[Scan]
initial_time=2016-02-16T04:12:27
final_time=2016-02-16T04:12:47
ip_count=19
run=1030
dataset=9
scan=687
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.79431E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.09982E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=4.08447E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.83346E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=8.13711E-10
mult1=-1.01498E-8
mult2=-2.82041E-9
rf_tmon=-4.27209E-3
rf_agc=3.40546E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.16791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.88304E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.07028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05307E1
cs_ea1_imon=2.17622E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06546E0
lens1_imon=1.54161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.57169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.05776E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.88539E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=1.90475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28277E0
cs_ionrep_imon=1.27049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.28166E-10
tplens_vset=1.4E-1
tplens_vmon=1.59896E0
tplens_imon=5.502E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26879E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26374E1
iondef2_imon=1.59541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98679E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.02045E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=2.03146E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74892E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.06486E-1
os_ea2_imon=-3.51978E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.32654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.28389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.96131E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.49176E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.08933E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.47365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33925E1
os_fil1_imon=4.68012E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8456E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66644E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30746E1
cs_fil1_imon=1.00872E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62822E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66573E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02209E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.08546E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4315E4	1.7E1	1.47E2	4.1E1	-7.286E-2	-8.80016E1	2.38419E-5	-8.80003E1	2.38419E-5	5.60284E-3	9.33409E-2	2.73074E1	-3.26482E1	-3.26078E1	2.67879E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00363E-1
2.0E0	5.621E3	7.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80017E1	-4.05312E-4	-8.80002E1	4.05312E-4	5.74589E-3	9.34839E-2	2.72947E1	-3.26456E1	-3.26052E1	2.67758E1	1.73605E-7	2.51679E-3	2.51679E-3	6.3126E-3	1.98792E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80018E1	-2.14577E-4	-8.80003E1	2.86102E-4	5.43594E-3	9.33409E-2	2.72985E1	-3.26645E1	-3.26603E1	2.68022E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80016E1	-4.29153E-4	-8.80003E1	6.67572E-4	5.81741E-3	9.31978E-2	2.72909E1	-3.26726E1	-3.26408E1	2.67811E1	1.73529E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80016E1	-2.38419E-5	-8.80004E1	3.09944E-4	5.22137E-3	9.31025E-2	2.72925E1	-3.26711E1	-3.26284E1	2.67893E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9883E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80016E1	-2.38419E-4	-8.80006E1	1.66893E-4	5.34058E-3	9.31978E-2	2.72943E1	-3.26651E1	-3.26254E1	2.6831E1	1.73454E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80016E1	-1.19209E-4	-8.80007E1	2.86102E-4	5.55515E-3	9.3317E-2	2.73123E1	-3.26633E1	-3.2611E1	2.67968E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80015E1	1.66893E-4	-8.80008E1	4.76837E-4	5.60284E-3	9.28164E-2	2.73129E1	-3.26927E1	-3.25785E1	2.68256E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99456E-1
1.2E1	3.07E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80015E1	-1.90735E-4	-8.80007E1	5.96046E-4	5.36442E-3	9.31263E-2	2.72757E1	-3.26753E1	-3.26188E1	2.6819E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80012E1	4.76837E-5	-8.80008E1	5.48363E-4	5.6982E-3	9.33409E-2	2.73027E1	-3.26461E1	-3.25942E1	2.67944E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99456E-1
1.4E1	6.48E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80014E1	-4.76837E-5	-8.8001E1	5.00679E-4	5.38826E-3	9.31025E-2	2.73207E1	-3.27029E1	-3.25731E1	2.6855E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.99E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80016E1	1.43051E-4	-8.80005E1	3.8147E-4	5.4121E-3	9.30786E-2	2.73405E1	-3.26831E1	-3.25924E1	2.67992E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98937E-1
1.6E1	3.05E3	1.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80016E1	-4.76837E-5	-8.80002E1	5.00679E-4	5.22137E-3	9.31025E-2	2.72642E1	-3.26488E1	-3.26278E1	2.67577E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
1.7E1	3.6341E4	2.2E1	6.87E2	4.7E2	-7.17779E-2	-8.80018E1	0.0E0	-8.80007E1	4.05312E-4	5.126E-3	9.32217E-2	2.73411E1	-3.2647E1	-3.26416E1	2.67998E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00151E-1
1.8E1	1.58905E5	1.04E2	7.27E2	5.0E2	-7.18554E-2	-8.80017E1	-3.09944E-4	-8.80006E1	6.19888E-4	5.26905E-3	9.30786E-2	2.73165E1	-3.26951E1	-3.25954E1	2.67968E1	1.73529E-7	2.52318E-3	2.52318E-3	6.29098E-3	1.99456E-1
1.9E1	2.329E3	0.0E0	7.68E2	5.29E2	-7.10825E-2	-8.80016E1	-1.66893E-4	-8.80004E1	7.39098E-4	5.43594E-3	9.31978E-2	2.73153E1	-3.26452E1	-3.26356E1	2.67896E1	1.73531E-7	2.51632E-3	2.51632E-3	6.35059E-3	1.98661E-1
2.0E1	2.9E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80016E1	7.15256E-5	-8.80005E1	6.67572E-4	5.36442E-3	9.35078E-2	2.73198E1	-3.26614E1	-3.26101E1	2.67914E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80019E1	-4.05312E-4	-8.80004E1	4.52995E-4	5.29289E-3	9.34362E-2	2.73087E1	-3.2653E1	-3.26344E1	2.67728E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.8001E1	-3.57628E-4	-8.80005E1	6.4373E-4	5.38826E-3	9.30786E-2	2.72762E1	-3.26732E1	-3.2603E1	2.68165E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98592E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80011E1	-9.53674E-5	-8.80004E1	6.19888E-4	5.14984E-3	9.30786E-2	2.73099E1	-3.26374E1	-3.26879E1	2.67806E1	1.73457E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.98153E-1