E-1
1.2E1	3.52E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80013E1	-5.48363E-4	-8.80005E1	1.19209E-4	5.36442E-3	9.32217E-2	2.73153E1	-3.26927E1	-3.25821E1	2.67656E1	1.73303E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98937E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80014E1	-7.15256E-5	-8.80007E1	3.8147E-4	5.65052E-3	9.30309E-2	2.7334E1	-3.26534E1	-3.26306E1	2.6792E1	1.7357E-7	2.52274E-3	2.52274E-3	6.32498E-3	1.98519E-1
1.4E1	7.47E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80011E1	-1.90735E-4	-8.80008E1	5.72205E-4	5.31673E-3	9.29356E-2	2.73327E1	-3.27023E1	-3.26224E1	2.6855E1					
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80009E1	0.0E0	-8.80008E1	3.8147E-4	5.26905E-3	9.31501E-2	2.73213E1	-3.27071E1	-3.26819E1	2.6804E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9883E-1
1.6E1	3.143E3	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80011E1	0.0E0	-8.80005E1	1.43051E-4	5.57899E-3	9.27687E-2	2.73039E1	-3.26915E1	-3.26119E1	2.67583E1	1.73374E-7	2.51804E-3	2.51804E-3	6.32978E-3	1.9852E-1
1.7E1	3.693E4	1.4E1	6.87E2	4.7E2	-7.3401E-2	-8.80013E1	2.6226E-4	-8.80008E1	4.52995E-4	4.98295E-3	9.32217E-2	2.73075E1	-3.26332E1	-3.26392E1	2.68172E1	1.73531E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
1.8E1	1.59826E5	8.4E1	7.27E2	5.0E2	-7.31692E-2	-8.80016E1	-7.15256E-5	-8.80007E1	4.76837E-4	5.45979E-3	9.31025E-2	2.72895E1	-3.26783E1	-3.262E1	2.67848E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
1.9E1	2.278E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80014E1	-3.57628E-4	-8.80005E1	4.29153E-4	5.65052E-3	9.28879E-2	2.73063E1	-3.2644E1	-3.26446E1	2.67806E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9963E-1
2.0E1	2.9E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80016E1	0.0E0	-8.80003E1	3.57628E-4	5.6982E-3	9.30786E-2	2.73063E1	-3.26591E1	-3.27007E1	2.67962E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80013E1	4.76837E-5	-8.80007E1	1.19209E-4	5.31673E-3	9.32693E-2	2.73117E1	-3.26416E1	-3.26272E1	2.67782E1	1.73451E-7	2.51581E-3	2.51581E-3	6.29067E-3	2.00285E-1
2.2E1	3.6E1	2.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80014E1	-3.33786E-4	-8.80006E1	7.15256E-5	5.45979E-3	9.32693E-2	2.73115E1	-3.26347E1	-3.26196E1	2.68041E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.01022E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80015E1	-1.90735E-4	-8.80004E1	1.90735E-4	5.45979E-3	9.31263E-2	2.73003E1	-3.26524E1	-3.26224E1	2.67986E1	1.73532E-7	2.51393E-3	2.51393E-3	6.32858E-3	2.00231E-1